Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds

HRX-OM-W002

26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 1 23 2 22 25 26 27 1 22 2 2 7 7 6 2 7 5 (CN5) 1 37 2 38 4 39 3 40 32 3 20 2 20 1 10 12 1 13 4 15 3 16 1 15 2 16 18 4 8 4 3 24 24 3 2 14 (CN6) BR BR BR BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BL BL BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BL BL 3 2 1 4 4 3

VZS2000

Note 2) Response time is based on JIS B 8375-1981. (0.5 MPa, without light/surge voltage suppressor) Note 3) For VZS250-FZ-01 Note 4) Note 1 and Note 2 are with controlled clean air.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

C2 PSE56 0 01 Option Port size 01 02 C01 N01 N02 A2 B2 R 1/8 (with M5 female thread) R 1/4 (with M5 female thread) Rc 1/8 NPT 1/8 (with M5 female thread) NPT 1/4 (with M5 female thread) URJ 1/4 TSJ 1/4 Note Description Part no. Connector for pressure sensor controller ZS-28-C 1 pc. Output specifications Adapter with throttle Rc 1/4 ZS-31-X175 1 pc.

Table of Contents

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

VK300

Grommet: VK332-GM5 01 Max.10 68.8 (Bracket) 14 9 2A 2A 13 2 (Lead wire length) (Mounting hole for manifold) 2 x 3.2 2 x 3.2 16 [14] M5: M5 x 0.8 [01: 1/8] [14] M5: M5 x 0.8 [01: 1/8] (Mounting hole for manifold) Manual override (Non-locking) 300 2 x M2.5 x 0.45 (Mounting screw) (Mounting screw) Applicable cable O.D: 3.5 to 7 Pg7 (Mounting hole) 3 4 2 x 3.5 63.4 57.9 (Mounting hole) (Bleed

Check Valve Series AK

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

4/5 Port Air Operated Valve Series SYJA3000 1

(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

4/5 Port Air Operated Valve SYJA3000 Series

*The bracket cannot be retrofitted later. *2 position single only SYJA7 20 1 01 Body ported SYJA7 40 2 Base mounted Symbol Body ported Port size Thread type Type of actuation Nil Rc G NPT NPTF Without sub-plate Nil 2 position single 2 position double 4 3 2 position double 2 position single 2 1 1/8 With sub-plate 01 F N T 2(B) (A)4 2(B) (A)4 3 position closed center 1/4 With sub-plate 02 3

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80, 100 R 1/2 AS121F-U10/

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Flow Direction Symbols on Body Flow Rate and Effective Area Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Symbol JIS Symbol Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled

VK3000

-G-01 Port size: Rc 1 8 2 x 3.2 (Manifold mounting hole) (Bracket) 74.1 Max.10 14 9 4A 2B 4A 13 4 3 x Rc 1/8 2B (P , A, B port) 2 x 3.2 3 x RC 1/8 (P , A, B port) VV061 14 14 (Manifold mounting hole) (Lead wire length) VV100 Manual override (Non-locking) Applicable cable O.D. : 3.5 to 7 2 x M2.5 x 0.45 (Mounting screw) (Mounting screw) V100 Pg7 S070 Mounting screw ( ) 4 3 VQD 2 x 3.5 57.9

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

DIN terminal: VKF334-D-01 Base mounted Grommet: VKF334-G-01 33.5 16.7 26 4 Manual override (Non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 MAX.10 2-4.3 (Mounting hole) Applicable cable O.D. 4 to 6.5 48.5 300 26 4 Pg.7 3 27 (Lead wire length) Manual override (Non-locking) A 20.5 18.5 mPm 3 32 59 68 78 70.5 43.5 12 7.5 P R 7.5 12 43.5 13.5 11 33.5 P R 13.5 11 Refer to grommet type for other

VK300

Refer to pages 4-5-4 to 4-5-9 for external dimensions in mounting.

CLA

2.. t'l=4 .a.12 . . n~.a 12...

44

KQ2 KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8

VKF300

Grommet: VKF334-G-01 DIN terminal: VKF334-D-01 Base mounted type 33.5 16.7 26 4 Manual override (non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 Max. 10 2-4.3 (mounting holes) Applicable cord O.D. 4 to 6.5 48.5 Approx. 300 (lead wire length) 26 4 Pg.7 3 27 Manual override (non-locking) A 20.5 18.5 3 32 59 68 78 70.5 43.5 12 7.5 P R 13.5 11 33.5 7.5 12 43.5 P R 3-Rc(PT) 1/8 (ports P, A, R) 13.5

Series H, DL, L, LL Self-align Fittings

Weight (g) A L 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 H04-01 15 4 10 H04-02 14 10 21.1 23.1 10 25.1 29.1 4 10 17 H06-01 11 12 21.1 25.1 6 H06-02 16 29.1 19 17 12 14 23.1 24.8 21.1 23.1 24.8 23.1 24.8 25.9 24.1 24.8 25.9 59 14 12 H06-03 31.1 31 H08-01 25.1 16 20 8 14 H08-02 16 29.1 21 17 14 H08-03 31.1 30 17 34 10 17 H10-02 29.1 28 H10-03 17 31.1 37 H10-04 34.1 53 H12-02 30.1

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 (A port) 18 8.5 2-4.5 (For mounting) 4 34 Manual override A 24 P R 33.5 G: Approx. 300 H: Approx. 600 (Lead wire length) 55.6 [57.8] (Light/surge voltage suppressor) M5 x 0.8 (X port) 49.6 [56.6] + 34.2 8.5 16.5 21 X 6 32 24 15 17 9 1/8 (P, R port) 42 L plug connector (L): SYJ54-L-01 M plug connector (M): SYJ54-M-01 DIN terminal (D): SYJ54-D-01 M8 connector (W0): SYJ54-W0-01 Approx.

Nozzle Type Ionizer

Repair Parts Emitter assembly IZN10E-NT Body assembly IZN10E A002 06 01 Nozzle type Symbol Type 01 Energy saving static neutralization nozzle 02 High flow rate nozzle 11 Female threads for piping One-touch fitting Symbol Type 06 6: Metric size 07 6.35 (1/4"): Inch size 16 6: Metric size (Elbow) 17 6.35 (1/4"): Inch size (Elbow) Emitter assembly Cartridge assembly IZN10E A003 Input/Output