Vacuum Pad

5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model Model Model ZP2-3507W ZP2-4010W ZP2-5010W ZP2-6010W ZP2-4020W ZP2-5020W ZP2-6020W ZP2-8020W ZP2

Battery-less

7!9@0 q @2 @3 y@7 A A u i @1 !5 @1 !0 !4 A-A r t B C o @4 B C e @5 @6 D-D C-C B-B !1 !3 !6@8 D w D !2 Component Parts No. Description Material Note 19 End cover LEFS16 Aluminum alloy Anodized No.

Fluoropolymer Piping Equipment

3/4" x 5/8" 1/2" 12 x 10 3/4" 1/2" 1" x 7/8" 3/4" 19 x 16 1" 3/4" 7 B 1 1/4" x 1.1" 1" 7 C 25 x 22 1 1/4" 8 C 1 1/2" x 1.33" 1 1/2" Fitting type H, piping type M: Male connector only.

0.4

B A C B A C B A C B A C B A C B A C B A C kit 98.6 (Double, Dual 3 port valve) 107.6 (3 position) 9 P 34.3 47.1 67.9 94.1 (Single) kit 35 5.5 28.1 12.7 J kit T 2 x M4 DIN rail clamp screw 49.4 kit Release for switching connector direction EXH outlet Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) L U side D side Stations n 8 7 6 5 4 3 2 1 kit For top ported One-touch

1

: A9 Symbol: A10 Symbol: A11 WA C C0.5 file chamfer C76 AL B MM R sphere TP R sphere C85 DC 30 C95 H W1 T H H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 CP95 C AL MM C DA DA DA DA C0.5 R sphere 30 30 30 NCM NCA A A A H H C H T W1 H D-X 20Data 6-17-7 7 Simple Specials: -XA0 to XA30: Change of Rod End Shape These changes are dealt with Simple Specials System.

NCQ8

8 4 1/8 4 5/8 5 1/8 5 5/8 6 1/8 1/4-20UNC-2 5/8 2 3/4 2 7/8 3 3 1/8 3 1/4 3 3/8 3 5/8 3 7/8 4 1/8 4 3/8 4 7/8 5 3/8 5 7/8 6 3/8 2 5/8 2 3/4 2 7/8 3 3 1/8 3 1/4 3 3/8 3 7/8 3 7/8 4 1/8 4 3/8 4 7/8 5 3/8 5 7/8 6 3/8 3 3 1/8 3 1/4 3 3/8 3 1/2 3 5/8 3 3/4 4 4 1/4 4 1/2 4 3/4 5 1/4 5 3/4 6 1/4 6 3/4 1/4-20UNC-2 5/8 2 3/4 2 7/8 3 3 1/8 3 1/4 3 3/8 3 7/8 3 7/8 4 1/8 4 3/8 4 7/8 5 3/8 5 7/8 6 3/8

ZP

C N S U F GN GS B4 M4 x 0.7 4 ZP R 10 13 16 UT 28.4 04 06 M5 x 0.8 19.5 B5 M5 x 0.8 5 Dimensions Per Vacuum Inlet 2.52 Width across flats 7 Model C D E Fitting part min. hole size Vacuum inlet direction q Pad dia.

LVQ

T) View Z Dimensions (mm) A B C D M N T U V Model LVQ20-Zmm-2 LVQ30-Zmm-2 LVQ40-Zmm-2 LVQ50-Zmm-2 LVQ60-Zmm-2 25.5 46 31.5 58 7 15 34.3 10.6 7 25.5 51 31.5 63 7 15 36.9 16.5 10 25.5 51 31.5 63 7 15 37.9 22 10 38 76 44 88 7 20 64 25 17 38 76 44 88 7 20 66 32 17 549 Series LVQ-Z Dimensions With flow rate adjustment & bypass N.C. valve LVQ20 N M C A B D (Max.

LEC-OM07605CN

(b)(SW1) 164( (3)(c)) (SW1) 8 7 6 9 A 5 B 4 C 3 D 2 1 0 F E (c) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D

Air Cylinder Series CM2

CD-S02 CD-S03 20, 25 32, 40 8 19.5 0.9 1.6 24.5 7.6 Type C 8 for axis B 10 29 1.15 1.35 34 9.6 Type C 10 for axis C D d Applicable bore size d H C B D Part no.

Modular Design with Uniform Body Style

V V V V + Nil Polycarbonate bowl V V V V V 2 Metal bowl V V V V V 6 Nylon bowl V V V V V c Bowl*5 8 Metal bowl with level gauge V V V V C With bowl guard V *6 *6 *6 *6 6C With bowl guard (Nylon bowl) V *7 *7 *7 *7 + d Indicator Nil Without indicator V V V V V Semi-standard L With element service indicator*14 V V V*12 V V + t e Drain port*8 Nil With drain cock V V V V V J*9 Drain guide 1

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Body width of 10 mm, C: 0.22 dm3/(sbar) 2 W C: 0.27 dm3/(sbar) 3.2 W (U type: Large flow) SQ VQ0 VQ4 Clean room specifications available as special.

Metal Seal/Rubber Seal Series VQ Body Ported

Note1) C kit only.

F

23 3/8 3/8 KQL11-36S 17.46 17.9 17 25.5 31.5 34 21 7 33 3/8 1/2 KQL11-37S 17.46 17.9 17 25.5 35.5 36.5 21 7 59 1/2 1/4 KQL13-35S 17.46 21.7 17 28 31.5 36.5 22 9 28 1/2 3/8 KQL13-36S 17.46 21.7 17 28 33.5 38.5 22 9.6 36 1/2 1/2 KQL13-37S 22.23 21.7 17 28 37.5 40 22 9.6 62 P R O D U C T S E L E C T O R H E X A G O N S O C K E T H E A D M A L E C O N N E C T O R : K Q S ( K Q 2 S ) Applicable

5

Smooth Smooth Low Speed MQ RHC Operating Range RZQ (mm) Auto switch model Bore size 32 40 50 63 80 100 D-M9l(V) D-M9lW(V) D-M9lA(V) 5 5 6 6.5 7 7.5 D-A9l(V) 9 9.5 9.5 11 10.5 10.5 D-A7l(H)(C) D-A80l(H)(C) 10.5 11.5 11 13 11.5 11.5 D-A79W 14 15.5 14.5 17 15 15.5 D-F7l(V) D-J79(C) D-F7lW(V) D-F7NT D-F79F 5 5 5 6 7 8 D-P3DWA 6 6 7 7.5 7.5 7.5 * Values which include hysteresis are for guideline

Swivels

A B C D Dia.

Step Motor Controller

7 6 9 8 11 10 3 Connector B terminal no.

Free Mount Cylinder

Applicable cylinder bore (mm) 10 16 20 25 32 2.4 H M4 x 0.7 d 7 B 8.1 C 6.8 D Part no.

Vacuum Pad

( ( Thin flat with rib CT C C Note) Note) ( C C C ( C B Note) Note) J ( ( ( ( ( Bellows Note) Note) Note) Note) Note) MB ( ( ( ( ( ZJ ( ( ( ( Deep D C Nozzle pad AN ( ( Note) Note) Flat pad MT ( ( 4 x 10 4 x 20 4 x 30 ( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free

Vacuum Pad

( ( Thin flat with rib CT C C Note) Note) ( C C C ( C B Note) Note) J ( ( ( ( ( Bellows Note) Note) Note) Note) Note) MB ( ( ( ( ( ZJ ( ( ( ( Deep D C Nozzle pad AN ( ( Note) Note) Flat pad MT ( ( 4 x 10 4 x 20 4 x 30 ( 5 x 10 5 x 20 5 x 30 ( 6 x 10 6 x 20 6 x 30 ( 8 x 20 8 x 30 ( 3.5 x 7 ( W Oval 2 x4 C 3.5 x 7 C 4 x 10 C U H Flat HT Heavy-duty pad HB Bellows HW Oval U ( ( ( ( Mark-free