CG5-S

x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 93 143 50 to 1200 1/4 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 167 109 63 to 1200 1/4 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 167 109 80 to 1400 3/8 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth

CJ5-S

x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 1/8 93 143 MK(2) 50 Up to 1200 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 109 167 63 Up to 1200 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 109 167 RS Q G 80 Up to 1400 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

x 1 M3 x 0.5 M10 x 1 M4 x 0.7 M10 x 1 M4 x 0.7 M20 x 1.5 M5 x 0.8 M26 x 1.5 M6 x 1 M26 x 1.5 M6 x 1 M32 x 2 0.007 0.037 M8 x 1.25 M8 x 1.25 M8 x 1.25 M10 x 1.5 P (Piping port) W X Y ZZ Model Mounting Nut/Included in the package (2 pcs).

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

hole For top mounting (M4) 2 x M6 mounting hole For top mounting (M4) Manual override (Non-locking) (Coil positioning pin) (Coil positioning pin) 3 x 1/4 3 x 1/4 2 x M6 x 1 for bottom mounting 2 x M6 x 1 for bottom mounting Note) There is also VT317-H (Lead wire length: 600 mm).

Rotary Cylinder Series MRQ Size: 32, 40 1

M6 x 1 depth 7 M6 x 1 effective depth 12 Number of mounting screws and distance between screws are different depending on the strokes. Refer to the Mounting screw dimensions (Distriction of stroke) below.

CJ5-S

x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 1/8 93 143 MK(2) 50 Up to 1200 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 109 167 63 Up to 1200 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 109 167 RS Q G 80 Up to 1400 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M3 x 0.5 0.63 4.5 RHC 1.5 6 M4 x 0.7 MK(2) M6 x 1 5.2 9 RS Q G M8 x 1.25 12.5 12 RS H A M10 x 1.5 24.5 15 Mounting attachment on fingers RZQ When mounting an attachment on the finger, support the finger with a tool like a spanner to prevent twisting.

MLGP

x 1.0 M6 x 1.0 7 44 110 15 34 M8 x 1.25 M8 x 1.25 WB Bore size (mm) 33 X XA XB YY YL Z st 25 25 < st 100 29 29 st 30 30 < st 100 100 < st 200 200 < st 300 300 < st 350 28 34 42 20 25 32 M6 x 1.0 12 12 16 39 39 3 4 4 17 17 21 45 167 167 171 3.5 4.5 4.5 77 77 83 117 117 121 M6 x 1.0 M8 x 1.25 A, DB, E Dimensions: MLGPL (Ball bushing bearing) A, DB, E Dimensions: MLGPM (Slide bearing

2–4

x 1.0 1/4-20UNC 14 46 10 5 69 67.5 5 33 23.3 7 40 5.5 9 7 66 35 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 58 12 6 86 84.5 7 42 29.7 8 50 6.6 11 14 8 80 41 M6 x 1.0 1/4-20UNC M8 x 1.25 5/16-18UNC 19 7 Compact Cylinder/Guide Rod Type Series CQM Auto Switches/Proper Mounting Positions and Height for Stroke End Detection Reed switch Solid state switch D-A9 A B W D-M9 D-F9BAL D-F9 W 12 A B W

MLGP

x 1.0 M6 x 1.0 11 7 44 110 15 34 M8 x 1.25 M8 x 1.25 WB Bore size (mm) X XA XB YY YL Z st30 30M6 x 1.0 12 12 16 33 39 39 3 4 4 17 17 21 45 167 167 171 3.5 4.5 4.5 77 77 83 117 117 121 20 25 32 M6 x 1.0 M8 x 1.25 MLGPL (ball bushing)/Dimensions A, DB, E MLGPM (slide bearing)/Dimensions A, DB, E (mm) (mm) A E A E Bore

MLGP

x 1.0 M6 x 1.0 11 7 44 110 15 34 M8 x 1.25 M8 x 1.25 WB Bore size (mm) X XA XB YY YL Z st30 30M6 x 1.0 12 12 16 33 39 39 3 4 4 17 17 21 45 167 167 171 3.5 4.5 4.5 77 77 83 117 117 121 20 25 32 M6 x 1.0 M8 x 1.25 MLGPL (ball bushing)/Dimensions A, DB, E MLGPM (slide bearing)/Dimensions A, DB, E (mm) (mm) A E A E Bore

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

MTS32 73.5 18 14 69.5 2 x cushion needle Basic style Width across flats 14 8 6 Rod cross section 7 7.5 2 x (Rc, NPT, G) 1/8 (Port size) M8 x 1.25 38 17 20 +0.015 0 0 -0.018 4 x M6 x 1.0, effective length 9 5 26 4 x 5.5 through 2 x 4 x 9, counterbore depth 5.5 (Opposite side also) 8.5H7 16h7 44 50 38 38 38 37 77.5 24 136.5 + Stroke 160.5 + Stroke 26 4 x M6 x 1.0, effective length 9 38 29 Rod

Rotary Table/

x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9 5.5 33 5H9 5.5 18 Series MSQ Dimensions/Size 70, 100, 200 WB effective depth WC Basic type/MSQBA

17

x 1 9.5 5.6 18 40.2 39 110 40.5 55 42 9 M5 x 0.8 30 MY3A MY3B 140 11 6.6 19 M8 x 1.25 2 28.5 68 M5 x 0.8 16 10 6.8 22 50.2 49 64 140 70 52 50 12 M6 x 1 37 170 14 8.5 23 M10 x 1.5 2 35 84 M6 x 1 15 13 170 8.6 85 26.5 62.7 62 61.5 75 64 12 M6 x 1 45 MY3M Centralized piping YW P PA PB Q PP RR QW T TT WW XXX YH Z ZZ Model Model Rc1/8 PC 55 PD 6 PG 7 VV QQ 16 SS 6 XX UU 18 MY1B25 MY1B32 MY1B40

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

x 1 M6 x 1 9 13 13 90 110 121 16 19 23 53 70 85 5.5 6.6 8.5 M6 x 1 M8 x 1.25 M10 x 1.5 114 140 170 9 11 14 9.5 16 15 40.5 50 63 5.6 6.8 8.6 24.5 28.5 35 54 68 84 20 25 30.5 39 49 61.5 53 64 75 Rc1/8 Rc1/8 Rc1/4 50 60 80 32 42 37.5 60 80 100 14.5 15 20.5 End lock mechanism (Standard piping/Centralized piping) TL W1 W2 W3 11.5 12 16 PE PF PG Q PP RR QW SS TT UU VV XX WW YH ZZ Z (mm) Model

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Stroke adjusting unit Hexagon socket head cap screw End plate tightening torque [Nm] Bore (mm) Torque Thread size 16 20 25 32 40 50 63 M3 M4 M5 M6 M6 M8 M10 0.6 1.4 2.8 4.8 4.8 12 24 B C Note) If there is no gap (clearance) between the slide table and cover (B, C in the drawing above) throughout the stroke range, loosen the hexagon socket head cap screw to readjust the cover, then retighten

MY1

x 1 K L 142 172 202 LD 5.6 6.8 8.6 LH 38.7 44.2 47.2 LL 49 64 79 LW 100 122 138 M 10 13 13 MM MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 Bore size (mm) 25 32 40 09 11 14 09.5 16.0 15.0 120 150 180 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 PA 060 080 100 NW 60 74 94 P PB 112 134 150 PG 7 8 9 PP1 12.7 15.5 17.5 PP2 12.7 18.5 20 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 18.9

Compact Cylinder with Air Cushion and Lock Series RLQ

CL1 100 M5 x 100 L 105 M5 x 105 L MLGC 110 M5 x 110 L 120 M5 x 120 L 9 CNG 130 M5 x 130 L 155 M5 x 155 L MNB 180 M5 x 180 L 120 M6 x 120 L CNA 130 M6 x 130 L 140 M6 x 140 L 13.5 CNS 165 M6 x 165 L 190 M6 x 190 L CLS 125 M8 x 125 L 135 M8 x 135 L CLQ 145 M8 x 145 L 12.5 170 M8 x 170 L RLQ 195 M8 x 195 L MLU Working Principle MLGP ML1C Locked Unlocked Brake spring Lock ring Piston rod FREE