Display Pressure: 1.5MPa, Connection Thread: R 1/4, M5 Female, Attachment: Clear Cover w/Protrusion, is Removable

Display Pressure: 1.0MPa, Connection Thread: R 1/8, M5 Female, Attachment: Clear Cover w/Protrusion, is Removable

Display Pressure: 1.0MPa, Connection Thread: R 1/8, Attachment: Clear Cover w/Protrusion, is Removable

Speed Controller: Standard Type Series AS In-line Type 1

L1 L2 L3 L4 L5 L6 L7 L8 D Model Bore size ASS AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 40 56 30 30 45.5 5 5 5.25 17 23 25 10 11.5 13.2 15.5 17 20.6 54.5 56 68 50 51.5 61 16 20 26 4.5 4.5 5.5 1 4 1 4 ASR Effective thread depth 6 8 3 Dimensions: AS5000 ASF 2-1/4 to 1/2 2-M4 x 0.7 Effective thread depth 7 15-9-31

Table of Contents

4 @1 w @4 !0 y !3 !5 @3 !0 !

LEC-OM02904

(SW1) 0 1 01 1 2 02 2 3 03 3 4 04 4 5 05 5 6 06 6 7 07 7 8 08 8 9 09 9 10 10 A 11 11 B 12 12 C 13 13 D 14 14 E 15 15 F 16 16 3 39 4 4 . 2 4.1 . 2 4.1.1 . 2 4.1.2 . 3 4.1.3 . 4 4.2 . 5 4.3 . 6 4.4 . 8 4.5 . 8 TM) . 9 4.5.1 (MR Configurator2 4.5.2 . 11 4 1 4 4 () 4.1 4.1.1 (DO)(4.5.1) (4.1.2) (4.1.3) (3.13 ) (5) (4.5) (6) 4 2 4 4.1.2 (1) (a) (L1L2L3L11L21) (1.3) (b) (

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

(With screws) 30, 40 1/4, 3/8, 1/2 VXZ30S-14A-1 50, 60 3/4, 1 VXZ50S-14A-1 Brass, Stainless steel 1/8, 1/4, 3/8 JSX20-12A-4 30 1/4, 3/8 20 Aluminum 1/8, 1/4, 3/8 VX021N-12A 30 1/4, 3/8 VX022N-12A Stainless steel Piping 2.

5 Port Solenoid Valve, Series VQC

Kit type Thread type Port size F T Rc G NPT/NPTF 1 2 S Kit T Kit Symbol C3 C4 C6 C8 C10 C12 N1 N3 N7 N9 N11 M5 02 03 B T02 T03 G02 G03 VQC4000 Port size VQC2000 VQC1000 3.2 One-touch fitting 4 One-touch fitting 6 8 10 12 1/8" 5/32" 1/4" 5/16" 3/8" M5 thread Rc 1/4" Rc 3/8" Rc 1/4" bottom ported 1/4" NPT/NPTF 3/8" NPT/NPTF 1/4" G 3/8" G U-side end plate assembly 12 U-side end plate assembly

ARM10/11

-4-34 to 14-4-38.

ARM10/11

-4-34 to 14-4-38.

Series VQ Base Mounted Metal Seal/Rubber Seal

(4) Special wiring specification (Not double wiring) Stations K (5) 2 stations 02 With name plate N (3) External pilot R (6) Note) Note 1) Insert L (top piping) or B (bottom piping) for elbow type.

HRX-OM-W002

26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 1 23 2 22 25 26 27 1 22 2 2 7 7 6 2 7 5 (CN5) 1 37 2 38 4 39 3 40 32 3 20 2 20 1 10 12 1 13 4 15 3 16 1 15 2 16 18 4 8 4 3 24 24 3 2 14 (CN6) BR BR BR BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BL BL BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BL BL 3 2 1 4 4 3

HRX-OM-X084

. 4-1 4.2 Starting and Stopping . 4-2 4.2.1 Operation . 4-2 4.2.2 Operation restart when alarm is generated . 4-3 4.2.3 Stopping the product . 4-5 4.2.4 Cautions for re-start . 4-5 4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

Serial Transmission System Series EX250 Series EX500

Input block type (Fill out for I/O unit only) Ports 2, 4 size (metric) Nil Without input block M12: 2 inputs M12: 4 inputs M8: 4 inputs (3-pin) Ports 2, 4 Symbol C8 C10 C12 02 03 B CM 1 2 3 Ports 1, 3, 5 8 One-touch fitting 10 One-touch fitting 12 One-touch fitting 1/4 3/8 Bottom ported Rc 1/4 Mixed Input block (Fill out for I/O unit only) 1: 1/2 3, 5: 3/4 Nil Without SI unit/input block

VFRA3000

5 Port Air Operated Valve Series VFRA3000 Model Configuration Port size Rc(PT) Effective area (mm2) (Cv) Pilot port size Rc(PT) Weight (kg) Valve model 1 4 3 8 37.8 (2.1) 41.4 (2.3) VFRA3111-03 VFRA3211-02 2 position double 0.71 1 8 VFRA3111-02 2 position single 0.61 1 8 1 4 3 8 37.8 (2.1) 41.4 (2.3) VFRA3211-03 VFRA3311-02 3 position closed center 0.72 1 8 1 4 3 8 34.2 (1.9) 36 (2.0) PA,

REA/REB

4 !3 !8 !7 @7 #1 @9 !0 t y e i u !2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

HRX-OM-X071

. 4-2 4.2.1 Operation . 4-2 4.2.2 Operation restart when alarm is generated . 4-3 4.2.3 Stopping the product . 4-5 4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List of parameters . 5-6 5.3.1 Main Menu . 5-6 5.3.2 Alarm display

Air Pilot Operated Series NVSA

No base (lncludes subplate gasket and hold dolvn bolts,) ,{vsA 4 0 24 0l = Mounted on Indlvidual SubDlate 1/4" NPTF Side Ports (5) 51 = Mounted on lndlvldual Subplate 1/4" NPIF Slde Pons (5);10-32 Pllot Ports (4) 02 = Mounted on Indivldual Subplate 3/8" NPTF Side Pons (5) 52 = Mounted on Individual Subplate 38' NPTF Side Ports (5); '10-32 Pilot Ports (4) 03 = Mounted on Indlvidual Subplate