5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

B A A A B B B B A A A A SY 3 L1 L2 SV 2 11 11 71.5 (Pitch) P = 51 (Pitch) P = 51 71.5 6 [2] 1 SYJ 2n x 1/2, 3/4 (A, B port) Stations SZ 24 [23] 70 [71 .5] 58 28 105.5 176.5 209 9 9 20 2n x 1/2 VP4 D side Plug assembly: VVFS2000-30A(Option: Refer to page 1326.)

Soft Start-up Valve

98 DC 96 Dimensions (mm) Standard specifications Model Port size A C D E1 E2 G H J 1(P) 2(A) 3(R) AV2000-02-1 to 4G(Z)-A 1/4 1/4 1/4 66 47 24.5 20 20 33 Width across flats 22 30 AV2000-02-5 to 6G(Z)-A 1/4 1/4 1/4 AV3000-03-1 to 4G(Z)-A 3/8 3/8 3/8 76 50 29.5 20 20 38 Width across flats 24 35 AV3000-03-5 to 6G(Z)-A 3/8 3/8 3/8 AV4000-04-1 to 4G(Z)-A 1/2 1/2 1/2 98 56 39.5 26 26 49 Width across

Sine Rodless Cylinder Series REA/REB

(REH/Linear guide type) Series REAL Size: 10, 15, 20, 25, 32, 40 To ensure a permanent path When smoother operation is required, even with an offset load Stable operation is possible, even with an offset load, by using ball bushings. Series REAH Size: 10, 15, 20, 25, 32 The use of a linear guide facilitates a large load, large moment.

MXQ

14 27 1.5 10 13.5 3 depth 2.5 +0.03 0 4-M2.5 x 0.45 thread depth 3.5 F 4 2 N 1 x F 9 11 3-M3 x 0.5 thread depth 5 5 M 4-M2.5 x 0.45 thread depth 2.5 12.5 K 6.5 3 Bottom view of MXQ6-30 18.2 0.3 3.5 13 16 20 20 Z ZZ (NN 1) x H G H 10.5 5.5 10.5 5.5 A B 3.2 3.2 6.5 6.5 7 7 3H9 depth 2.5 +0.025 0 12 1 B A NN-M4 x 0.7 thread depth 8 4 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm)

CL

CLS CLQ Bore (mm) Z Y ZZ M8 x 1.25 PH P PG PL S PW X 21 N NA LZ MM NN K LH LC LD LS LX LT 55 1/8 1/8 1/8 1/4 M20 x 1.5 196 8 20 38 127 20 22 19.5 3.2 40 167 6.8 24 15 4 25 5 20 MLGP M26 x 1.5 M10 x 1.25 210 8 25 20 41 137 24 27 24 55 3.2 40 177 6.8 30 15 4 28 5.5 25 M26 x 1.5 M10 x 1.25 212 8 25 20 41 139 24 27 24 55 3.2 40 179 6.8 34.5 15 4 28 5.5 32 RLQ M32 x 2 M14 x 1.5 250 10 27 23 41

Modular F.R.L. Units

AD17-A AD27-A AD37-A AD47-A Spacer Y100-A Y200-A Y300-A Y400-A Y500-A Y600-A Spacer with bracket Y100T-A Y200T-A Y300T-A Y400T-A Y500T-A Y600T-A Check valve 5 6 AKM2000-01-A (02)-A AKM3000-(01)-A 02-A AKM4000-(02)-A 03-A Pressure switch 6 IS10M-20-A IS10M-30-A IS10M-40-A IS10M-50-A IS10M-60-A T-spacer 5 6 Y110-M5-A Y210-01-A (02)-A Y310-(01)-A 02-A Y410-(02)-A 03-A Y510-(02)-A 03-A Y610

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

x 0.8 MM D D FY FB H + Stroke Z + 2 x Stroke S + Stroke NA F NA FT F A H FZ FX A 2 x FC Mounting hole C B 0 0.3 B 0 0.3 Drawing of view E (mm) Bore size 16 10 15 15 B GA FX FT F A 18.3 15 C 20 17 5 4 8 8 5.5 5.5 2.3 2.3 33 33 20 20 5 5 FB FY D FC FZ 12-0.027 10-0.022 H NA NDh8 Z S NN 11 11 17.5 19 66 65 M12 x 1.0 M10 x 1.0 MM 42 42 GC 0 M4 x 0.7 28 28 122 121 20.5 20.5 0 M5 x 0.8 Specific

CV/MVGQ

Z + Stroke ZZ + Stroke RHC MK(2) Single acting, Spring extend: CVM3D T Bore size Stroke RS Q G RS H A RZQ MI W S CEP1 CE1 H + Stroke CE2 Z + 2 x Stroke ZZ + 2 x Stroke ML2B AL D CZ H1 MM NN CX H L U CD HX A B1 Eh8 F I K N NA RR Bore size (mm) 20 25 32 40 C J G5-S 8 19 10 41 30 14 9 18 13 5 9 15.5 13 5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 10 19 10

Environment

PB H thread depth C Vent hole Note 3) J PC EV Z T M U D K Note 2) L R 4 x O1 thread depth R W A + Stroke B + Stroke S EH M 6 x MO thread depth MR XA H9 depth XA MH Section XX details MA ML + Stroke MC MD Section XX XB XA H9 XA [mm] Incremental encoder Absolute encoder B C D EH EV Without lock With lock Without lock With lock A W Z A W Z A W Z A W Z Size Stroke range [mm] 25 15 to 100 238

Air Cylinder

K h + L C N F ZZ + L + Stroke B H S + Stroke L Z + Stroke RR ZZ + Stroke (mm) Bore size Stroke range CDH10 CX (mm) A AL B B1 C D E F G H1 J K KA L (mm) 40 50 63 80 0.1 0.3 10 12 16 20 25 +0.084 +0.058 0 30 35 35 40 40 27 32 32 37 37 60 70 85 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 8 M8 x 1.25 M8 x 1.25 6 7 7 14 18 18 22 26 30 35 40 48 58 Up

0.55

for Manifold model 30 VV5F5-20, and up to 15 stations for VV5F5-21. > Symbol P, R port size EA, EB port size 20 21 > > 31 1/8 M5 The A and B ports are made on the top.

MGG

GC SB + Stroke B ZZ + Stroke A + Stroke B SA + Stroke A 63 SZ + Stroke B Front mounting flange C port A, B port B port A 20 C port A port A ' View A-A' GC SB + Stroke B ZZ + Stroke A + Stroke B SA + Stroke A 41 Made to Order Specifications Series MGG Auto Switch Rail Mounting 8 MGG XC13 Bearing type Mounting type Stroke Auto switch type Auto switch symbol Bore size Auto switch rail mounting

Air Slide Table Series MXQ

depth 2.5 12.5 K 6.5 3 Bottom view of MXQ6-30 18.2 0.3 3.5 13 16 20 20 Z ZZ (NN 1) x H G H 10.5 5.5 10.5 5.5 A B 3.2 3.2 6.5 6.5 3H9 depth 2.5 +0.025 0 7 7 12 B A NN x M4 x 0.7 thread depth 8 4 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) ZZ 48 58 68 86 96 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 K 21.5 31.5 41.5 51.5 61.5 I 9 9 9 16 9 J 17 27 37 48 65 NN 2 2 3 3 3 H 23 26

CY1

Impact at the stroke end is absorbed by inclusion of a shock absorber. The use of a linear guide makes possible a large load, large moment and high precision. Series CY1H Size: 10, 15, 20, 25, 32 To ensure a permanent path. When a larger load, larger moment or higher precision are required.

Stopper Cylinder

D-X 571 B RSQ Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V 12 Hs B B A B B A 16, 20 B A Hs B Hs B A Hs B A Hs B A 32 to 50 A A B A A B A Hs D-A7 D-A80 D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F79F D-F7NT D-F7BA D-A73C D-A80C D-J79C D-A79W D-F7WV D-F7V D-F7BAV 16, 20 B A Hs B A Hs

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

frame 10 A 20 Note 1.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

S + Stroke NA F NA FT F A H FZ FX A 2 x FC Mounting hole C B 0 0.3 B 0 0.3 Drawing of view (E) (mm) Bore size 16 10 15 15 B GA FX FT F A 18.3 15 C 20 17 5 4 8 8 5.5 5.5 2.3 2.3 33 33 20 20 5 5 FB FY D FC FZ 12-0.027 10-0.022 H NA NDh8 Z S NN 11 11 17.5 19 66 65 M12 x 1.0 M10 x 1.0 MM 42 42 GC 0 M4 x 0.7 28 28 122 121 20.5 20.5 0 M5 x 0.8 11 B CJ2RA-Z Series 10-/1121-/22Stroke Length Tolerance

MY1

MY1 HT MY1 W MY1 W MY1CW (Cam follower guide type) 16, 20 25, 32, 40, 50, 63 MY2C MY2 H/HT MY3A MY3B MY3M B A B A Proper Auto Switch Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y7W D-Y7BA D-M9V D-M9WV D-M9AV D-A9 D-Y69/Y7PV D-Y7WV D-M9 D-M9W D-M9A Bore size (mm) A B A B A B A B A B 16 20 25 32 40 50 63 74 86 70 90 94 106 90 110 102 118 102 118 97 123 97 123 132 148 132 148 127 153

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 MDB MDB-X1184 MDB1 CDA2 CDA2-X1184 CDS1 CDS2 CDUJ CDU CDQ2-XB14 CQU MDU-Z CDJ5S CDG5S Cylinder series CDJP2 CDQM CDQS HYDQ CDJ2 CDM2 CDM3 HYDB CDG1 CDG3 CDQ2 RDQ 125 to 200 125 to 160 6 to 20 125 to 160 180 to 200 4 6, 10, 16 32 to 125 40 to 100 32 to 125 40 to 100 40 to 100 32 to 100 32 to 100 20 to 100 20 to 40 20 to 40 20

V

I R S U C T I O N F I LT E R S E R I E S (N)ZFB ACCESSORIES A I R S U C T I O N F I LT E R S E R I E S (N)ZF1B (N)ZFB E L E M E N T I-34S-A (N)ZFB100, 101 I-35S-A (N)ZFB200, 201 I-36S-A (N)ZFB300, 301 I-395-A (N)ZFB401 B O D Y S I Z E T U B E S I Z E OD M M 04 4 06 6 08 8 10 10 05 3/16 07 1/4 11 3/8 13 1/2 100 Max 20 ln/min 200 Max 50 ln/min 300 Max 75 ln/min 101 Max 20 ln/min 201 Max 30