VFS

Note 5) Based on JIS C 4003.

SYJ300/500/700

Type of actuation Series Port size 1 2 5 7 M5 01 Normally closed Normally open 3 port SYJ500 SYJ700 M5 x 0.8 1/8 (SYJ700 only) (For manifold type 20, 21R) SYJ 2 5 Y M5 1 5 Body ported 5 1 SYJ 4 5 Y 01 Base mounted Body option 3 port Thread type For sub-plate style, manifold type 40, 40R , 41, 41R Pilot valve individual exhaust Port size Nil Electrical entry F Nil Y: With connector Rc M Common

45

SX 000-50-2ANote : SX3000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 X5000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 C8: With One-touch fitting for 8 (Gasket u supplied as an accessory.) 3 5 3 5 3 5 3 5 3 5 3 5 For 45(N)F (D-sub connector) (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting

CLK1

Pedestal KZZ KL2 KY KS 95 80 15 50 30 KQ 35 45 KC 50 5 25 KX KL1 57 34 16 15 KZ KZZ KL1 KL2 KX KZ KY KS KQ KC Type Applicable cylinder Bore size 50 63 40 CKA40-40-209A CLK1A40-75Y, CLK1A50-75Y, CLK1A63-75Y 402.5 406 398 167 75 132 222 35 69 59 0 70 CKA40-40-210A CLK1A40-100Y, CLKA50-100Y, CLK1A63-100Y 437.5 441 433 177 75 142 232 45 83 58 0 90 CKA40-40-211A CLK1A40-150Y, CLK1A50-150Y, CLK1A63

45

SX 000-50-2ANote : SX3000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 X5000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 C8: With One-touch fitting for 8 (Gasket u supplied as an accessory.) 3 5 3 5 3 5 3 5 3 5 3 5 For 45(N)F (D-sub connector) (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting

VQ7-6/7-8

It consists of a circuit equipped with a function to prevent lurching during release. 1 1 2 4 5' 3' 5 3 5 3 Conversion adapter plate VV72-V-1 This conversion adapter plate allows a VQ7-6 (size 1) valve to be mounted on a VQ7-8 manifold base.

ITV

1.0 0 2 6 4 8 1.0 100 0 25 50 75 10 Input signal (%F.S.)

VQ7-6/7-8

3 3 5 3 5 Regulating port B Regulating port P Regulating port A Caution Part No.

VQ7-6/7-8

3 3 5 3 5 Regulating port B Regulating port P Regulating port A Caution Part No.

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

MGF63 MGF63 Load mass: m0 (kg) Load mass: m0 (kg) 30 30 Load mass: m (kg) Load mass: m (kg) MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 MGF40 5 MGF40 2 2 D3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 10 50 100 10 50 100 5 -X Eccentric distance : l (mm) Eccentric distance : l (mm) Stroke (mm) Stroke (mm) Individual -X How to read the graph 1) When

/

Model Voltage L (With light) Voltage symbol 5 6 24 VDC 12 VDC VXE21 0 1 2 3 VX021N-12A VXE22 0 2 3 4 VXE23 0 2 3 4 VX022N-12A VXE22 0 5 6 VXE23 0 5 6 VX023N-12A-L Dimensions P. 17 (Single unit) 8 Series VXE21/22/23 For Oil /Manifold Fluid and Ambient Temperature Solenoid Valve for Manifold/Valve Specifications N.C.

LVQ

Size 1 2 1 2 3 1 2 1 2 A B C A B A B A B 2 2 3 3 3 4 4 5 5 2 2 2 3 3 4 4 5 5 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 SMC SMC P U Panel mount union Union SMC SMC With reducer Basic size Note) Select the fittings of the same size as the one at the valve side

Clamp Cylinder with Lock Series CLK1

Pedestal KZZ KL2 KY KS 95 80 15 50 30 KQ 35 45 KC 50 5 25 KX KL1 57 34 16 15 KZ KZZ KL1 KL2 KX KZ KY KS KQ KC Type Applicable cylinder Bore size 50 63 40 CKA40-40-209A CLK1A40-75Y, CLK1A50-75Y, CLK1A63-75Y 402.5 406 398 167 75 132 222 35 69 59 0 70 CKA40-40-210A CLK1A40-100Y, CLKA50-100Y, CLK1A63-100Y 437.5 441 433 177 75 142 232 45 83 58 0 90 CKA40-40-211A CLK1A40-150Y, CLK1A50-150Y, CLK1A63

Rotary Table/

8 and @7 20 P523030-5 50 P523040-5 70 P391050-5 100 P391060-5 200 P523010-5 Seal kit P391070-5 17 Rotary Table Series MSQ Dimensions/Size 10, 20, 30, 50 WB effective depth WC XB effective depth XC Basic type/MSQBA 8-WD depth WE (Circumference: 8 equivalents) XA 2 WA 2 4-JJ depth 8 45 2-J through JA depth of counter bore JB 22.5 BE WF 2-M5 x 0.8 Piping port (Plugged) BD Effective depth FB

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

MRQ DBasic type 11-MSQBA 11-MSQBR M5 x 0.8 depth 5 (Vacuum port) 20DC DB DA (mm) DA(h9) DB(h9) DC(H9) DD(h9) HB HC HD Size 10 20 30 50 46 45 20 35 20 5 59 HB 61 60 28 40 22 6 65 (HD) 11.5 67 65 32 48 22 6 68 5.5 HC 77 75 35 54 24 7 77 Dimensions other than above are identical to the basic type.

Cylinder with Turntable Series MGT

25st 50, 75, 100st Larger than 100st WA WB Bore size (mm) 63 80 100 X XA XB XC XL YY YL Z 52 52 72 50 54 47 38 42 35 128 128 148 28 28 48 24 28 11 88 92 85 8 10 10 6 7 7 5 6 6 80 100 124 4 5 5 20 24 28 M10 x 1.5 M12 x 1.75 M14 x 2.0 D-X (mm) MGTM (Slide bearing) MGTL (Ball bushing bearing) (mm) AA A E BD Bore size (mm) 63 80 100 AA A E DB Bore size (mm) 63 80 100 Individual -X 25, 50st Larger

Compact Guide Cylinder Series MGQ

D-A9V D-M9V 5 2 pcs. 10 1 pc. 15 10 5 D-M9 2 pcs. 15 10 1 pc. 15 10 D-M9W 2 pcs. 15 10 1 pc. 10 D-M9WV 2 pcs. 10 1 pc. D-Z7 D-Z80 10 5 2 pcs. 15 10 1 pc. D-Y59 D-Y7P 10 5 2 pcs. 15 10 1 pc. D-Y69 D-Y7PV 5 2 pcs. 5 1 pc.

13

38.5 75 15.3 4.2 28 7.5 3 38.5 57 12.8 3.2 24 6 6 6 6 6 6 10 10 One-touch and screw-in connection Applicable tubing diameter B Model A 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 60 6 29.5 16 12.8 28 5 47 63 6 30.5 18 12.8 29 5 50 63 6 30.5 18 12.8 29 5 50 78 8 39 23 13.7 35 7 61 78 8 39 23 13.7 35 7 61 B C D E F G H (Mounting hole) ZH05BS-06-01 ZH05BL-06

Digital Gap Checker

0.20 0.15 mm 0.3 mm 0.03 mm 0.30 0.03 0.15 0.20 0.02 0.10 0.01 mm 0.10 0.01 0.05 0.05 mm 0.02 mm 0 0 0 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Piping length: 5 m Piping length: 5 m Piping length: 5 m Reference pressure 0.06 Reference pressure 0.30 Reference pressure 0.60 The distance

CE

9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.