Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without
Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to
0 (15) 25 D-M9, D-M9V 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-F9W, D-F9WV 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-A9, D-A9V 0 (15) 0 0 50 50 (61) 38 38 (53) 0 (11) 32 D-M9, D-M9V 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-F9W, D-F9WV 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-A9, D-A9V 0 (15) 0 0 54 54 (64) 48 48 (63) 0 (10) 40 D-M9, D-M9V 10 (17) 0 0 54 59 (66) 48 58 (65) 5 (12)
0 Semi-standard (option) ID200 Basic size Symbol Nil B Z Description Bracket 20 30 40 60 Adsorbent for low dew point Symbol Port size Symbol Size Applicable standard size Power supply voltage Thread type 20 30 40 60 Symbol Description 02 04 06 1 4 1 2 3 4 Symbol Nil Type Rc Single phase 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) Single phase 110 VAC (50 Hz) Single phase 200 VAC (50 Hz) 200
Unit Representation Symbol Description Display unit for product name plate and pressure gauge: MPa Display unit for product name plate and pressure gauge: psi Nil Note) Z Note) This option is available for use outside Japan only. (The SI units must be used in Japan.) 2.
The LXS can be operated with eilher the LCOD-22oAD (2o) or LC6D507AD (5o) basic stepper d ver, the LCGC-22oAD (20) positioning driver, or other compatible driver. See pages 40-46 lor more informalion on Sl\4C's LC6 series drivers.
/Program No. selection 1 5 DI0 19 20 LZR LZ Encoder Z -phase pulse 23 DI1 Point table No.
Style: Pressure Switch w/ T-Spacer, Body Size: 40 (AC40), Thread Type: N (NPT), Port Size: 03 (3/8), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: Z (5m), Pressure Unit of the Scale Plate: MPa
Style: Pressure Switch w/ T-Spacer, Body Size: 40 (AC40), Thread Type: N (NPT), Port Size: 04 (1/2), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: Z (5m), Pressure Unit of the Scale Plate: MPa
Style: Pressure Switch w/ T-Spacer, Body Size: 40 (AC40), Thread Type: Rc, Port Size: 03 (3/8), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa
Style: Pressure Switch w/ T-Spacer, Body Size: 40 (AC40), Thread Type: Rc, Port Size: 03 (3/8), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa
Style: Pressure Switch w/ T-Spacer, Body Size: 40 (AC40), Thread Type: Rc, Port Size: 04 (1/2), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa
Style: Pressure Switch w/ T-Spacer, Body Size: 40 (AC40), Thread Type: Rc, Port Size: 04 (1/2), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa
Style: Pressure Switch w/ T-Spacer, Body Size: 40 (AC40), Thread Type: N (NPT), Port Size: 02 (1/4), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa
Style: Pressure Switch w/ T-Spacer, Body Size: 40 (AC40), Thread Type: N (NPT), Port Size: 02 (1/4), Set Pressure Range: 6 (0.1 to 0.6 MPa), Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: P (MPa/psi Dual Scale)
Style: Pressure Switch w/ T-Spacer, Body Size: 40 (AC40), Thread Type: N (NPT), Port Size: 02 (1/4), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa
Style: Pressure Switch w/ T-Spacer, Body Size: 40 (AC40), Thread Type: N (NPT), Port Size: 02 (1/4), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: P (MPa/psi Dual Scale)
Style: Pressure Switch w/ T-Spacer, Body Size: 40 (AC40), Thread Type: N (NPT), Port Size: 02 (1/4), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 0.5m, Pressure Unit of the Scale Plate: P (MPa/psi Dual Scale)