42

TURN COM VQ4000 VQ5000 LOCK Caution Terminal block marking Model A COM B T Do not apply excessive torque when turning the locking type manual override. (0.1 Nm or less) VQ 4 5 10 0 1 A side COM VQ 4 5 20 0 1 A side COM B side VQ 4 5 3 4 5 6 0 0 1 A side COM B side Note 1) There is no polarity. It can also be used as COM.

MGG

GC SB + Stroke B ZZ + Stroke A + Stroke B SA + Stroke A 63 SZ + Stroke B Front mounting flange C port A, B port B port A 20 C port A port A ' View A-A' GC SB + Stroke B ZZ + Stroke A + Stroke B SA + Stroke A 41 Made to Order Specifications Series MGG Auto Switch Rail Mounting 8 MGG XC13 Bearing type Mounting type Stroke Auto switch type Auto switch symbol Bore size Auto switch rail mounting

CLA

W .TOea TT XIUS ' Z ZZ l ~/ t ~ ~ 20 27 Y. 42 11 20 45 153 8 15 !

Aluminum High Vacuum Angle Valve

XLS-16XLS16-20-G, C, T, D XLS-16-P XLS16-20-PG XLS-25XLS25-20-G, C, T, D XLS-25-P XLS25-20-PG Description Construction No. w y r e-1 e-2 Coil assembly Core assembly Armature assembly O-ring O-ring XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V 465 b

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

R port 1/8 P port 1/8 Stations P, R port thread type A port size 02 : 20 2 Stations : 20 Stations A A M5 01 M5 x 0.8 1/8 Nil Rc G NPT NPTF CE-compliant F N T A port M5 x 0.8, 1/8 Nil Q CE-compliant Note) For more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port.

RSQ

ML2B I C J G5-S D T W E CV U 4-N through 8-O counterbore MVGQ 20 (22) 10 (11) V CC H + Stroke A + 2 stroke B + Stroke M 0.2 E RB Built-in One-touch fittings (20 to 50) Tubing O.D.

New

B B DIN terminal Conduit terminal F Q Cable 0.24 to 0.47 D S G1/2 1.34 Qp0.08 F (1.73) 1.24 0.99 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp0.08 B B1 B Conduit Faston type Q F D Q F 0.44 z11 G1/2 0.90 R C C R E E 2 x P Port size A 2 x P Port size B1 A B1 B B Terminal part Faston connector (inch) 250 Series Electrical entry Size Port size Grommet (with surge P A B B1 C D E

MNB

If driving a load such as a relay that generates a surge voltage, use a switch with a built-in contact protection circuit or use a contact protection box.

IIIIIII

4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' P T 20" O T 30' T T 50" 'Length from center to center of r o i l e r : 1 5 I n ( 3 8 l m m ) 'Length lrom cenler to end ol vane = 5 56 in (141 2mm) A B c D E F G H 0.57 14,6) 2.64 (621 1.86 ',47.2)1.45 136.8) 1 3 0 (33) 0.59 (1 5) 1.03 (26.2\ 1 0 0 r25.4', Millimeters in Parentheses A B c D E F G H 5.56 141.2 0.57 14.61 0.25 (6.4) 2 . 1 5 '54.7)

Mechanical Valves Series NVM, NVFM, NVZNI

4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' P T 20" O T 30' T T 50" 'Length from center to center of r o i l e r : 1 5 I n ( 3 8 l m m ) 'Length lrom cenler to end ol vane = 5 56 in (141 2mm) A B c D E F G H 0.57 14,6) 2.64 (621 1.86 ',47.2)1.45 136.8) 1 3 0 (33) 0.59 (1 5) 1.03 (26.2\ 1 0 0 r25.4', Millimeters in Parentheses A B c D E F G H 5.56 141.2 0.57 14.61 0.25 (6.4) 2 . 1 5 '54.7

NCQ8

1 r t !2 !

Air Fittings & Tubing

53 34.5 22 MS Note1) D1: max. diameter SKQ12, #18 to #25 Tl 2.1-20 Series KQ2 Extended male elbow: KQ2W A (1) (2) Tube O.D.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

3 -X 20#1 Data Slide bearing Long stroke View A-A @9 Component Parts Material Material Note Note No. Description No.

MNB

F FT FE T ZZ + 2 strokes VA N FX FZ Ee11 30 35 40 45 45 55 Effective thread length (mm) Width across flats A 22 30 35 35 40 40 B1 17 22 27 27 32 41 H1 6 8 11 11 13 16 B2 46 52 65 75 95 114 BN BP 1/8 1/8 1/4 1/4 1/4 1/4 C 32.5 38 46.5 56.5 72 89 D 12 16 20 20 25 30 F 13 13 14 14 20 20 Fd 25 31 38.5 39.5 45.5 54 FD 7 9 9 9 12 14 FE 3 3 2 2 4 4 FT 10 10 12 12 16 16 FX 72 83 100 115 126 150

MNB

D-P5DWL Hs Hs Auto switch Auto switch Ht Ht A A 32 B B L 9-6-20 21 Series MNB Cylinder with Lock Double Acting, Single Rod Proper Auto Switch Mounting Position D-F5W D-J59W D-F5 D-J5 D-F5BAL D-F59F D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W, D-Y7WV D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A B A B A B A B A B A B A B 32 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0

CG5-S

Mineral oil A C A A A A 18 Sodium hypochlorite (2%, Room temperature) A C A D D B 19 Sodium chloride A A A A B 20 Carbon dioxide A A A A A A 21 Natural gas A A A A A A 22 Boric acid A B A D A B 23 Unless noted otherwise, the solution concentration is in a saturated state.

VQ7-6/7-8

position single : VQ7-8-FG-D-SC single (Reverse pressure): VQ7-8-YZ-D-SC 3 position closed center : VQ7-8-FHG-D-SC exhaust center : VQ7-8-FJG-D-SC pressure center: VQ7-8-FIG-D-SC 175.5 180.5 175.5 82.5 93 98 93 82.5 56(71) 56(71) 56(71) 56(71) 16(20)(B port) 16(20)(A port) 16(20)(B port) 16(20)(A port) Manual override Manual override A B PB A B PB 62(72) 75(86) 62(72) 75(86) 38 50 B A 38

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

A (Part no.: ZS-46-A1) 20 20 45 30 2 5.2 30 34.6 19 5.2 14.7 47 9.6 The bracket configuration allows for mounting in four orientations.

TABLE OF CONTENTS

ALL-STAINLESS CONSTRUCTION SINTERED STAINLESS MUFFLER ELEMENT COMPACT DESIGN LOW PROFILE 1/8 & 1/4 NPT SIZES LOW NOISE LEVEL i.e., Exhaust noise of 3WNC Valve at 100 psi and 200 CPM reduced from 99dBA to 75dBA (measured at 3 feet from Muffler) CAN BE USED AS BREATHER VENT FILTER INLINE F520-A F540-A F560-A F5100-A F620-A F640-A F660-A F6100-A 20 40 60 100 20 40 60 100 BRASS NPT FILTER

HRX-OM-W038

(It is an example of model "HRS040-A-20".)