5-Port Solenoid Valve

Refer to the electrical power waveform to the left. 0.1 w 0.1 w 0.35 w 0.35 w With power saving circuit 0 V 0.4 (0.95) W With power saving circuit 0.1 (0.4) W Only products with an indicator light are equipped with the power saving circuit.

Air Cylinder

50 63 80 100 40 50 63 80 100 D-Y59W/Y7W/M9W D-J59W/F5BA D-F5NT/F59F D-Z7W D-K59W/G5BA D-G5NT/G59F 5 6 6.5 6.5 7 9 10 11 11 11 D-A540 40 40 D-B5

Tie-rod Type Hydraulic Cylinder

(different surfaces/same surface) 80 95 (n 4) 2 15 + 40 (n 2) 2 80 + 40 (n 4) 2 85 + 40 (n 4) 2 (n 4) 2 (n 4) 2 D-M9/M9W 80 + 40 95 + 40 90 + 40 "n" pcs. (same surface) (n = 2, 4, 6, 8 )Note 1) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) 1 or 2 pcs.

Modular F.R.L. Unit

40 AW30, 40 AW20 AW30, 40 AW10 to 40 AW10 to 40 AW30, 40 AW10 to 40 Symbol 1 2 6 8 C J N R W Z Note 5) Body size 10 20 30 40 Thread type Note 6) Metric thread (M5) Rc NPT G Nil N Note 1) Name plate, caution plate for bowl, and pressure gauge in imperial units (PSI, F) F Note 2) Note 7) When more than one specification is required, indicate in alphanumeric order.

Vacuum Pad

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Vacuum Pad

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Vacuum Pad

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

Vacuum Pad

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

MHZ

End boss type One-touch fitting for coaxial tubing End boss type One-touch fitting for coaxial tubing W W Only the basic type is applicable for 32 and 40.

MHZ

End boss type One-touch fitting for coaxial tubing End boss type One-touch fitting for coaxial tubing W W Only the basic type is applicable for 32 and 40.

CNA

1.25 7 18 to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 X 1.75 11 22 to 750 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 X 1.75 11 26 to 750 With rod boot (mm) (mm) Bore (mm) 40 50 63 80 100 Bore (mm) 40 50 63 80 100 Stroke range (mm) e l M MM N P Q H S T V W ZZ f h ZZ 11 M14 X 1.5 27 1/4 37 to 39.5 51 153 37.5 9 8 215 20 to 500 43 11.2 59 1

Table of Contents

0 IS1000 No. q w e r t y u i o !

Table of Contents

No. q w e r t y u i o !

Mechanically Jointed Rodless Cylinders

Right 15 Series MY3A/3B Construction: 16, 25, 40, 63 MY3A w e t u i @1 !

CNA

1/4 64 20 40 10 102 17 67 20 18 12 15 11 M10 x 1.25 7 18 Up to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 x 1.75 11 22 Up to 750 Data 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 x 1.75 11 26 Up to 750 With Rod Boot Bore size (mm) Bore size (mm) Stroke range (mm) e l ZZ M MM N P Q H S T V W ZZ f h 40 50 63 80 100 40 50 63 80 100 11 27 1/4 37

CNA

11 Up to 600 35 32 86 27 101 115 1/4 1/4 64 20 40 10 11.5 15 86 105 59 130 102 17 67 20 18 12 15 11 Up to 600 40 37 102 32 119 139 1/4 1/4 78 25 52 14 13.5 18 102 130 76 160 123 21 83 20 23 18 17 13 Up to 750 40 37 116 41 133 160 1/4 1/4 92 30 52 14 13.5 18 116 150 92 180 144 21 98 22 25 20 19 16 Up to 750 Bore size (mm) 40 50 63 80 100 K KA M MM N P Q H S T V W ZZ J 6 14 11 M14 x 1.5 27

C95

(n 2)/2 15 + 40 (n 2)/2 80 + 40 (n 4)/2 85 + 40 (n 4)/2 90 + 40 (n 4)/2 90 + 40 (n 4)/2 95 + 40 (n 4)/2 100 + 40 (n 4)/2 n Z80 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1, 2 Y59 15 15 80 85 90 90 95 100 Y7P 15 + 40 (n 2)/2 15 + 40 (n 2)/2 80 + 40 (n 4)/2 85 + 40 (n 4)/2 90 + 40 (n 4)/2

Slider Type Ball Screw Drive/11-LEFS Series

W [kg] Work load: W [kg] 50 20 40 Lead A 30 Lead A Lead H 10 20 Lead H 10 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] 40 Model Selection LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication SpeedWork Load Graph (Guide) For Step Motor (Servo/24 VDC) LECP6, LECP1, LECPMJ The following graph shows the values when moving

Electric Slide Tables

10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 13 Controller/Driver Controller Driver Step data input type For step motor Programless type Pulse input type Step data input type For servo motor Series LECP1 Series LECPA Series LECP6 Series LECA6 Control motor Control

C95

Ht B Auto Switch mounting positions and dimensions [mm] Auto switch operating ranges [mm] D-Z7/Z8, D-Y5/Y7 (W) All models D-Y6, D-Y7 (W) V D-Y7BA Bore Size [mm] Bore Size [mm] D-Z7 D-Z8 D-Y5/Y7 (W) D-Y6/Y7 (W) V D-Y7BA A B Hs Ht Hs Ht Hs Ht 14 1.5 25.5 23 26.5 30 7.5 5.5 3.5 23 23 32 32 25 1.5 29.5 26 30 34 8.5 5.5 3.5 26 26 40 40 26.5 2 33.5 31 34.5 31 38 31 7.5 7 3.5 50 50 31.5 2 39 36