15 Series Variations Series Size Page 25 32 40 63 Slider Type Ball Screw Drive LEFS Series 784 100 W 200 W 400 W Slider Type Belt Drive LEFB Series 805 100 W 200 W 400 W High Rigidity Slider Type Ball Screw Drive LEJS Series 824 100 W 200 W Rod Type LEY Series 848 100 W 200 W 400 W Guide Rod Type LEYG Series 864 100 W 200 W The values in shows the equivalent motor capacity. 780 LE Series Compatible
Stroke S + Stroke H A F N N C B Cylinder tube sectional view B-B' Width across flats Stroke range Bore size (mm) Effective thread length C B G F E A H ZZ W V S P N MM J MB 32 40 50 63 80 100 32.5 38 46.5 56.5 72 89 13 14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 46 52 65 75 95 114 22 30 35 35 40 40 47 51 58 58 72 72 135 139 156 156 190 190 6.5 9 10.5 12 14 15 4 4 5 9 11.5 17 84
terminal: D, DIN terminal with indicator light: DL) Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U V W VNB2V-10A VNB2V-15A VNB3V-20A VNB4V-25A 3 8 1 2 3 4 1 72.5 80.5 170.5 173.5 180.5 24.3 2.3 25 34 55 75 87 97 114 126.5 52 26 4.5 63 42 28 14 28.3 33.3 2.3 2.3 30 35 43 49 17.5 20 84 100 92 108 80 81 92 93 102 103 125.5 138 154 182 198 185 201 192 208 62 72 31 36 5.5
The INPoutput signal is turned on from 20[mm] 0.5[mm]=19.5[mm] Position[mm] c Area2[mm] j Area1[mm] j 100 0 Speed[mm/s] b AREA Output signal ON OFF INP Output condition INP Output signal ON OFF In pos[mm] k 20.5 19.5 0 2 4 6 8 10 12 14 16 18 20 Stroke [mm] 23 - Example of step data entry (2) Pushing operation INPoutput signal, AREAoutput signal a b c d e f g h i j k Step data no.0 : Positioning
1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?
Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-
width across flats 3 ZP3E 3 ZP2 ZP2V 2 A B ZP Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR XT661 Dimensions: 10 mm Stroke (mm) A B C D F H I J Model ZPT20F10-01-A14 20 22 12.5 15.5 36 48.5 1 15 ZPT25F10-01-A14 50 25 28 ZPT32F10-01-A14 32 35 13 16 36.5 49 1 15.5 Additional Dimensions by Stroke (mm) H I J Stroke 20 +10 +5.5 0 30 +20 +15.5 50 +40 +60.5 +25 715 ZPT Series 10 13 16 40 50 J K J K ZPT F
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
W [kg] Work load: W [kg] 3000 mm/s2 20 15 3000 mm/s2 10 5000 mm/s2 5 10 mm/s2 0 50 100 150 200 250 300 350 450 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQFS32HC/Ball Screw Drive Horizontal/Lead 4 Vertical/Lead 4 100 90 80 70 60 50 40 30 20 10 0 20 40 60 80 100 120 50 45 40 35 30 25 20 15 10 5 0 140 20 40 60 80 100 120 3000 mm/s2 Work load: W [kg] Work load: W [kg] 3000 mm/s2 10 mm/s2 5000
Z ZZ (NN1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA
7 It is used only in the case of w/ cushion type.
Cylinder speed < Counting speed of the counter (Cylinder speed 500 mm/sec = Counting speed of the counter 5 kcps) RS Q G RS H A RZQ MI W S Example of Recommended Pneumatic CEP1 Horizontal mounting Vertical flat mounting Vertical overhead mounting CE1 W W CE2 ML2B C J G5-S CV MVGQ Note) In the case of light load, regulate head side supply pressure.
Cylinder speed < Counting speed of the counter (Cylinder speed 500 mm/sec = Counting speed of the counter 5 kcps) RS Q G RS H A RZQ MI W S Example of Recommended Pneumatic CEP1 Horizontal mounting Vertical flat mounting Vertical overhead mounting CE1 W W CE2 ML2B C J G5-S CV MVGQ Note) In the case of light load, regulate head side supply pressure.
W Width across flats NA AL LT C0. 1 8-J 4-LD LX LZ Y X M K A X Y LS + Stroke 2-LC (knock pin position) ZZ + Stroke e ZZ + l + Stroke h + l f 8 l With rod boot (mm) Stroke range with rod boot Standard Long stroke Stroke range without rod boot Standard Long stroke 20 25 32 40 Bore size (mm) A AL B1 BC BN BP BZ C D GA GB GC GK GL GR GQ H1 I J 10 (12) 5.5 M4 x 0.7 20 to 200 to 200 85 18 15.5
70 95 125 60 32 M8 x 1.25 1/8 104 12 38 67 4 11 8 7 M12 x 1.75 depth 21 45 82.5 115 150 75 38 M8 x 1.25 1/8 115 12 47 T U V W WH W X Y Z Bore size (mm) 20 25 32 40 30 16 112 53 50 23 30 146 182 30 20 132 63 60 25 37 167 199 25 20 132 63 60 28.5 37 167 202 20 25 162 73 70 33 44 210 227 Without Rear Plate Stroke range (mm) Long Stroke R Z Y Bore size (mm) 20 25 32 40 Bore size (mm) 20 25 32
) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B
11LEFS Operating humidity range [%RH] 90 or less (No condensation) Motor output/Size 100 W/l40 200 W/l60 400 W/l60 Electric specifications 11LEJS Motor type AC servo motor (200 VAC) Encoder Absolute 20-bit encoder (Resolution: 1048576 p/rev) 25APower consumption [W] Note 6) Horizontal 45 65 210 Vertical 145 175 230 LEC Standby power consumption when operating [W] Note 7) Horizontal 2 2 2