High Vacuum Angle Valve, XL Series

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46.

HRX-OM-M005

drain port (Rc3/8 w/ valve and plug) switch Level Sub tank switch Sub tank drain port (Rc3/8 w/ valve and plug) Refrigerant pressure gauge Water regulating (high) valve Facility water outlet (Rc1/2 w/ plug) * The water regulating valve is used for each channel.

Series CE1

41.5 48 56 80 83 86.5 D-F7lWV 5 14 18 40 45 42.5 39.5 46 54 78 81 40.5 D-A9ll 3 12 16 38 43 81.5 46 52.5 60.5 84.5 87.5 91 D-F7NT 9.5 18.5 22.5 44.5 49.5 47 43.5 50 58 82 85 88.5 D-F9ll 7 16 20 42 47 44.5 42.5 49 57 81 84 87.5 D-F9lWl 6 15 19 41 46 43.5 4.4-16

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Applicable bore size A D L MM N R W Flat type Round type CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 Part no.

of the front panel allowing mounting and removal of the HRS filter to be done easily and without tools.Compact type thermal-chiller , Single phase, 100/115VAC, Cooling method: air-cooled or water-cooled , Self diagnosis and check display for easy maintenance , Functions: timer operation, low tank level detecting, power failure auto-restart, anti-freezing, THERMO-CHILLER, AIR COOLED, HRS090

the front panel allowing mounting and removal of the HRS filter to be done easily and without tools.Compact type thermal-chiller , Single phase, 100/115VAC, Cooling method: air-cooled or water-cooled , Self diagnosis and check display for easy maintenance , Functions: timer operation, low tank level detecting, power failure auto-restart, anti-freezing, THERMO-CHILLER, WATER COOLED, HRS090

of the front panel allowing mounting and removal of the HRS filter to be done easily and without tools.Compact type thermal-chiller , Single phase, 100/115VAC, Cooling method: air-cooled or water-cooled , Self diagnosis and check display for easy maintenance , Functions: timer operation, low tank level detecting, power failure auto-restart, anti-freezing, THERMO-CHILLER, AIR COOLED, HRS090

the front panel allowing mounting and removal of the HRS filter to be done easily and without tools.Compact type thermal-chiller , Single phase, 100/115VAC, Cooling method: air-cooled or water-cooled , Self diagnosis and check display for easy maintenance , Functions: timer operation, low tank level detecting, power failure auto-restart, anti-freezing, THERMO-CHILLER, WATER COOLED, HRS090

VHK

61 30.5 30.5 21.5 4 65 14 20.8 20.8 16.1 3.2 VHKlR-12F-12F 22 12 12 46 63 31.5 31.5 21.5 4 67 14 21.8 21.8 17.5 3.2 Bracket mounting dimensions Tube O.D (mm) Model Weight (g) S Bracket assy No.

Applicable Auto Switch Model

(Tolerance 30%) 5.3-46 2 Color Indication Style Solid State Switch/Direct Mounting D-Y7NW(V)/D-Y7PW(V)/D-Y7BW(V) Applicable Actuator Series Grommet Series Bore size (mm) The suitable operating point can be indicated with a green light.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

(D) 2n x 1/4 Applicable cable O.D. 6 to 12 L Dimension n: Stations Stations Formula L1 = 46 x n + 29 L2 = 46 x n + 14 2 121 106 3 167 152 4 213 198 5 259 244 6 305 290 7 351 336 8 397 382 9 443 428 10 489 474 L L1 L2 Precautions Be sure to read this before handling the products.

HRX-OM-Q026

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

Modular F.R.L. Units

1 q r e w t i u y o !0 !

Compact Rotary Actuator Series CRQ2

2 q w r y !5 i q w r y !5 !6 i Component Parts Component Parts Description Note Material No.

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Sine Rodless Cylinder Series REBR Direct Mount Type

8 A N Z + Stroke Square nut for body mounting J TW (mm) Model A EA EB H HA HB HC HG HP HT J L LL LW M MM REBH15 REBH25 97 26.5 21 46 33.5 33.5 45 17 42 19 M5 x 0.8 106 44 71.5 M5 x 0.8 8 125 29 24 63 46 46 61.5 25 58.5 28 M6 x 1.0 138 56 86 M6 x 1.0 10 Model N S TW Z ZZ NL NT P PA PB PP W XB REBH15 REBH25 161 65 194 17.5 15 8 M5 x 0.8 50 62 21 88.5 16.5 209 75 250 23.5 20.5 18 9 Rc 1/8 65

•

: ~ T,::;:,:' 3-w". (NPN) b-v G39 1 e , i,,",, 2-wi," K39 -1 i DiagnostiC Indication I'" 3-~,e (NPN) 1 5V, 12 \ M9NW Relay, PLe 3-w", (PNP) It . ~ .. (2-ColOr indication) 2-~-,"24 V I ( ~ .' Grommet , , 3-wi,.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

3 MGC Lube with double end lock CBA1-63A-PS-W CBA1-50A-PS-W CBA1-40A-PS-W CBA1-80A-PS-W CBA1-100A-PS-W 1 Lock bushing Zinc bronze die cast !4 Non-lube with double end lock 1 Lock spring Steel wire Zinc chromated !5 CBA1N63A-PS-W CBA1N50A-PS-W CBA1N40A-PS-W CBA1N80A-PS-W CBA1N100A-PS-W MGF 1 Bumper Urethane !6 @8, @9, #0, #1, #3, #4 are packed together as one set of packings.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

3 Lube with double end lock CBA1-63A-PS-W CBA1-50A-PS-W CBA1-40A-PS-W CBA1-80A-PS-W CBA1-100A-PS-W Lock bushing 1 Zinc bronze die cast !4 MG Non-lube with double end lock Lock spring 1 Steel wire Zinc chromated !5 CBA1N63A-PS-W CBA1N50A-PS-W CBA1N40A-PS-W CBA1N80A-PS-W CBA1N100A-PS-W Bumper 1 Urethane !6 MGP @8, @9, #0, #1, #3, #4 are packed together as one set of packings.

PFxx-OMA1007

No.PF-OMA1007-B PRODUCT NAME Air Management System MODEL/ Series/ Product Number AMS20 AMS30 AMS40 AMS60 Table of Contents Safety Instructions 3 Model Indication and How to Order 12 Names and Functions of Individual Parts 15 Definition and terminology 19 Mounting and Installation 23 Piping 23 Wiring 24 LED indicator 28 System overview 35 Initial Configuration 42 AMS Operation Setting 46 OPC