VFA3000

F N T 01 02 1 8 1 4 Body type For 60, 61 type manifold 6 R port of VFA370 is 1/4. For 70, 71 type manifold 7 How to Order Manifold Base Use the same manifold bases as the VF3000. VV5FA3 Specify the same manifold part number as VV5F3. To order valves and blanking plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

PSE540/560

PSE56-C01 24 B PSE56-A2 A B Model 8.2 12 9.2 12.2 15.5 9.5 A PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-B2 A 24 B 16-3-28 7 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Air Supply Warning Warning ZSE ISE 1.

Ionizer

Ion generation frequency Switch setting 1 Hz 3 Hz 5 Hz 10 Hz 15 Hz 20 Hz 30 Hz 60 Hz 0 1 2 3 4 5 6 7 Caution 7) Wiring of power supply cable Connect the dedicated power supply cable.

AC Servo Motor Driver (SSCNET Type)

(Default) Spare (SW2-2) Rotary axis setting switch (SW1) Description Display 0 Axis No.1 01 1 Axis No.2 02 2 Axis No.3 03 3 Axis No.4 04 4 Axis No.5 05 5 Axis No.6 06 6 Axis No.7 07 Down 7 Axis No.8 08 (Be sure to set to the 8 Axis No.9 09 "Down" position.) 9 Axis No.10 10 A Axis No.11 11 B Axis No.12 12 C Axis No.13 13 D Axis No.14 14 E Axis No.15 15 F Axis No.16 16 -12- 5.

One-touch Fittings

[mm] 1 D1 Weight [g] X Y Nylon Urethane 4 M5 x 0.8 KQ2T04-M5G1 7 8.2 7.7 10 7 15.4 14.8 15.9 13.3 4.5 4.5 2.5 3.9 6 M5 x 0.8 KQ2T06-M5G1 7 10.4 9.7 12 7 14.5 16.5 18.7 13.3 4.5 4.5 2.5 4.4 L1 L1 M M Oval type A L2 4, 6 1: D1 is maximum diameter.

4-channel Flow Monitor ( compatible)

seg)". (0) 4 R/W Line name 4th letter Y U8 0x00 Refer to Figure "Line name communication data (7 seg)". (0) 5 R/W Line name 5th letter Y U8 0x00 Refer to Figure "Line name communication data (7 seg)". 0x0974 (2420) 0x0975 (2421) 0x0976 (2422) 0x0977 (2423) (0) 6 R/W Line name 6th letter (11 SEG) Y U8 0x00 Refer to Figure "Line name communication data (11 seg)". (0) 7 R/W Line name 7th letter

IDG

Note 6) When highly purified air is required, refer to Caution on Design on page 14-19-7.

CG1

7 !8 !

ZL3-OM00801

ZL3/ZL6 GZ33-K1K-01-X56 (kPa ) GZ33-K1K-01-X56 (inHg/psi ) * *inHg/psi 8 ZL3 ZL3-AD3-A 19 No.ZL3-OM00801-A 8. 8.1 ZL3 12 1 22 3(0.760.84Nm) (ZL3-SE1-A) 1 2 8.2 ZL6 ZL6 P6 8.3 1) 2) 3)2 4) 5kPa 5) 6) 7) 20 No.ZL3-OM00801-A 9. 9.1 ZL3 ZL3M ZL3H [mm] 1.9 1.5 [MPa] 0.35 0.50 *1 -91 -93 [MPa] 280 [L/min(ANR)] + *2 300 [L/min(ANR)] 150 135 [MPa] 0.20.6 [] -550() 2] *

VXZ

of 01 to 08 when the suffix 0 is removed, are the same as the solenoid valve model codes.

Air Pilot Operated Series NVSA

NPTF 1 . 1 0 0.83 F | E ANStSymbol i (as a nolmalty closd }way) Cv Ratlng 16, NPTF 2.54 %, NPTF 2.58 4.17 7.'

,,: ,.

. lill| / l(01$enies [0I/$AIllr fiilinm Male Connector: KVH 7 t 6 8 9 1 4 I 1 0 1 3 1 4 24 E ; 40 Consult factorv for irformation " Not available at time ot catalog printing.

ZSE30A(F)/ISE30A

For vacuum/ compound pressure ZSE30A 01 N M ISA2 Option 3 Note) Calibration certificate Nil Y K T Note) Operation manual ISE35 Symbol Rated pressure range ZSE30A ZSE30AF 0 to 101 kPa 100 to 100 kPa PSE Piping specifications IS 01 Note) All texts in both English and Japanese.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

6 AS21FE-01 (3) Stainless steel Accidental release prevention screw !7 PBT (4) Spacer !8 Note 1) AS21FE type is electroless nickel plated. Note 2) Meter-in type is black zinc chromate plated. Note 3) Only for AS21FE-01.

Series IDG

IDG60S to IDG100S IDG3 to IDG50 IDG3H to IDG50H IDG30L/ IDG50L Port size With separator regulator Symbol Bore Size 3 5 10 20 30 50 60 75 100 V IDG60 to IDG100 IDG60H to IDG100H IDG60L to IDG100L 01 1/8 02 1/4 IDG60S to IDG100S Note) Note) 03 3/8 04 1/2 Note 1) Specifications with element service indicator are also available. See the order made section on page 33.

IDX-OM-W023

IDX-OM-W023 7 C 7 C 7-1 7-2 1) 2) IDU Series 7-1 71 IDX-OM-W023 8 K 8 K 8-1 ( ) 8-2 1.6Mpa AD48-8-A-X2112 10 KQ2H10-02AS IDU8E/11E/15E1-*-K N.O. () 0.151.6MPa IDU Series 8-1 8 1 IDX-OM-W023 8 K IDF-S1926 () 1 AD48-8-A-X2112 1 1) 2019 3 2019 2 SERIAL No.XP AD48-8-X2110 IDF-S0086() SMC WEB IDF-S0002 1 C42FP-260S 1 IDF-S0529 1 IDU Series 8-2 8 2 IDX-OM-W023 9

VCW

Valve model VCW2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket) are included

TA301

A port size Symbol Port size Exhaust style Individual exhaust Common exhaust 01 1 8 VVTA300-051-01 1 pc. VOA301 4 pcs. DXT060-51-13A1 pc. Manifold bases same as those for Series VVT300 manifold valves are available.

ZSE30/ISE30

25 M For positive pressure ZSE30 01 25 M For vacuum/Low pressure Option 2 Piping specification R 1/8 (with M5 female thread) NPT 1/8 (with M5 female thread) 01 T1 None Bracket Nil A Output specification NPN output PNP output 1 to 5V output 4 to 20mA output 25 65 26 28 Panel mount B Unit specification Nil M With unit switching function Fixed SI unitI (International System of Units) Note)

VXA21/22

Valve (Port size) VQ 1 (1.5mm) 2 (2.2mm) 3 (3mm) 4 (4mm) VXA31 VXA32 01 ( ) 1 8 02 ( ) 1 4 03 ( ) 3 8 02 ( ) 1 4 Ordering Example (Example) Series VXA31, Orifice size 1.5mm, Rc(PT)1/8 (Part number) VXA3114-01 4.1-69 VXA31/32 Air How to Read the Graph In the sonic flow region: For a flow of 100 l/min.