Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 DNil A B C Sealmaterial XSA 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Symbol Nil N1 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 1.3 x 10-10 (FKM) XVD Note 1) Values at ambient temperatures, excluding gas permeation.

Compact Slide ø 6, ø 10, ø 16, ø 20 MXH Series

Compact Slide 6, 10, 16, 20 MXH Series RoHS MXH MXH How to Order MXS MXQ 10 M9BW MXH Z 60 MXQ MXF Made to Order Refer to page 20 for details. Compact Slide MXW Bore size Number of auto switches MXJ 6 mm 10 mm 16 mm 20 mm 6 10 16 20 Nil S 2 pcs. 1 pc. MXP MXY Auto switch MTS Without auto switch (Built-in magnet) Nil For applicable auto switch model, refer to the table below.

Air Slide Table/Long Stroke Type Series MXY

21.5 4 2 M6 x 1 (Width across flats 3) M8 x 1 (Width across flats 4) MXY8 30 70 10 40 29 M4 x 0.7 25 20.9 3.5 25 4 14 5 2.5 MXY12 40 M5 x 0.8 8.5 86 15 52 31 18 36 30.9 32 5 6 3 PH R RH RL T TB P PL PR Q QW TH W WD WE WR Z Model MXY6 4 2.9 5.1 13 7 9 11 60 12 3(depth 3) 3(depth 3) 2.5 30 5 88 25.5 20 MXY8 4 3.4 6.1 19 7 10 13 70 15 3(depth 3) 3(depth 3) 3 38 6.5 98 32 25 MXY12 5 4.5 7.8

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

10 Air Slide Table Long Stroke Type Series MXY Construction @3 y w q r u #0 MX MTS !

Magnetically Coupled Rodless Cylinder: Low Profile Guide Type ø 10, ø 15, ø 25 CY1F Series

Number of auto switches Bore size (mm) Nil S n 2 pcs. 1 pc. n pcs. 10 15 25 10 15 25 Auto switch Nil Without auto switch (Built-in magnet) For the applicable auto switch model, refer to the table below.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

1.3 x 10-9 1.3 x 10-8 CYV Kalrez Q1 R1 R2 R3 S1 T1 U1 4079 SS592 SS630 SSE38 1232-70 3310-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

CEP1

MODE , () , 2 (90) , , ,, 2 , , SMC() 7,8 10 (, , ) CEU5 , , 10 , ( ,23m ) 23m , AC ? , 8 ? , , 50~300mm/s , 7 ? , , 9 6-2 ? 3,4,9 ? , , 3 ? , ,, 3,9 ? 50~300mm/s 7 ,? , 3,9 ? , 3,9 , ? , , 4 ? , 2,3

Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40 CY1S Series

Bumper bolt (resin tipped): Mounted on both sides Nil Bore size 6 10 15 20 25 32 40 Bumper bolt (Same as the opposite side) 6 mm Port thread type Adjustment bolt (Same as the opposite side) 10 mm Bore size (mm) Symbol Type 15 mm Shock absorber/ Adjustment bolt (metal ended): Mounted on both sides 6,10,15 M thread B 20 mm Nil Rc 25 mm TN TF 20, 25, 32, 40 NPT 32 mm Shock absorber (Same as

CH

Standard Strokes Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

Rotary Clamp Cylinder: Standard ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 MK Series

-X 389 MK Series Specifications 12 16 20 25 32 40 50 63 Bore size (mm) Double acting 90 10 Clockwise, Counterclockwise Action Rotary angle Note 1) Rotary direction Note 2) Rotary stroke (mm) Clamp stroke (mm) Theoretical clamp force (N) Note 3) 7.5 9.5 15 19 10, 20, 30 10, 20, 30, 50 40 75 100 185 300 525 825 1400 Air 1.5 MPa Fluid Proof pressure Note 4) 0.1 to 0.6 MPa Operating pressure

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Without adjuster type is not available for the 11-MXP6 series. 11-MXP How to Order MXPJ6 Clean series 11 Vacuum suction type 11 MXPJ6 10 22 MXPJ6 10 11-MXPJ6 Copper, fluorine and silicone-free + Low particle generation Stroke 5 10 5 mm 10 mm 22 Vacuum suction type With auto switch type is not available for the 11-MXPJ6 series.

How to Order ø 6, ø 8, ø 12, ø 16, ø 20, ø 25 MXQ  A Series Air Slide Table Double-ported Type

buffer, axial piping 6 Centralized adjuster 7 Centralized adjuster (Symmetric) 8 Buffer, Centralized adjuster 9 Buffer, Centralized adjuster (Symmetric) Nil 2 S 1 n n Port Switch mounting groove Port Switch mounting groove 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 For details, refer to the next page. i Made to order 16 10, 20, 30, 40, 50, 75, 100, 125 Port Switch mounting groove

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

1122Series MXP/MXPJ6 Air slide table 6, 10, 12, 16 How to Order Clean series 11 Vacuum suction type MXP 11 12 15 M9N MXP 22 12 15 M9N Copper, fluorine and silicon-free + low particle generation Number of auto switches Nil s n 2 pcs. 1 pc. n pcs. 22 Vacuum suction type Bore size Stroke mm Type of auto switch 6 10 12 16 5, 10 10, 20 15, 25 20, 30 Nil Without auto switch Refer to the table

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

10 5 10 Note) 15 Note) 20 Note) 5 5 1 pc.

CE

70500mm/s 12 6-2 5,6, 12 5 5,12 10 ?

Series CXSJ 11-/12- ø6, ø10 21-/22- Dual Rod Cylinder/Compact Type

M L Bearing type Compact type Slide Bearing Ball bushing bearing Bore size/Stroke (mm) Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50 Bore size 6 10 Auto Switch Specifications (Refer to the WEB catalog for detailed specifications and auto switches not in the following table.)

JIS Standard Compact Hydraulic Cylinder

Cylinders with auto switch will be shipped together with the auto switch and auto switch mounting bracket (32 to 50) (not assembled). 264 JIS Standard Compact Hydraulic Cylinder: 10 MPa CHKD Series Specifications 20 25 32 40 50 63 80 100 Bore size (mm) Double acting/Single rod Action Hydraulic fluid Fluid CHQ 10 MPa Nominal pressure 15 MPa Proof pressure CHK CHK 13 MPa Maximum allowable pressure

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard Nil P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.

Low-Speed Compact Rotary Actuator Rack & Pinion Type CRQ2X Series Size: 10, 15, 20, 30, 40

IC circuit A96 A96V 5 V Yes 24 V Grommet A93V2 A93 A90 100 V Relay, PLC 2-wire 12 V A90V No IC circuit 100 V or less 1Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction. 21 m type lead wire is only applicable to D-A93.

D-F6N/D-F6P/D-F6B

Electrical entry direction In-line Wiring type 2-wire 3-wire NPN PNP Output type Applicable load IC circuit, relay, and PLC 24 VDC relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) Current consumption 10 mA or less Load voltage 24 VDC (10 to 28 VDC) 28 VDC or less Load current 2.5 to 40 mA 40 mA or less Internal voltage drop 4 V or less 0.8 V or less at 10 mA (2V or less at