x 1 10 22 G 1/8 13 6 M10 x 1.25 47 Up to 1000 Up to 2000 38 163 30 9 5 4 4 105 16 16 37.5 35 M6 x 1 13 24 G 1/4 14 6.5 M12 x 1.25 54 Up to 1000 Up to 2000 46.5 179 37 10.5 6 4 4 106 16 20 37.5 40 M8 x 1.25 17 32 G 1/4 15.5 8 M16 x 1.5 66 Up to 1000 Up to 2000 56.5 194 37 12 9 4 4 121 16 20 45 45 M8 x 1.25 17 32 G 3/8 16.5 8 M16 x 1.5 77 Up to 1000 Up to 2000 72 218 46 14 11.5 4 4 128 17
x 1 56 30 14 57.5 1 8 Rc 41 40 5.5 M6 x 1 62 30 14 64.5 1 4 Rc 49 50 6.6 M8 x 1.25 61.5 35 19 76.5 1 4 Rc 49 60 9 M10 x 1.5 64 35 19 89.5 For rod end nut accessory bracket, refer to page 658.
x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 93 143 50 to 1200 1/4 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 167 109 63 to 1200 1/4 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 167 109 80 to 1400 3/8 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth
x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 1/8 93 143 MK(2) 50 Up to 1200 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 109 167 63 Up to 1200 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 109 167 RS Q G 80 Up to 1400 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71
x 1 M3 x 0.5 M10 x 1 M4 x 0.7 M10 x 1 M4 x 0.7 M20 x 1.5 M5 x 0.8 M26 x 1.5 M6 x 1 M26 x 1.5 M6 x 1 M32 x 2 0.007 0.037 M8 x 1.25 M8 x 1.25 M8 x 1.25 M10 x 1.5 P (Piping port) W X Y ZZ Model Mounting Nut/Included in the package (2 pcs).
38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke.
hole For top mounting (M4) 2 x M6 mounting hole For top mounting (M4) Manual override (Non-locking) (Coil positioning pin) (Coil positioning pin) 3 x 1/4 3 x 1/4 2 x M6 x 1 for bottom mounting 2 x M6 x 1 for bottom mounting Note) There is also VT317-H (Lead wire length: 600 mm).
M6 x 1 depth 7 M6 x 1 effective depth 12 Number of mounting screws and distance between screws are different depending on the strokes. Refer to the Mounting screw dimensions (Distriction of stroke) below.
x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 1/8 93 143 MK(2) 50 Up to 1200 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 109 167 63 Up to 1200 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 109 167 RS Q G 80 Up to 1400 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71
25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke.
M3 x 0.5 0.63 4.5 RHC 1.5 6 M4 x 0.7 MK(2) M6 x 1 5.2 9 RS Q G M8 x 1.25 12.5 12 RS H A M10 x 1.5 24.5 15 Mounting attachment on fingers RZQ When mounting an attachment on the finger, support the finger with a tool like a spanner to prevent twisting.
x 1.0 M6 x 1.0 7 44 110 15 34 M8 x 1.25 M8 x 1.25 WB Bore size (mm) 33 X XA XB YY YL Z st 25 25 < st 100 29 29 st 30 30 < st 100 100 < st 200 200 < st 300 300 < st 350 28 34 42 20 25 32 M6 x 1.0 12 12 16 39 39 3 4 4 17 17 21 45 167 167 171 3.5 4.5 4.5 77 77 83 117 117 121 M6 x 1.0 M8 x 1.25 A, DB, E Dimensions: MLGPL (Ball bushing bearing) A, DB, E Dimensions: MLGPM (Slide bearing
x 1.0 1/4-20UNC 14 46 10 5 69 67.5 5 33 23.3 7 40 5.5 9 7 66 35 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 58 12 6 86 84.5 7 42 29.7 8 50 6.6 11 14 8 80 41 M6 x 1.0 1/4-20UNC M8 x 1.25 5/16-18UNC 19 7 Compact Cylinder/Guide Rod Type Series CQM Auto Switches/Proper Mounting Positions and Height for Stroke End Detection Reed switch Solid state switch D-A9 A B W D-M9 D-F9BAL D-F9 W 12 A B W
x 1.0 M6 x 1.0 11 7 44 110 15 34 M8 x 1.25 M8 x 1.25 WB Bore size (mm) X XA XB YY YL Z st30 30
x 1.0 M6 x 1.0 11 7 44 110 15 34 M8 x 1.25 M8 x 1.25 WB Bore size (mm) X XA XB YY YL Z st30 30
MTS32 73.5 18 14 69.5 2 x cushion needle Basic style Width across flats 14 8 6 Rod cross section 7 7.5 2 x (Rc, NPT, G) 1/8 (Port size) M8 x 1.25 38 17 20 +0.015 0 0 -0.018 4 x M6 x 1.0, effective length 9 5 26 4 x 5.5 through 2 x 4 x 9, counterbore depth 5.5 (Opposite side also) 8.5H7 16h7 44 50 38 38 38 37 77.5 24 136.5 + Stroke 160.5 + Stroke 26 4 x M6 x 1.0, effective length 9 38 29 Rod
x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9 5.5 33 5H9 5.5 18 Series MSQ Dimensions/Size 70, 100, 200 WB effective depth WC Basic type/MSQBA
x 1 9.5 5.6 18 40.2 39 110 40.5 55 42 9 M5 x 0.8 30 MY3A MY3B 140 11 6.6 19 M8 x 1.25 2 28.5 68 M5 x 0.8 16 10 6.8 22 50.2 49 64 140 70 52 50 12 M6 x 1 37 170 14 8.5 23 M10 x 1.5 2 35 84 M6 x 1 15 13 170 8.6 85 26.5 62.7 62 61.5 75 64 12 M6 x 1 45 MY3M Centralized piping YW P PA PB Q PP RR QW T TT WW XXX YH Z ZZ Model Model Rc1/8 PC 55 PD 6 PG 7 VV QQ 16 SS 6 XX UU 18 MY1B25 MY1B32 MY1B40
x 1 M6 x 1 9 13 13 90 110 121 16 19 23 53 70 85 5.5 6.6 8.5 M6 x 1 M8 x 1.25 M10 x 1.5 114 140 170 9 11 14 9.5 16 15 40.5 50 63 5.6 6.8 8.6 24.5 28.5 35 54 68 84 20 25 30.5 39 49 61.5 53 64 75 Rc1/8 Rc1/8 Rc1/4 50 60 80 32 42 37.5 60 80 100 14.5 15 20.5 End lock mechanism (Standard piping/Centralized piping) TL W1 W2 W3 11.5 12 16 PE PF PG Q PP RR QW SS TT UU VV XX WW YH ZZ Z (mm) Model
Stroke adjusting unit Hexagon socket head cap screw End plate tightening torque [Nm] Bore (mm) Torque Thread size 16 20 25 32 40 50 63 M3 M4 M5 M6 M6 M8 M10 0.6 1.4 2.8 4.8 4.8 12 24 B C Note) If there is no gap (clearance) between the slide table and cover (B, C in the drawing above) throughout the stroke range, loosen the hexagon socket head cap screw to readjust the cover, then retighten