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16 32.5 60 6 57 20 35.5 121 41 26 16 9.5 110 M12 x 1.75 14 65 (6) 120 150 7 M26 x 1.5 100 Rc3/8 105 30 16 68 162 Width across flats 22 length 4.5 Technical Data Use a thin wrench when tightening the piston rod.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

Environment

Nil Without cable H Without cable (Connector only) 1 1.5 Applicable Stroke Table : Standard Stroke [mm] Manufacturable 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 stroke range Model [mm] LEFS25 50 to 600 LEFS32 50 to 800 LEFS40 150 to 1000 * When the driver type is selected, the cable is included. Select cable type and cable length.

Compact Cylinder

10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 55 60 65 70 75 80 85 90 95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110

33

14 Circulating fluid pressure [MPa] Circulating fluid pressure [MPa] Outlet: 60 Hz Outlet: 60 Hz 0.12 0.12 12 12 0.10 0.10 Pump head [m] Pump head [m] 10 10 0.08 0.08 8 8 Outlet: 50 Hz Outlet: 50 Hz 0.06 0.06 6 6 0.04 0.04 4 4 Allowable operating range Allowable operating range Return port Return port 0.02 0.02 2 2 0.00 0.00 0 2 4 6 8 10 12 14 16 0 2 4 6 8 10 12 14 16 Circulating fluid flow

energy saving effect

HRSH HRSH Polyester band HRSE Cardboard box Hanging position HRZ 60 or less HRZD Forklift insertion side HRW HECR Less than 150 mm HEC Forklift insertion side Wooden skid HEB Less than 150 mm Less than 150 mm HED Forklift insertion side HEA Forklift insertion side Less than 150 mm Model Weight [kg] Dimensions [mm] HRSH100-Al-l 221 IDH HRSH250-A-20 Height 1585 x Width 1185

0.

Formula: L5 = 16n + 11 L3 = 16n + 22 n: Stations (Max. 20 stations) Dimensions L n 2 3 110.5 100 70 20.5 59 4 123 112.5 86 18.5 75 5 135.5 125 102 17 91 6 148 137.5 118 15 107 7 173 162.5 134 19.5 123 8 185.5 175 150 18 139 9 198 187.5 166 16 155 10 223 212.5 182 20.5 171 11 235.5 225 198 19 187 12 248 237.5 214 17 203 13 260.5 250 230 15.5 219 14 285.5 275 246 20 235 15 298 287.5 262 18

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

SS5Y3-60Stations B (Light/surge voltage suppressor) Manual override (non-locking) Stations 2 3 4 5 6 7 8 9 10 (Station n) (Station 1) 43.3 (3.2) L1 110.5 123 135.5 148 160.5 173 173 185.5 198 33.4 (3) L2 100 112.5 125 137.5 150 162.5 162.5 175 187.5 L3 86 96.5 107 117.5 128 138.5 149 159.5 170 [44.7] L4 12 13 14 15 16 17 12 13 14 38.2 28.2 25.8 20.7 19.2 11 12 13 14 15 16 17 18 19 20 Stations

NCQ8

400 NCQ8B150-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B200-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B250-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B300-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B400-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #10-24UNC-1 1/8 1 1/4

Table of Contents

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

Micro Mechanical Valve Series VM1000

39 38 21 30.5 1.5 1.5 Symbol 18.5 3 (B) 2 (A) 4 (161) (109.5) (140) 12 14 PE EA P EB 3 (EB) 1 (P) 5 (EA) B A 91 17.8 14 14 17 23.3 12.8 38 36 3 13 22.5 2 13.8 26.7 30 18 5 x 1/8 0.5 MPa supply 2 x 3.5 mounting hole T.T. 26 N F.O.F.

CE

J K B I Bore size (mm) 32 40 50 63 Standard stroke 64 131 27 16 45 49.5 M14 x 1.5 4.5 14 90 14 50, 75, 100, 125, 150, 175, 200, 250, 300 71.5 177 27 16 52 57 M14 x 1.5 5 14 136 24 100, 125, 150, 175, 200, 250, 300, 400, 500 85.5 200, 300, 500 193 32 20 64 71 M18 x 1.5 7 18 144 22.5 98.5 200, 300, 500 194 32 20 77 84 M18 x 1.5 7 18 145 21 P M N O T X Z L Q Bore size (mm) 32 40 50 63 41 34

Power Clamp Cylinder

Space at manual release Leave a space in order to release by hitting with a plastic hammer. 150 Min.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

216.5 234 262.5 273 13 205 222.5 250 260.5 12 193.5 211 237.5 248 11 182 199.5 225 235.5 10 170.5 188 212.5 223 9 159 176.5 200 210.5 8 147.5 165 187.5 198 7 136 153.5 175 185.5 6 124.5 142 162.5 173 5 113 130.5 150 160.5 4 101.5 119 150 160.5 3 90 107.5 137.5 148 2 78.5 96 125 135.5 1 67 84.5 112.5 123 L1 L2 L3 L4 584 5 Port Solenoid Valve/Plug-in Unit 10-SQ1000 Kit (Lead wire cable) L

CRB2/CRBU2/CRB1

NBR 14 Holding rubber Parts list No.

Digital Gap Checker ( compatible)

The graphs below show the variation of the distance for the product to turn ON, for 3 types of gap, by changing the supply pressure (50 kPa) when the product is set to turn ON at 150 kPa supply pressure. Detection nozzle: 1.5 Piping: F type: 4 x 2.5 tube Test conditions G, H type: 6 x 4 tube Reference pressure: 150 kPa : Use within the rated pressure range (100 kPa to 200 kPa).

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

) 4.5 (11) 0.004 0.012 0 0.043 M5 6 14 42 29 10 20 4.5 1.5 7 10 0.5 36 M5 (10) M5 (18) 5.5 (16.5) 0 0.043 M5 0.005 0.014 8 16 50 40 13 22 5 2 8 12 1.0 43 11-2-14 14 Series CRB2 Rotary Actuator Vane Style Double vane type Following illustrations show the intermediate rotation position when A or B port is pressurized.

Table of Contents

) 4.5 (11) 0.004 0.012 0 0.043 M5 6 14 42 29 10 20 4.5 1.5 7 10 0.5 36 M5 (10) M5 (18) 5.5 (16.5) 0 0.043 M5 0.005 0.014 8 16 50 40 13 22 5 2 8 12 1.0 43 11-2-14 14 Series CRB2 Rotary Actuator Vane Style Double vane type Following illustrations show the intermediate rotation position when A or B port is pressurized.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

) 4.5 (11) 0.004 0.012 0 0.043 M5 6 14 42 29 10 20 4.5 1.5 7 10 0.5 36 M5 (10) M5 (18) 5.5 (16.5) 0 0.043 M5 0.005 0.014 8 16 50 40 13 22 5 2 8 12 1.0 43 11-2-14 14 Series CRB2 Rotary Actuator Vane Style Double vane type Following illustrations show the intermediate rotation position when A or B port is pressurized.

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Page 150 Circulating Fluid Typical Physical Property Values ... Page 150 Options With Earth Leakage Breaker . Page 145 Specific Product Precautions . Page 151 With Automatic Fluid Fill Function . Page 145 Applicable to Deionized Water Piping . Page 145 Conforming to CE/UL Standards .