How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Q H 05 1 3 5 ZM JIS Symbol Air supply port Exhaust port Vacuum port Port size connection Nozzle diameter 05 07 0.5 mm 0.7 mm 3 5 M5 x 0.8 M3 x 0.5 Specifications Ejector System Circuit 10 1.0 mm 13 1.3 mm Applicable nozzle size (mm) Supply valve P Q Supply valve and release valve 0.5, 0.7, 1.0, 1.3 Air operated valve H M 0.35 MPa 0.5 MPa Supply pressure Components Port size M3 x 0.5 M5 x

VQZ100V-OMT0001

(NPN ) No.VQZ100V-OMT0001 VQZ VQZ VQZ VQZ 3 3 3 3 5 5 5 5 / / / / 2 2 2 2 M5 M5 M5 M5 1/6~1/4 1 1.5Nm ( ( ( ( ) ) ) ) 2 2 2 2) ) ) )Rc Rc Rc Rc Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 DC & & & & / / / / Best Pneumatics Best Pneumatics Best Pneumatics Best Pneumatics No. No. No.

Centering Unit

PE Q S T U W MACM2 X114 68 74 76 10 27.4 12 34 X115 52 6 62 X116 50 4 30 46 60 64 22.5 MACM4 X114 86 90 90 72 78 32.5 50 19 32 20 33 X115 56 6 78 40 X116 54 4 40 6.6 12 19 17 18 M5 7 MACM6 X114 118 125 125 97 113 33.8 53 28 33.3 30 43 X115 59 6 98 60 X116 57 4 60 MACM10 X114 185 197 198 11 152 182 18 53.8 77 31 24 13 0 53.3 50 70 X115 83 6 108 X116 81 4 5 Centering Unit MACM Series

53

Power Cable Specifications Rated value for thermo-chiller Power cable examples Terminal block screw diameter Cable size Crimped terminal on the thermochiller side Power supply Applicable breaker rated current Applicable model 4 cores x 5.5 mm2 (4 cores x AWG10) (Including grounding cable) R5.5-5 HRSH090-ll-20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 30 A M5 3 x 5.5 mm2 (3 x

HRX-OM-X084

Use M5,M6 screws (bolts) or equivalent to the fix the product. Do not drag this product after mounting, as the feet may be damaged. (option -Y) 2. In the case of air cooling type, this product sucks air from the front and discharges it to the back. Please do not block the suction and the discharge air. Please do not install in a sealed place.

Interface Regulator for VQ4000 5 Port Solenoid Valve

Pressure gauge SMC 1 P 5 3 R2 R1 D side PE Pressure Setting Caution 1. Set the pressure of an interface regulator using a flat head screw driver. 2. The pressure adjustment is increased by turning clockwise and decreased by turning counter clockwise. Perform pressure setting by increasing from low pressure to the desired setting. 3.

Valve, Sol, Body ported, 4/5 PORT SOLENOID VALVE, O84, 21.00000 lb

Series: JSY5 (5000 Series), Actuation: 1 (2-position, Single), Manifold Type: 20 (Body Ported), Power Saving Circuit: None, Electrical Entry: LO (L Plug Connector w/o Connector), Cable Length: None, Light/Surge Voltage Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size, Thread Piping: 01 (Rc1/8), PE Plate: PE (JSY1: M5, JSY3: Rc1/16, JSY5

Series: JSY5 (5000 Series), Actuation: 1 (2-position, Single), Manifold Type: 20 (Body Ported), Power Saving Circuit: None, Electrical Entry: KO (M12, w/o Connector Cable), Cable Length: None, Light/Surge Voltage Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size, Thread Piping: 01 (Rc1/8), PE Plate: PE (JSY1: M5, JSY3: Rc1/16, JSY5: Rc1

: PE (JSY1: M5, JSY3: Rc1/16, JSY5: Rc1/8)

Series: JSY5 (5000 Series), Actuation: 2 (2-position, Double), Manifold Type: 20 (Body Ported), Power Saving Circuit: None, Electrical Entry: KO (M12, w/o Connector Cable), Cable Length: None, Light/Surge Voltage Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size, Thread Piping: 01 (Rc1/8), PE Plate: PE (JSY1: M5, JSY3: Rc1/16, JSY5: Rc1

: M5, JSY3: Rc1/16, JSY5: Rc1/8)

HRX-OM-W032

View A L1 L2 L3 PE Inlet of the power supply cable Mount for cable tie Note: Prepare a cable tie. Fasten the power cable to the mount on the base with the cable tie.

SY3000-OMH0002

5 5 / / / / 1 DC VQ (DC ) N.O.( ) 3 () 0.1 2 C-R ( ) C-R ( ) 3 3 EXH ( ) ( ) 3 DC 3% AC 20% (SSR )AC 1) (C-R ) OFF 2)() 4 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / -10 1V () (1) ()COM COM ( 2) 5 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / 2)Rc ( ) Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 DC / Best Pneumatics No. 1 1 ()ISO VG32 MSDS 1 1 M5

VFR2000-OMM0001

) -14No.VFR2000-OMM0001 NO 1(ISO VG 32) [3(EB),5(EA),PE] X(30.20.9MPa0.10.9MPa) 1. 2. 3. 4. 5. 6. 7

VFR5000-OMN0001

Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1:) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 VFR5000-OMN0001 / / / / 1 1 3) 3) 1 1 () 3 VFR5000-OMN0001 VFR5000 Series 5 / 1 DC 3 () 0.1 2 C-R () C-R DC 3% AC 20% ( ) () () 3 3 EXH (VVFS5000-R-04-1,2) ( ) () 3 4 No.VFR5000-OMN0001 VFR5000 Series 5 / (SSR )AC 1) (C-R ) OFF 2)() 1 -10 1 1) M5

Series: JSY3 (3000 Series), Actuation: 1 (2-position, Single), Manifold Type: 20 (Body Ported), Power Saving Circuit: None, Electrical Entry: M (M Plug Connector w/Lead Wire, 300mm), Cable Length: None, Light/Surge Voltage Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size, Thread Piping: R1 (Rc1/16), PE Plate: PE (JSY1: M5, JSY3: Rc1/16

: M5, JSY3: Rc1/16, JSY5: Rc1/8)

M5, JSY3: Rc1/16, JSY5: Rc1/8)

Series: JSY3 (3000 Series), Actuation: 1 (2-position, Single), Manifold Type: 20 (Body Ported), Power Saving Circuit: None, Electrical Entry: LO (L Plug Connector w/o Connector), Cable Length: None, Light/Surge Voltage Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size, Thread Piping: R1 (Rc1/16), PE Plate: PE (JSY1: M5, JSY3: Rc1/16, JSY5