42

External pilot supply port Indicator light Connector entry direction D side U side Connector entry direction D side U side D0 D1 D2 D3 Type of connection IP65 compatible U0 U1 U2 U3 Without cable Cable length 1.5 m Cable length 3 m Cable length 5 m F Kit F Kit L Kit L Kit Cable length 0.6 m Cable length 1.5 m Cable length 3 m D0 D1 D2 U0 U1 U2 1 to 12 stations 1 to 12 stations S T Kit (Terminal

IZS30_eng

Surface electric potential sensor Sensor model IZS30-D1 Detection style Rotary sector style Power supply voltage DC5V (Supplied from Ionizer) Power consumption Included in the Sensing DC mode power consumption on the ionizer.

7ND9071en

However, with performance level settings A1 to D1, adaptive properties of the ND control algorithm are disabled. After the desired value is displayed, press the ? key to conclude the operation. 5.5.2 Low cut-off, CUTL Low cut-off safety range CUTL ensures the valve closing against mechanical travel stops. The factory default value is 2 %. Once CUTL is displayed press the ?

SI unit for AS-Interface

. -17No.EX-OMP0025-A Data bit SI unit input/output data bit Address Data bit EX250-SAS3/-SAS7 EX250-SAS5/-SAS9 D0 IN0 / OUT0 IN0 / OUT0 D1 IN1 / OUT1 IN1 / OUT1 ADDR1 D2 IN2 / OUT2 IN2 / OUT2 D3 IN3 / OUT3 IN3 / OUT3 D0 IN4 / OUT4 D1 IN5 / OUT5 ADDR2 D2 IN6 / OUT6 D3 IN7 / OUT7 Status register It is possible to check the peripheral fault error (a blown input block fuse or detecting over current

MHF2-E

MHF2-8D, D1 MHF2-8D2 MHF2-12D, D1 MHF2-12D2 MHF-B08 (2 pcs.) MHF-B08 (4 pcs.) MHF-B12 (2 pcs.) MHF-B12 (4 pcs.)

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Dimensions H1 (Hexagon width across flats) Applicable tubing O.D. d H2 (Hexagon width across flats) L4 L3 L5 D1 L2 M M L1 Metric Size Inch Size L5 L5 L4 Max. L4 Max. Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.

AS-FPQ/AS-FPG

5 15-17-5 6 Series AS-FPQ/FPG Dimensions H (width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max. Min. Max. 1 2 Min.

KA

(mm) A D2 L1 D1 M L2 Part No.

AS-FPQ/AS-FPG

L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

VQ5000

Connector entry direction D side U side Electrical entry External pilot supply port Indicator light IP65 compatible U0 U1 U2 U3 U side D0 D1 D2 D3 D side Without cable Cable length 1.5 m Cable length 3 m Cable length 5 m Kit F Kit F U0 U1 U2 D0 D1 D2 1 to 12 stations Cable length 0.6 m Cable length 1.5 m Cable length 3 m Kit L Kit L 1 to 12 stations Type of connection T1 S kit (Serial transmission

Vacuum Module Series ZX

(VJ324M) K1 [82] K5 [73] D1 [77] D2 [100] D3 [41] D2 [100] Solenoid valve N.C. (VJ114) K3 [132] K2 [73] K6 [58] K4 [119] J2 [100] J1 [77] J3 [41] Solenoid valve Release valve N.C. (VJ314) External release (ZX1A) Air operated N.C. (VJA314) None [ ]: Mass (g) How to Order /Refer to page 866 for details.

Table of Contents

SMC + 12 to 24 VDC IS Brown Gray LED Green kPa ZSM Main circuit PLC Input terminal RESET SET Black Tr1 D1 LED Red PLC Input terminal PF2 Tr2 D2 White COM IF Blue How to Use Connector Data 1. Attaching and detaching connectors When assembling the connector to the switch housing, push the connector straight onto the pins until that lever locks into the housing slot.

ZSE3/ISE3

SMC + 12 to 24 VDC IS Brown Gray LED Green kPa ZSM Main circuit PLC Input terminal RESET SET Black Tr1 D1 LED Red PLC Input terminal PF2 Tr2 D2 White COM IF Blue How to Use Connector Data 1. Attaching and detaching connectors When assembling the connector to the switch housing, push the connector straight onto the pins until that lever locks into the housing slot.

ZX

(ZX1A) K1 [82] K5 [73] D1 [77] D2 [100] D3 [41] D2 [100] None K3 [132] K2 [73] K6 [58] K4 [119] J2 [100] J1 [77] J3 [41] Release valve None [ ]: Weight (g) How to Order Refer to page 13-2-4 for details.

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

SMC + 12 to 24 VDC Brown Gray LED Green kPa Main circuit PLC Input terminal RESET SET Black Tr1 D1 LED Red PLC Input terminal Tr2 D2 White COM Blue How to Use Connector 1. Attaching and detaching connectors When assembling the connector to the switch housing, push the connector straight onto the pins until that lever locks into the housing slot.

KA

(mm) Connection thread M thread Uni thread A Weight (g) L2 M D1 D2 L1 Model Urethane KAL23-M5 15 9.6 16 15.5 M5 x 0.8 M6 x 1 7 6 Applicable tubing 8 8 15.5 19.5 21 3.4 2.9 8 4 5 1 8 KAL23-M6 KAL23-U01 10 3.2 17.5 10 KAL04-M5 15.5 M5 x 0.8 M6 x 1 8 16 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 KAL04-U01 20.5 20 8 14 10 10 4.2 4.2 1 4 KAL04-U02 22 21.5 14 KAL06-M5 16 M5 x 0.8

Dual Rod Cylinder Series CXSJ/CXS

D-M9AL Bore size (mm) D A B C 6 10 15 20 25 32 19.5 0.5 7.5 11.5 A C 29.5 3 17.5 9 35.5 10 23.5 2 Electrical entry direction: Inward Electrical entry direction: Outward 43 13 31 5 44 15 32 7 53 15.5 41 7.5 Auto switch mounting dimensions (mm) CXSJ6,10 C3 10 Bore size B1 Symbol Auto switch model C2 D2 6 1 1 2 5.5 4 8 6 D1 D-A9 D-M9, D-M9W D-M9AL A1 B1 B1 C1, D1 C2, C3, D2 C1, D1 C2, C3, D2

Mechanically Jointed Rodless Cylinders

Application Application Mounting direction w (to minimize the installation width) Work piece Mounting direction q (to minimize the installation height) Work piece Guide Guide Series MY3 Series MY3 Floating mechanism Bracket Floating mechanism Bracket Mounting Example Mounting Example G G D1 D2 Za2 Za1 Ea Ea Ea Ea C1 C2 K2 (Screw length) B2 F2 B1 F1 K1 (Screw length) Detail drawing of Za2

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

(mm) Bore size (mm) CC Single acting 80 50 32 RB 40 63 50 80 Option J Three types of action With lock mechanism With cancel cap Vm/min D1. Single acting 2. Double acting 3.

AC Servo Motor Driver (Network card type ）

(Note) Model speed command 0 and equal to or less than zero speed Servo motor speed 0 r/min Base circuit (Energy supply to the servo motor) ON OFF driver Servo amplifier display 86 No alarm (d1) MBR (Electromagnetic brake interlock) ON OFF ON (no alarm) ALM (Malfunction) OFF (alarm) Note.