Aluminum High Vacuum Angle Valve VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.
rection: Bighl to lefl G D splay units for product name pate and presslrr gauge:PS , 'F AR1010 60.
Mounting hole 1.5 ZZ + Stroke S + Stroke F FY 40 (mm) B WB 13 13 13 16 ZZ H H2 H1 B2 B1 80 80 82 108 F S 1/8 1/8 1/8 1/4 P A 20 25 32 40 AL 18 22 22 24 D 15.5 19.5 19.5 21 C2 34 40 40 52 FD 30 37 37 47.3 E 8 10 12 14 GC 13 13 13 16 FT 7 7 7 7 KA FL 10.5 10.5 10.5 13.5 FX 4 4 4 5 FY 60 60 60 66 FZ 36 Z 75 75 75 82 GA 8 8 8 11 GB 6 8 10 12 I 6 6 6 6 K 28 33.5 37.5 46.5 MM 5 5.5 5.5 7 NN 24
( ) 5H9 depth 5 +0.030 0 n x 5.5 6 60 150 D x 150 (= E) B 15 15 Note 1) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more because of round chamfering.
) AC servo motor (S6) 200 to 230 VAC 50/60 Hz AC servo motor (S7) AC servo motor (S8) Dimensions (mm) LECSAm 40 135 2 x 6 Mounting hole 2 x 6 Mounting hole 50 (Bearing surface thickness 5) CNP1 CNP1 CNP2 CNP2 130 120 130 120 CN1 CN1 CN3 CN3 CN2 CN2 6 6 5 5 6 5.5 LECSAm-S4 40 6 Mounting hole (Bearing surface thickness 4) 6 135 (170: LECSBm-S8) LECSBm 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161 168 CN1
A B Effective area (mm2) Weight (g) M-5ALN-4 M-5ALU-3, -4 C D 13 15 12.5 13.3 15.3 9 11 8.5 9.3 11.3 5 7 4.5 5 7 1.8 2.5 1.6 1.8 2.5 1.4 2.4 1.1 1.4 2.4 M-5ALN-4 M-5ALN-6 M-5ALU-3 M-5ALU-4 M-5ALU-6 4.0 4.4 4.0 4.1 4.5 SM5B, #6 to #10 M-5ALN-6 M-5ALU-6 Barb elbow for nylon tube: M-5ALHN-4, -6 Barb elbow for soft tube: M-5ALHU-3, -4, -6 C D Part No.
Auto Switch Internal Circuits D-A90V OUT () Brown Contact protection box CD-P11 CD-P12 Auto Switch Weights Reed switch (g) OUT () Blue D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model Lead wire length 0.5m 6 6 6 6 8 8 Lead wire length 3m 30 30 30 30 41 41 D-A93V LED Auto Switch Dimensions Brown (Red) Contact protection box OUT (+) Brown Resistor Reed switch D-A90, D-A93, D-A96 Zener diode CD-P11
47 C 11 21 27 34.5 35.5 44.5 A 19.5 29.5 35.5 43 44 53 6 10 15 20 25 32 Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.
2] 2] 2] 2] 2] [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 10 200 5 200 20 200 12 200 6 200 1 20 300 10 300 30 300 20 300 10 300 2 30 400 15 400 40 400 30 400 15 400 3 40 500 20 500 50 500 40 500 20 500 4 50 600 25 600 60 600 50 600 25 600 5 60 700 30 700 80 700 60 700 30 700 6 80 800 40 800 100 800 80 800 40 800 7 100 900 50 900 200 900 100 900 50 900 8 150 1000 75
Note 12 16 20 25 32 40 50 D-F7 , J79 D-F7 V D-J79C D-F7 W, J79W D-F7 WV D-F7BAL, F7BAVL D-F7 F D-F7NTL D-F7, D-F7V D-J79, D-J79C D-F7W, D-F7WV D-J79W D-F7BAL, D-F7BAVL D-F7NTL, D-F79F Switch mounting screw (M3 x 0.5 x 10 ) Switch spacer Switch mouinting nut D-A7 , A80 D-A73C, A80C D-A7 H, A80H D-A79W 6 6 6 32, 40 50 BQ-2 D-F7LF 8 7 8 D-F9V D-F9W, D-F9WV D-F9BAL Switch mounting bracket Switch
Auto Switch Internal Circuit D-A90 (V) Contact protection box OUT () Brown Reed switch Unit: g Weight Table CD-P11 OUT () Blue CD-P12 D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model Lead wire length: 0.5 m 6 6 6 6 8 8 D-A93 (V) Lead wire length: 3 m 30 30 30 30 41 41 LED diode Brown OUT (+) Brown Contact protection box Resistor Unit: mm Dimensions Reed switch Zener diode CD-P11 D-A90/D-A93/D-A96
Refer to page 6 for the weight of DIN rails. 18 Cassette Type Manifold Series SZ3000 Manifold Exploded View Type 60 (non-plug-in) manifold U side q e DIN rail holding screw r t w D side DIN rail holding screw y Description No. Part No.
47 C 11 21 27 34.5 35.5 44.5 A 19.5 29.5 35.5 43 44 53 6 10 15 20 25 32 Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.
D-M9 D-M9W D-M9A D-M9V D-M9WV D-M9AV Bore size (mm) 80 Auto switch model (n 2) 2 40 50 63 100 20 + 40 20 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59/F59F D-F5W/J59W D-F5BA/F5NT D-A5/A6 D-A59W D-Z7/Z80 (n = 2, 4, 6, 8 ) Note 1) 4.5 5 6 7.5 9 (n 2) 2 20 + 30 20 (n = 2, 4, 6, 8 ) Note 1) 4 4.5 4.5 5.5 5.5 D-F5/J59/F5W D-J59W/F5BA D-F59F/A5/A6 (n 2) 2 20 + 55 20 10.5 12 14.5 (n = 2, 4, 6,
(lowesllrmrt OFF) AL30 lo 60 Thread type l,4elal bowl AL]01l) 60 A L l 0 1 0 6 0 Nylon bow (inc udinq siqhl dome) AL10 to 60 Nleta bowl with leve qauqe AL3o io 60 AL2O Fow d rection:Righl to eJt Alj0to60 Drain cock with barb frtling:06 x 04 nylon tube AL30 to 60 Port size Drspay -a 15 Jor p odJcl dmp pl"_e ano p,es"urF qdJqe DSI "l AL10 to 60 Wfen mo,e lhan one specJcation s reqL red,Indcale
XAH7 depth 6 WB Q GB 37.5 + Stroke C + Stroke WA 17 J K S 2-Rc 1/8 (plug) 6 XAH7 depth 6 10 HR G E B + Stroke A + Stroke 2-Rc 1/8 With front lock XB XAH7 15 8.4 5.4 HN d e 4.5 3 6 XAH7 24 End lock mechanism (Locking type manual release) T-slot dimensions 24 (mm) Section XX detail Bore size (mm) d e 15 For 25 2.8 7.8 20 DM 3 8.2 25 With rear lock Refer to "Manufacture of Intermediate Strokes
D-A9 30 Note 1) 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) 20 + 35 D-M9V 35 20 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) 15 + 35 D-A9V 25 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) 20 + 35 35 20 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-C7 D-C80 60 + 45 (n 2) 20 + 45 60 20 5 (n = 2, 3, 4, 5
LS + Stroke LX LZ ZZ + Stroke Bore size (mm) Stroke range A AL B1 B C D GA GB H H1 I J K KA LD LH LS LT LX LZ M MM NA P S X Y ZZ 20 Up to 350 18 15.5 13 37.5 16.5 8 18 12 35 5 31 M4 x 0.7 5 6 6 22 59 3 40 50 3 M8 x 1.25 29 1/8 83 15 7 124 25 Up to 400 22 19.5 17 41.5 18.5 10 18 12 40 6 33 M5 x 0.8 5.5 8 6 25 59 3 44 60 3.5 M10 x 1.25 29 1/8 83 15 7 129.5 32 Up to 450 22 19.5 17 44 20 12
1.25 29 1/8 83 15 7 124 25 Up to 400 22 19.5 17 41.5 18.5 10 18 12 40 6 33 M5 x 0.8 5.5 8 6 25 59 3 44 60 3.5 M10 x 1.25 29 1/8 83 15 7 129.5 32 Up to 450 22 19.5 17 44 20 12 18 12 40 6 38 M5 x 0.8 5.5 10 7.2 25 59 3 44 60 3.5 M10 x 1.25 35.5 1/8 85 16 6 131.5 40 Up to 800 30 27 19 53.5 26 16 19 13 50 8 47 M6 x 1.0 6 14 7.2 30 66 3 54 75 4 M14 x 1.5 44 1/8 93 16.5 6.5 150 50 Up to 1200 35
40 168 135 0.8 H LECSS2-T8 40 168 170 1.0 LECSS2-T9 60 168 185 1.4 W D 4.8.3 [mm] a1 c d1 a a1 B c d d1 e e LECSS2-T5LECSS2-T7 LECSS2-T8 6 6 1560.5 6 M5 b LECSS2-T9 c 12 12 1560.5 6 420.3 M5 d a 4.9 /LECS / 1./ YES [ ]NO [ ] 2.