VFS

Brown Brown White White Pink Pink Gray Gray Unused Unused Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.

IZx-OMT0049

200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50 50 100 100 1s 150 150 2s 200 200 0.5s 1s 2s 250

Compact Cylinder Series CQS

, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 12 16 20 25 CQM MU 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSW 560 12 16 20 25 5, 10 Double acting Single acting Return/Extend CQS 567 12, 16 20, 25 Non-rotating Rod Single rod CQSK 575 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSKW 582 Anti-lateral Load

7ND9071en

Valve series MBV QMBV 1) Valve size T5, QT5 QXT5 T25, QT25 QXT25 R, QR E RSOFT 3) FL MBV QMBV 2) D, P, C 4) ZX mm in Dead angle, % 15 1/2 15 20 3/4 15 25 1 14 25.5 19.5 15 25.5 27 12.5 25/1 1/1 11 25/2 1/2 11 25/3 1/3 10 40 1 1/2 12 24.5 12.5 12 16 21 12.5 50 2 10 9 13.5 24.5 12.5 18 8 17 20.5 23 12.5 65 2 1/2 9 13 18 80 3 10 8 12 18 8 16.5 8.5 9 8.5 15.5 100 4 10 8 12 16.5 8.5 16 9 8 7 14.5

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Staition L1 L2 3 58 50 6 89.5 81.5 8 110.5 102.5 10 131.5 123.5 20 236.5 228.5 2 47.5 39.5 4 68.5 60.5 5 79 71 7 100 92 9 121 113 11 142 134 12 152.5 144.5 13 163 155 14 173.5 165.5 15 184 176 16 194.5 186.5 17 205 197 18 215.5 207.5 19 226 218 2.2-18 3 Port Pilot Solenoid Valve Rubber Seal Series SYJ500 Model Weight (g) (1) SY Valve model Actuation Port size Effective area (mm2) (Cv) Grommet

C95Series

" SO, "63 a.5 25, 50, 75, 100,125, 150, 175, 200, 250.300, 350. 400. 450, 500 40 " !

S070

Note) Order is accepted in 10 units. 4-11-4 5 Series S070 3 Port Solenoid Valve Compact Direct Operated Dimensions Base mounted with screws S070B-G-M3 Grommet type 16 3 V100 7 SY 12 18 SYJ 2-3.4 mounting hole VK 150 (Lead wire AWG#26) 5 22 6 VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200

Air Slide Table Series MXQ

Ma = K Mmax Work piece mounting coefficient K: Fig. 3 Allowable moment coefficient : Graph 2 Max. allowable moment Mmax: Table 4 Mar = 36 Mrmax = 36 K = 1 = 1 ' = 0.39/36 = 0.011 May = 1 x 1 x 18=18 Mymax = 18 K = 1 = 1 = 0.39/18 = 0.022 Find the load factor of the static moment.

Guide Cylinder Series MGG

16 54 35 6.6 100 70 130 M10 x 1.5 depth 18 65 30 26.5 35 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 12 19 118 80 11 depth 8 35 100 16 16 60 35 6.6 106 80 73 135 M10 x 1.5 depth 18 35 29 40 129 M8 x 1.25 depth 16 22 150 100 14 depth 10 40 120 19 19 75 50 9 134 95 93 170 M12 x 1.75 depth 21 45 32 50 152 M10 x 1.5 depth 20 22 170 120 17 depth 12 45 150 21 25 90 56 11 152 115 103 194 50

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

-X 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200 For long strokes, it will be made-to-order.

Rotary Actuator/Vane Type

[mm] [mm] Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 14 1 to 14 1 to 14 15 4 to 18 1.5 to 18 1.5 to 18 1.5 to 18 20 4.5 to 20 1.5 to 20 1.5 to 20 1.5 to 20 30 5 to 22 2 to 22 2 to 22 2 to 22 40 18 to 30 18 to 30 18 to 30 18 to 30 Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 14 1 to 14 1 to 14 15 4 to 18 1.5 to 18 1.5 to 18 1.5 to 18 20 4.5 to 20 1.5 to 20 1.5 to 20 1.5 to 20 30 5 to 22 2 to 22 2

Digital Gap Checker ( compatible)

The graphs below show the variation of the distance for the product to turn ON, for 3 types of gap, by changing the supply pressure (50 kPa) when the product is set to turn ON at 150 kPa supply pressure. Detection nozzle: 1.5 Piping: F type: 4 x 2.5 tube Test conditions G, H type: 6 x 4 tube Reference pressure: 150 kPa : Use within the rated pressure range (100 kPa to 200 kPa).

MGQ

, 40, 50, 75, 100, 125, 150, 175, 200 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 26 64 17 10 19 52 74 2 8.5 4 46 36 72 8 30 10 60 37 13 18 47 8 M5 x 0.8 13 M5 x 0.8 7 M5 x 0.8 Rc 1/8 10.5 32 76 21 10 21 62 88 2 9 2 56 42 86 8 38 12 70 37.5 14 26 47.5 9 M6 x 1.0 15 M6 x 1.0 8 M6 x 1.0 Rc 1/8 11.5 MGQM (Slide bearing) A, DB, E Dimensions MGQL (Ball bushing bearing) A, DB, E Dimensions E E

Table of Contents

Polarity Flat ribbon cable connector SOL.A SOL.B 20 18 () () (+) (+) 1 station 19 17 15 13 11 9 10 12 14 16 18 20 2 stations SOL.A SOL.B () () (+) (+) 16 14 Flat Ribbon Cable Connector Assembly (Option) SOL.A SOL.B 12 10 () () (+) (+) 3 stations Note Assembly part no.

CLQ

Applicable bore size (mm) 32, 40 UA C d1 d2 H K L UT Weight (g) 25 9 YB-03 32, 40 6.5 10 18 50 80 YU-03 15.8 14 M8 x 1.25 8 7 17 6 11 11 YB-05 50, 63 6.5 12 22 60 120 YU-05 50, 63 19.8 18 M10 x 1.5 10 40 7 17 6 13 YU-08 M16 x 2 80 24.8 23 13 90 9 22 8 20 14 YB-08 80 8.5 16 28 75 230 YU-10 M20 x 2.5 100 29.8 28 14 160 11 26 10 26 18 YB-10 100 10.5 18 36 90 455 9-10-25 25 Series CLQ Proper

CRBU

CRA1 CRQ MRQ MSQ MSUB L1 (mm) (mm) (mm) Size 10 15 20 30 X Size 10 15 20 30 L1 Y Size 10 15 20 30 L1 L2max X 5 (8 Y) to (Y to 1) 6 (9 Y) to (Y to 1.5) 7 (10 Y) to (Y to 1.5) 8 (13 Y) to (Y to 2) 19 (14 X) to (X 1) 10 (18 X) to (X 1.5) 10 (20 X) to (X 1.5) 12 (22 X) to (X 2) 3 to 8 3 to 9 3 to 10 5 to 13 3 to 14 3 to 18 3 to 20 5 to 22 3 to 14 5.5 to 18 7 to 20 7 to 22 9

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50 MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N 11-9-9 10 Courtesy of Steven Engineering, Inc.-230 Ryan

Possible to transfer a workpiece at low-speed.

Applicable shaft type: W MSU Y = X = Long shaft side Long shaft side Long shaft side CRJ Long shaft side CRA1 X = CRQ2 Short shaft side Short shaft side Short shaft side MSQ Y = Y = Short shaft side MSZ Size 10, 15 Size 20, 30, 40 (mm) (mm) (mm) X 2 to 18 2 to 20 17 to 30 18 to 32 18.5 to 36 Y 1 to 9 1 to 10 1 to 15 1 to 18 1 to 20 Y 1 to 9 1 to 10 1 to 15 1 to 18 1 to 20 X 2 to 18 2 to 20

CQS

Rubber bumper is standard equipment for long stroke type. 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 Action 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 D Double acting 25 For "Manufacture of Intermediate Strokes", refer to page 7-4-5. Applicable Auto Switch/Refer to page 7-9-1 for further information on auto switches.

0.55

SYJ 6 to 8 Pg9 1/4 VQZ 2 x 1/8 (External pilot port) Pilot EXH VP 2 x 13 (Mounting hole) VG EXH 243.1 250.7 PA PE VP3 159 166 150 140 105 90 IN EXH OUT 62 62 25 2 118 41 41 (EXH port) 2 x 1 / , 1 / , 2 4 1 2 1 (IN, OUT port) When B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned at left, when looking at the EXH port in the front face.