Modular F.R.L. Units

*15 *15 *15 *15 *15 *15 *15 ZA*14 Digital pressure switch: With unit selection function *16 *16 *16 *16 *16 *16 *16 *16 *8 The only difference from the standard specifications is the adjusting spring for the regulator.

CNS

+ 1/2 stroke 75 15 40 l h + l ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) C EA A AL B BN BP BQ CL D E F FA G GA GB GL GR J K KA 125 140 160 16 50 47 145 205 1/2 3/8 115 120 36 90 63 35 14 155 23 25 30 M14 x 1.5 15 31 25 to 1000 16 50 47 161 245 1/2 3/8 128 136 36 90 63 35 14 180 28 30 30 M14 x 1.5 15 31 30 to 1000 18.5 56 53 182 290 1/2 3/8 144 144 40 90 63 43 14 215 35 35 35 M16 x

HRX-OM-M005

applied Inverter-driven flow control function applied Main Tank capacity*7 L Approx.15 Approx.15 Sub Tank capacity*8 L Approx.16 Approx.16 Circulating fluid port (supply/return) Rc 3/4 Rc 3/4 Facility water C / MPa 10 to 35 / 0.3 to 0.7 Required flow of facility water*9 L/min 15 (Facility water at 25C) 15 (Facility water at 25C) Facility water port (inlet/outlet) Rc 1/2 (single system for

53

Standard item Acid consumption amount (at pH4.8) [mg/L] 100 or less v Total hardness [mg/L] 200 or less v Calcium hardness (CaCO3) [mg/L] 150 or less v Ionic state silica (SiO2) [mg/L] 50 or less v Iron (Fe) [mg/L] 1.0 or less v v Copper (Cu) [mg/L] 0.3 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (NH4+) [mg/L] 1.0 or less v Residual chlorine (Cl) [mg/L] 0.3 or

Lightweight and Compact

Water 15% Ethylene Glycol Aqueous Solution Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Current unit system Physical property value Temperature Density [kg/L] Specific heat C [J/(kgK)] Current unit system Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.00 4.2 x 103 1.00 1 x 103 Weight volume ratio [kgf/L] Specific heat C [cal/(kgfC)] 5C 1.02

Rotary Actuator

Size: 30/50/63/80/100 Single shaft with four chamfers: ClRA1BX Double shaft with key: ClRA1BY Double shaft with four chamfers: ClRA1BZ L 0 0.2 L 0 0.2 0 0.1 0 0.1 G G N N H H H U U UU UU M N H L K 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size G H N U L 30 6 13 8 53 7.8 50 11 27 15 89 14 63 13 29 17 105 16 80 15 38 20 130 19 100 19 44 25 156 24 Size H K UU L 30 25 3 90 14 50 36 5 134 25 63 41 5 158

Pin Clamp Cylinders

10.5 25 4 4.5 9.8 6 6 13.3 542 C(L)KQG32/C(L)KU32 Series Options Dimensions Shim C(L)KQG32-X2081 C(L)KQG32-X2082 C(L)KU32-X2321 C(L)KU32-X2322 LOW type HIGH type LOW type HIGH type Guide pin fixing bolt () Guide pin fixing bolt () Shim mounting position (Up to 3 mm) Shim mounting position (Up to 3 mm) Guide pin fixing bolt () Guide pin fixing bolt () 100 + Shim thickness 100 + Shim thickness

MNB

For details, refer to page 9-15-40. 9-6-22 23 Cylinder with Lock Double Acting, Double Rod Series MNBW 32, 40, 50, 63, 80, 100 How to Order CL MNBW L 50 100 D Without auto switch CL1 MLGC With auto switch MDNBW L 50 100 D Y7BW CNG Number of auto switches Built-in magnet MNB 2 pcs. Nil S 1 pc. Double rod type CNA n n pcs.

MNB

For details, refer to page 9-15-40. 9-6-22 23 Cylinder with Lock Double Acting, Double Rod Series MNBW 32, 40, 50, 63, 80, 100 How to Order CL MNBW L 50 100 D Without auto switch CL1 MLGC With auto switch MDNBW L 50 100 D Y7BW CNG Number of auto switches Built-in magnet MNB 2 pcs.

Cylinder with Lock Series CLS

L m m Material: Carbon steel (mm) d (drill through) Applicable bore size (mm) Cotter pin Dd9 L l m Model Dd9 4 x 40 l 4 x 40 l 4 x 40 l 4 x 55 l 5 x 65 l IY-12 IY-14 IY-16 IY-18 IY-25 125 140 160 180, 200 250 25 0.065 0.117 28 0.065 0.117 4 79.5 69.5 5 4 86.5 76.5 5 2 x d 32 0.080 0.142 40 0.080 0.142 50 0.080 0.142 4 94.5 84.5 5 4 115 105 5 5 144 132 6 Cotter pins (2 pcs.) are included.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

FH11 E L M N P H 0.5 32 CS5032 32.5 10.5 22 10 14 15 30 6.6 45 10.5 5.5 5 40 CS5040 38 12 25 12 16 18 35 6.6 55 11 5.5 5 50 CS5050 46.5 15 27 16 21 20 40 9 65 15 6.5 5 51 63 CS5063 56.5 15 32 16 21 23 45 9 75 15 6.5 5 80 CS5080 72 18 36 20 25 27 45 11 95 18 10 5 70 100 CS5100 89 18 41 20 25 30 55 11 115 18 10 5 * Supplied with 4 mounting screws. 138 CP96 Series Dimensions: Pivot Brackets

Compact Cylinder with Air Cushion Series RQ

Add the stroke to calculate the length of intermediate strokes. 778 Compact Cylinder with Air Cushion Series RQ Mounting Bracket Dimensions Foot Style Foot style: RQL/RDQL mm B + Stroke L Special cap bolt Stroke range (mm) Bore size (mm) A LS L B 20 15 to 50 53.7 32 20 14.5 LY LH 25 15 to 50 58.7 36.5 21.5 15 3.2 mm Bore size (mm) 5.8 X A + Stroke LS + Stroke 4 5.8 X LX LZ 4 x 6.6 L1 LH LX

XL

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

Table of Contents

block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

Ionizer

(mm) Distance (mm) Air purge: Yes Supply pressure: 0.5 MPa (20 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.3 MPa (14 L/min (ANR) per nozzle) 20 15 Discharge time (s) Discharge time (s) 15 10 10 1 Hz/60 Hz 1 Hz/60 Hz 5 5 Sensing DC Sensing DC 0 0 500 1000 1500 2000 0 500 1000 1500 2000 0 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.7 MPa (30 L/min (ANR) per

JXCx-OMU0004

16 15 L 11 30.7 64 No.JXC-OMU0004-A 12.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

(kg) 5 1.0 0.5 1 Point of application L Workpiece weight m kg 0.1 Transfer speed V m/min 30 20 10 5 5 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) MIW20 MIS20 MIW25 MIS25 MIW32 MIS32 30 20 100 L = 120 mm L = 100 mm L = 80 mm L = 60 mm L = 40 mm 40 L = 240 mm L = 200 mm L = 160 mm L = 120 mm L = 80 mm L = 180 mm L = 140 mm L = 100 mm L = 60 mm 30 50 20 10 Workpiece weight (kg

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

mm L = 100 mm L = 80 mm L = 60 mm L = 40 mm 40 L = 240 mm L = 200 mm L = 160 mm L = 120 mm L = 80 mm L = 180 mm L = 140 mm L = 100 mm L = 60 mm 30 50 20 10 Workpiece weight (kg) Workpiece weight (kg) Workpiece weight (kg) 5 10 10 5 5 1 1 1 0.5 5 40 30 20 10 5 40 30 20 10 5 40 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) Transfer speed V (m/min) 10-11-6 6 Series MIW/MIS Escapements

ITV

Description ITV10 ITV20 ITV30 L-bracket 100 P3020114 (Mounting thread is not included.) Flat bracket 7 15 25 4 x R3.5 INI-398-0-6 (Mounting thread is not included.)

CY1F

Centralized piping on right L R R L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.