SMC Pneumatic Clean Series

(Refer to Front matter 23 "Particle generation measuring method"and Front matter 24 "Comparison of cleanliness standards" for details.)

Air Cylinder

13 23 126 127 137 8 25 72 73 83 13 24 24 23 13 23 130 131 141 8 32 72 75 83 13 24 24 21 13 21 130 133 141 8 40 93 96 101 16 24 24 21 16 21 159 162 167 11 Axial foot: CBM2L Bore size Stroke A * -H -R -W N L ZZ + Stroke LS + Stroke N L CBM2G Bore size Stroke A Head flange: * -H -R -W Rod flange: CBM2F Bore size Stroke A * -H -R -W N L Z + Stroke Single clevis: CBM2C Bore size Stroke A

ZP

ZP3-T08UM;-A10-04 [Weight: 10.2 g] ZP3-T06UM;-A10-04 [Weight: 10.2 g] ZP3-T04UM;-A10-04 [Weight: 10.2 g] Width across flat 14 Width across flat 14 Width across flat 14 Applicable tubing: 4 Applicable tubing: 4 Applicable tubing: 4 Buffer Applicable Pad List 3 3 3 3 3 3 6 17 17 17 12 2 12 12 2 23 23 23 M10 x 1 8 M10 x 1 8 M10 x 1 8 Mounting Adapter Part No. 2 Width across flat 7 Width across

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Refer to Standard Stroke on page 6-5-23. Type Bore size N Non-lube/Rubber bumper 20 25 32 40 20 mm 25 mm 32 mm 40 mm Applicable Auto Switch/Refer to page 6-16-1 for further information on auto switches.

70astamb1

Without Air Cushion Port Cushion valve Double clevis style (D) CDH10 Bore size (mm) Z ZZ 32 40 50, 63 80, 100 170.5 160 164 190 238 175 205 Double Clevis Style 261 U Bore size (mm) Stroke range CDH10 CX +0.3 +0.1 CZ L RR U Z ZZ L Z + Stroke RR CX 32 40 50 63 80 100 Up to 500 23 23 30 30 42 42 10.5 11 15 15 23 23 13 13 17 17 26 26 28 28 40 40 60 60 154 158 182 182 228 228 164.5 10 10 14

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

23 Magnetically Coupled Rodless Cylinder Basic Type Series CY1B 6, 10, 50, 63 How to Order CY1B 25 H 300 Basic type Bore size Refer to Standard Stroke below.

Fieldbus system EtherNet/IP compatible SI Unit

system EtherNet/IP compatible SI Unit MODEL / Series / Product Number EX600-SEN7/SEN8 EX600-ED# Table of Contents Safety Instructions 4 System Outline 9 Definition and terminology 10 Assembly 11 Mounting and Installation 13 Installation 13 SI Unit Model Indication and How to Order 16 Summary of Product parts 16 Mounting and Installation 17 Wiring 17 Setting and Adjustment 18 LED Display 23

SI unit ( device)

Refer to page 23 and 24 of this document for details.

SFOD-OMT0005CN

5.1 PWR . 23 5.2 MOT:ENC: . 23 5.3 SII/O . 23 (1) . 23 (2) . 24 5.4 P1P2: EtherNet/IP . 24 6 . 25 6.1 . 25 6.2 . 25 6.3 . 26 (1)(C24V,M24V,0V) . 26 (2)(EMG) . 26 (3)(LK RLS) . 26 6.4 . 27 (1)() . 27 (2)() . 28 -1- (3)((2)) . 29 7LED . 30 7.1 LED . 30 7.2 LED . 30 8 . 31 8.1 . 31 8.2 No. . 31 8.3 / . 31 8.4 . 31 9 . 32 9.1 . 32 (1) . 32 (2) . 33 (3) . 37 (4) . 37 10 . 41 10.1

HRX-OM-M005

CH1-23 CH2-23 Communication Error WRN Continued Check for disconnection of the communication connector from this product. Lower the setting for resistivity. Electical resistivity of the circulating fluid falls short of your specified value. (optional) CH1-24 CH2-24 DI Low Level WRN Continued Replacement of the DI filter is required.

LUBRICATOR

Port thread Rc G NPT C3SL-36W(Z)-A C3SL-36W-A Barb fitting Applicable tube T0604 Semi-standard Semi-standard 2 Semi-standard 23 Part no. Part no. Port thread Port thread Rc Rc G G NPT C3SL-2(Z)-A NPT C3SL-23(Z)-A C3SL-2-A C3SL-23-A External appearance drawing and part no. B B 14 Semi-standard Semi-standard 8 Semi-standard 38 Part no. Part no.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

The gripping force is 23 times greater than the workpiece mass, and therefore satisfies a gripping force setting value of 20 times or more. MHSL3 5 to 10 times or more MHS4 If high acceleration, deceleration or impact forces are encountered during motion, a further margin of safety should be considered.

CLK1

Hs 33.5 38 43.5 50.5 A B 0 1.5 1.5 D-A3 D-G3, D-K3 23 24.5 24.5 Approx. Hs A B 71.5 77 84 0 1.5 1.5 D-A4 23 24.5 24.5 Approx.

KA

> 1 4 10 KAL06-U02 11.4 11.4 15 24.5 23 17 12 1 8 1 4 22.5 24.5 25.5 26 KAL08-U01 KAL08-U02 11 16 14 15.2 12 8 23 18.5 14.9 14.9 3 8 25.5 27 KAL08-U03 17 24 1 8 KAL10-U01 29.5 27 26.5 25 25 21 24 14.9 14.9 Kl 1 4 3 8 30 30.5 17 KAL10-U02 KAL10-U03 26.5 17 18.5 10 21 25.0 25.0 Ml 1 2 KAL10-U04 30 31.5 45 23 27 22 1 4 3 8 27 28 31.5 32.5 KAL12-U02 KAL12-U03 17 Hl 20.9 17 12 28.5

Modular F.R.L. Unit

Page 23 Page 28 Mist Separator Page 29 Micro-Mist Separator Page 32 . Air Filter + Regulator . Filter Regulator . Made to Order Specifications . Modular Type Filter Regulator AFM20 to 40 .

Table of Contents

L dimension L kit: 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. VV5Q13 L 08 N N 1 D L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Parallel Style Air Gripper Series MHZ

18 7.6 0.02 MHZ MHF 11H9+0.043 0 depth 2 When open 15.2 +2.2 0 When closed 11.2 0 0.7 12 23 MHL 31 12 MHR 57 2 x M3 x 0.5 thread depth 6 (Mounting thread) Note) When using auto switches, through-hole mounting is not possible.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 40 54 54 36 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 50 69 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 63 69 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150

VCB

Port size VCB2 VCW20-12-01A 34 40 25 30 12.8 12.8 5 4.5 6 13 1/8, 1/4 VCW30-12-02A 42 52 30 40 19 19 6 5.5 7 19 1/4, 3/8 VCB3 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-02A 42 52 30 40 23 23 6 5.5 7 19 1/4, 3/8 VCB4 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-06A 56 65 44 53 28.2 28.2 6 5.5 7 26 3/4 2 mounting screws (for mounting bracket) are included

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Vacuum pressure Suction flow rate 13-5-5 6 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS