100

(Tank capacity: 1 L) (Tank capacity: 1 L) 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure in tank [kPa] Vacuum pressure in tank [kPa] ZL6H ZL6M ZL3H ZL3M Time to reach vacuum [S] 1 2 3 4 5 6 0 Time to reach vacuum [S] 1 2 3 4 5 6 7 8 9 10 0 Break Flow Rate Characteristics (Representative value) Vacuum Breaking Time (Representative value) Break flow rate

Direct Solenoid

115/00 120/60 0,01s 0.018 115/60 120/60 0.014 0_014 .011 liho lo Dedr.rgiz: (S@nds) tLts: R.9or'6 liir'.6 et r|easurd with solsoid5 al 70'F (21iC.), 10o% voltags, srtd tr vstu clan ed lobdtod. At tin6s ft mGUd by mizirE ar rhe 160 ooint m f|o sm waw.

MNB

(different sides or same side) 15 25 1 pc. 10 Auto Switches / Proper Mounting Position and Height for Stroke End Detection Reed switch Solid state switch A B Hs A B Hs Ht Ht Auto switch mounting position Auto switch mounting height D-A5 D-A6 D-A59W D-F5, D-J5 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5, D-A6 D-A59W D-F5NTL D-F5W, D-J59W D-F5BAL, D-F5NTL Bore size (mm) Bore size (mm) Hs Ht Ht Hs B

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

With auto switch: MDSUB3 1) 24: When using D-90/90A/S99(V)/T99(V)/S9P(V) 30: When using D-97/93A 2) 60: When using D-90/90A/97/93A 69: When using D-S99(V)/T99(V)/S9P(V) CRB2 CRBU2 If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type.

MY1

Operating range MY1MW (Slide bearing guide type) MY1CW (Cam follower guide type) (mm) (mm) Auto switch model Bore size Auto switch model Bore size 16 20 25 32 40 50 63 16 20 25 32 40 50 63 D-A9 D-A9 11 7.5 11 7.5 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-M9/M9V D-M9W/M9WV D-M9A/M9AV 7.5 7.5 8.5 8.5 9.5 7 6 7.5 7.5 7 8 8.5 7 6 D-Z7/Z80 D-Z7/Z80 12 12 12 11.5 11.5 12 12 12 11.5 11.5 D-Y59/Y69 D-Y7P

Shock Absorbers and Rate Controls

All dimensions in mittimeiers. 26 I Non-Adjustable Hydraulic Series lmperial Accessories sroP BAR (SB) ['l E -T I c __l _ l F --->l nr tdl o&| (n.ll A I ( D T I Boh Sire W.hhi r5&706300 Pll500 5odo5 l s t T 2 i t I 1 . 6 3 l . l l I l l I l l 6 r r f f r l k " D s ? l y t . I 6 . 1 158650300 PM?

NCA1

X B 5 S T D. R O D T H R E A D S T D.

Air Cylinder NCA1 Series

X B 5 S T D. R O D T H R E A D S T D.

REC

30.0 40 70.0 39.5 64.0 33.5 69.0 38.5 65.5 35.5 67.5 37.0 67.0 36.5 63.5 33.0 Auto Switch Mounting Height (mm) D-C7 D-C8 D-H7 D-H7lW D-H7lF D-H7BAL D-B5 D-B6 D-B59W D-G5NTL D-H7C D-G39 D-K39 D-A33 D-A34 Bore size (mm) D-C73C D-C80C D-A44 HS HS HS HS HS 20 24.5 27 62 69.5 27.5 25 27 29.5 64.5 72 30 32 30.5 33 68 75.5 33.5 40 35 37.5 72.5 80.0 38 4.9-16

VQC

: D-sub connector (25P) (Conforms to MIL-C-24308) 2-C8 3(R) port n 1 2 3 4 5 6 7 Stations D-side 8 U-side DIN rail clamp screw 62.5 60 40.5 35 18.5 25 7.5 9.5 (7.5) (12) 2-C8 1(P) port 20.5 2n-C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 34 P = 10.5 Formulas: L1 = 10.5n + 45, L2 = 10.5n + 102 n: Stations (maximum 24 stations) n L L1

VXP21/22/23

) Oil (Standard) (D, E) High temperature oil (3) (S) (D) 99 100 183 AC DC AC DC 60 40 80 60 60 40 40 60 Maximum Minimum 1 10 5 (2) 10 (1) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E etc. in parentheses are option symbols.

Non-contact Gripper

80 100 0 0.2 ZP2V Size (mm) 0.3 Totaled 5 size: 20/40/60/80/100 0.4 ZP 0.5 0 0.5 1 1.5 2 2.5 Low profile cyclone type Totaled 6 size: 40/60/80/100/ l120/l150 ZPT ZPR Time (sec.)

High Power Cylinder Series RHC

HS 8.5 8.5 SMC SMC 16 16 A 36.7 Auto switch A 38.2 B Auto switch Proper auto switch mounting position Auto switch mounting height (mm) (mm) D-B5 D-B6 D-H7 D-H7C D-G5NTL D-H7 W D-H7 F D-H7BAL D-C7 D-C8 D-C73C D-C80C D-B5/B6 D-B59W D-G5NTL Bore size (mm) D-C73C D-C80C D-B59W D-C7,D-C8 D-H7 D-H7C D-H7 W D-H7 F D-H7BAL Bore size (mm) A B A B A B A B A B A HS HS HS B 27 27.5 24.5 20 20 15 17.5

CG1

,B6 D-C7,C8 D-C73C D-C80C D-G5 D-K5 D-G5NTL D-H7W D-H7F D-H7BAL D-B59W D-H7 D-H7C D-C73C D-C80C D-G5W, K59W D-G59F D-G5BAL Bore B 16 (24) 16 (24) 17 (25) 19.5 (28.5) 24 (36) 24 (36) 32.5 (46.5) 32.5 (46.5) B 20.5 (28. 5) 20.5 (28.5) 21.5 (29.5) 24 (33) 28.5 (40.5) 28.5 (40.5) B 17.5 (25.5) 17.5 (25.5) 18.5 (26.5) 21 (30) 25.5 (37.5) 25.5 (37.5) 34 (48) 34 (48) B 18 (26) 18 (26) 19 (27) 21.5

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Q = D __ 4 6 _ 1000 Q = (D d) __ 4 6 _ 1000 Formula (1) .

MXF

23.4 74.7 50.2 64.7 26.7 40.2 24.7 16.7 14.7 Solid State Switch: D-M9BV, D-M9NV, D-M9PV, D-F9WV (mm) B E B Stroke Model Stroke A 100 75 50 30 20 10 100 75 50 30 20 10 MXF8 13.5 6 1 6 14 9 14 MXF12 16 25.1 9.1 9.1 33.1 17.1 17.1 MXF16 21.2 42.3 21.8 11.8 50.8 29.8 19.8 MXF20 23.4 66.7 42.2 18.7 16.7 74.7 50.2 26.7 24.7 ( ): Denotes the values of D-A93.

T

(mm) 12 3.2 4 6 8 10 D Tubing I.D.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

D 11.4 11.4 13.4 d 6 6 8 WX 38 48 54 Y 9 11 14 S 4 6 9 Applicable O-ring C9 C9 C11.2 Bore size (mm) 25 32 40 8-12-19 20 Series MY1W Dimensions: 50, 63 4-MM depth M (LL) L 4-B counterbore depth C LD through-hole bottom side J depth K PA YW QW LW PB PG Q+ Stroke Rc 3/8 (Hexagon socket head taper plug) This port is not available for use.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

, D-F9WV D-M9 , D-F9W D-A9V D-F9V D-M9N B P D-F9BA No. of auto switches 15 20 25 10 10 5 2 10 15 20 25 5 5 1 Consult P/A for shorter stroke lengths than indicated in the table.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Note) For the special voltages, please consult with SMC.