Table of Contents

0 1 Standard Micro load Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 16-9-3 2 Series IS3000 Construction Precautions IS3000-02/3010-02 (Rc 1/4 thread) Be sure to read before handling.

Intrinsically Safe Valve

Note) Valve model Type of actuation Type of actuation Valve model 14/2 (PA/B) 4/25/3 (A/BEA/EB) 14/2 (PA/B) 4/25/3 (A/BEA/EB) 1, 5, 3 4, 2 (A, B) (P, EA, EB) 4, 2 (A, B) 1, 5, 3 Cv b C [dm3/ (sbar)] Cv b C [dm3/ (sbar)] Cv b C [dm3/ (sbar)] Cv b C [dm3/ (sbar)] (P, EA, EB) 2position Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

wire length) 122 [126.4] 36 [38.2] 2 x 4.3 (For mounting) B A 27 A B R1 R2 P Manual override 8.5 34 63.8 13.8 (Light/surge voltage suppressor) 1/4, 1/8 (P, A, B port) 57.5 [64.5] + 42.1 25.5 20 12 22 22 11.5 18 1/4 (R1, R2 port) 31.5 34 63 L plug connector (L): 10-SYJ7 43-L3 4 5 01 02 M plug connector (M): 10-SYJ7 43-M3 4 5 01 02 DIN terminal (D, Y): 10-SYJ7 43D Y3 4 5 01 02 M8 connector

SYJ3000/5000/7000

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port SS5YJ7-21P-01 SS5YJ7-21P-C6 SS5YJ7-21P-C8 1/4 1/4 1/4 2.1

KJ

O.D. 4 2.5 1 4 1 4 3 8 KFF04-02 KFF06-02 KFF06-03 KFF08U-02 KFF08N-02 KFF10U-02 KFF10N-02 KFF12U-02 KFF12N-02 10 33.5 26.8 15 15 17 1.6 25 27 30 17 17 19 15.5 1.5 33.2 26.5 6 15.2 3 12 6 4 35.2 28.5 5 6 11 17 21 30 35 45 4 5 5.5 6.5 7 8 Connection thread Applicable tubing 14 17 1 4 33.2 26.5 15 16.2 28 8 10 6.5 7.5 1 4 32 17 17 34.8 27.5 15 18.8 12 8 9 35 36 1 4 19 17 35.3 28.5 15 19.3 15

42

at the Number of Manifold Stations (Operated individually) VP4 Model Passage/Stations Station 1 Station 5 Station 10 Station 15 1 4/2 (P A/B) C [dm3/(sbar)] 5.9 5.9 5.9 5.9 b 0.23 0.23 0.23 0.23 Cv 1.5 1.5 1.5 1.5 VQ 1/2 2-position metal seal VQ4 1 250 VQ 4/5 VQ 4/5 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] 6.2 6.2 6.2 6.2 b 0.19 0.19 0.19 0.19 Cv 1.5 1.5 1.5 1.5 VQC 1/2 1 4/2 (P A/B) C [dm3

AS

29.4 34.4 34.9 39.9 AS221F-02-08 AS221F-02-07 34 34 8 25.2 34.5 34.9 34.4 29.4 39.9 13.2 18.5 18.5 1/4" 18.5 15.2 36.4 27.2 (17.5) (17.5) AS221F-02-10 AS221F-02-09 36 10 36 27.2 21 36.4 19.5 44.5 15.2 18.5 21 5/16" 19.5 44.5 35.3 1/4 1/4 AS321F-02-06 AS221F-02-11 36 60 6 35.3 17.9 21 3/8" 17 12.8 27.8 39.3 AS321F-02-08 AS321F-02-07 60 63 8 27.8 39.3 13.2 17 15.2 1/4" 18.5 41 29.5 23 37.8

Prevents Micro-Bubbles

) A Stacking type Symbol 02 03 04 Body class 2 3 4 Port size 1/4 3/8 1/2 LVD Manifold stations 02 2 stations LVQ 05 5 stations LQ LVN How to Order Valve TI/ TIL LVH 2 0 02 C A Threaded type PA PAX Body class Material Symbol 2 3 4 Orifice dia. 4 8 12 Valve type Body class 2 3 4 PB Body Actuator section End plate Diaphragm Symbol PFA PP PPS PTFE C 0 N.C.

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLA 2 A 05 02 C LVN Body class TL/TIL Material Symbol 2 3 4 5 Body class 2 3 4 5 Thread type Manifold PFA Symbol C LQ3 Symbol Nil N Thread type Rc NPT Base type Port size (port P) A Stacking type Symbol 02 03 04 06 Body class 2 3 4 5 Port size 1/4 3/8 1/2 3/4 Manifold stations 02 2 stations 05 5 stations How to Order Valve LVA 2 0 02 C A Option Body

I

ISE5-02-27L Two Output NPN Open Collector 30V, 80mA ISE5-02-67L Two Output PNP Open Collector 80mA ZSE5B02 L O P T I O N S L 3m W I R I N G S P E C I F I C AT I O N S Non-Backlit (Std) B Backlit LCD S W I T C H S P E C I F I C AT I O N S P I P I N G S P E C I F I C AT I O N S 26 Analog 3-Wire 27 2 Output (NPN) 4-Wire 67 2 Output (PNP) 4-Wire 02 PT 1/4 T2 NPTF 1/4 T E C H N I C A L SPECIFICATIONS

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil assembly with terminal part no. Coil no.

0.4

N.C. 5 24 VDC 4-position dual 3-port valve (B) 4 2 B Note) 1 5 3 Function N.O. N.O. Symbol Specifications 4-position dual 3-port valve (C) Standard (0.4 W) Nil B K Note 1) 4 2 C Note) High-speed response type (0.95 W) 1 5 3 N.C. N.O.

VZS

8, 1/4 VQ7 ( ): Rc 1/8 EVS L plug connector 2 position double: VZS3250-L(Z)-01 02 3 position closed center: VZS3350-L(Z)-01 02 3 position exhaust center: VZS3450-L(Z)-01 02 3 position pressure center: VZS3550-L(Z)-01 02 K plug connector 2 position double: VZS3250-KZ-01 02 3 position closed center: VZS3350-KZ-01 02 3 position exhaust center: VZS3450-KZ-01 02 3 position pressure center: VZS3550

ZP

Model A B C Y D P Q R Model A B C D E F Flat Flat with ribs P Q R F F U C U C U C 1.2 1.6 2.6 4.8 7 9 ZPY20 20 25 32 23 14 28 5 4.5 2.3 1.8 1.7 N4 (Nylon tube 4/2.5) N4 (Nylon tube 4/2.5) 13.5 5 1.8 14.5 5 1.8 24 42 4 4 5 ZPY04U ZPY06U ZPY08U 8 35 6 0.8 ZPY25 14.5 24.5 42.5 N6 (Nylon tube 6/4) ZPY32 N6 (Nylon tube 6/4) 15.5 7 2.5 2.5 16.5 7 2.5 1 Deep U4 (Soft tube 4/2.5) U4 (Soft tube 4/

Soft Start-up Valve

98 DC 96 Dimensions (mm) Standard specifications Model Port size A C D E1 E2 G H J 1(P) 2(A) 3(R) AV2000-02-1 to 4G(Z)-A 1/4 1/4 1/4 66 47 24.5 20 20 33 Width across flats 22 30 AV2000-02-5 to 6G(Z)-A 1/4 1/4 1/4 AV3000-03-1 to 4G(Z)-A 3/8 3/8 3/8 76 50 29.5 20 20 38 Width across flats 24 35 AV3000-03-5 to 6G(Z)-A 3/8 3/8 3/8 AV4000-04-1 to 4G(Z)-A 1/2 1/2 1/2 98 56 39.5 26 26 49 Width across

Secondary Batteries

Port size Body size Port size Symbol 2 3 4 02 03 04 06 1/4 3/8 1/2 3/4 *Specifications and dimensions for the 90-series are the same as standard products.

0.55

/Dimensions Standard/VPA344-1l 01 02 A B 1/8, 1/4 2(A) port 19.5 12 40.5 2 x 4.2 (For mounting) 11.2 30 18.5 1/8, 1/4 3(R) port 1/8 12(PA) port 2A NO 35 43 NC 12 12 3R 1P NC (1/8) 12(PA) port 12 6.7 58.2 18.5 65.2 60 59 24 X 12 M5 x 0.8 (Breathing hole) 19.5 39 1/8, 1/4 1(P) port For vacuum/VPA344V-1l 01 02 A B 1/8, 1/4 2(A) port 19.5 12 40.5 2 x 4.2 (For mounting) 18.5 1/8, 1/4 3(R) port

VZ5000

length) G: 300 mm H: 600 mm VZ5440 VK VZ Manual override (Non-locking) (Mounting hole) VF VFR VZ5540 VP4 VZS VFS VS4 VQ7 (PE port) EVS 2-Rc 1/4 (3(R1), 5(R2) port) 3-Rc 1/8, 1/4 (1(P), 4(A), 2(B) port) VFN L plug connector (L) VZ5 40-LM plug connector (M) VZ5 40-M01 02 3 4 5 01 02 3 4 5 (Lead wire length) 300 (Lead wire length) 300 DIN terminal (D) VZ5 40-D01 02 3 4 5 : With light/surge

Standard Combinations

(The SI unit type is provided for use in Japan.) 01 02 03 04 1/8 1/4 3/8 1/2 17 Series AC Spacers and Brackets Accessories Spacer (X) D Center of F.R.L. body C 1 X-X B X RELEASE Y200 Y400 2 X Applicable model A 3 4 5 B 35.5 47 57 C 18.5 26 31 D 48 59 65 Model Y200 Y300 Y400 Seal ACG20 ACG30 ACG40 A Spacer width Part no.

0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) 1/8 VF3;3;-;;1-01 1(P), 5(EA), 3(EB) 1/8 4(A), 2(B) 1/4 VF3;3;-;;1-02 1(P), 5(EA), 3(EB) P: 1/4, EA, EB: 1/8 4(A), 2(B) 1/4 VF3;4;-;;1-02 VF3000 1(P), 5(EA), 3(EB) 1/4 4(A), 2(B) 3/8 VF3;4;-;;1-03 1(P), 5(EA), 3(EB) 3/8 1(P), 5(R), 3(R) 1/4 Type 30 manifold base 4(A), 2(B) 1/4 Type 40 manifold base 1(P), 5(R), 3(R) 1/4 Applicable