High Purity Chemical Valve

G H PA C SMC A B N E J B (F) Dimensions (mm) A B C D E F G H J K L M M5 x 0.8 R N Q Model LVC2m LVC3m LVC4m LVC5m LVC6m 30 30 54.5 44 11 79 28.5 13 4 20 37 3.5 23.5 M3 x 0.5 36 47 79 56 16.5 106 43 17.5 7.5 34 46 5.5 39 46 60 96 68 22 131 55 18 8 42 57 5.5 48 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 58 75 129 84 26 154 68 27.5 8 56 71 6.5 62 58 75 138 84 32 165 77 27.5 8 56 71 6.5 71 465 Series LVC

Compact Guide Cylinder Series MGQ

D-A9V D-M9V 5 2 pcs. 10 1 pc. 15 10 5 D-M9 2 pcs. 15 10 1 pc. 15 10 D-M9W 2 pcs. 15 10 1 pc. 10 D-M9WV 2 pcs. 10 1 pc. D-Z7 D-Z80 10 5 2 pcs. 15 10 1 pc. D-Y59 D-Y7P 10 5 2 pcs. 15 10 1 pc. D-Y69 D-Y7PV 5 2 pcs. 5 1 pc.

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

D-M9WV D-M9AVL D-M9 D-M9W D-M9AL D-Y7WV D-Z7 D-Z8 D-Y69 D-Y7PV D-Y59 D-Y7P D-Y7W D-Y7BAL 5 10 15 20 10 5 10 15 20 1 pc. 10 10 20 25 15 10 10 15 20 2 pcs.

Rotary Table/Rack & Pinion Style Series MSQ

Applicable model: D-A73, A73H, A73C, C73, C73C, E73A, Z73 D-R73, R73C, 97, 93A, A93, A93V D-A33, A34, A33A, A34A, A44, A44A D-A53, A54, B53, B54 2) When using a 2-color indicator type auto switch (D-A79W, A59W and B59W), the auto switch will constantly remain ON if the connections are reversed.

MGQ

Specifications D By-pass port dia.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

D D D D SV SS5V1-W10S4VWD-05B-C6 1 set (manifold part no.)

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

DZ/Y/YZ VFS1320-D/DZ/Y/YZ VFS1420-D/DZ/Y/YZ VFS1520-D/DZ/Y/YZ Lead wire O.D.

Cylinder with Turntable Series MGT

As a rule, it should be turned about 90 past the position at which tightening can be felt. 456 Cylinder with Turntable Series MGT Minimum Stroke for Mounting Operating Range (mm) (mm) Auto switch model Bore size No. of auto switches 100 80 63 Auto switch model 63 80 100 D-A9/A9V D-A9 D-A9V D-M9 D-M9V D-Z7 D-Z80 D-Y59 D-Y7P D-M9W D-M9WV D-Y69 D-Y7PV D-Y7W D-Y7WV 11 10.5 10.5 D-M9/M9V D-M9W

VFS

DZ/Y/YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

45

3 SX3000 5 SX5000 Blanking plate assembly SX3000-75-2A Connector mounting position Common specifications Symbol Mounting position U U side Nil Positive common N Negative common D D side Stations 2 1 U side D side Valve stations Note Stations Symbol 02 2 stations Double wiring specifications(1) 10 10 stations 02 2 stations (2) Manifold base (5 stations) Available up to 20 solenoids.

Table of Contents

Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

45

3 SX3000 5 SX5000 Blanking plate assembly SX3000-75-2A Connector mounting position Common specifications Symbol Mounting position U U side Nil Positive common N Negative common D D side Stations 2 1 U side D side Valve stations Note Stations Symbol 02 2 stations Double wiring specifications(1) 10 10 stations 02 2 stations (2) Manifold base (5 stations) Available up to 20 solenoids.

Compact Cylinder with Air Cushion Series RQ

30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 9 8 9.5 13.5 10 3 Compact Cylinder with Air Cushion Double Acting: Single Rod Series RQ Auto Switch Mounting Bracket Part Nos.

Rotary Table/

D. (mm) I. D.

Cylinder with Lock Series CNS

Hs Proper auto switch mounting positions Auto switch mounting height (mm) (mm) Auto switch models D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch models D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F5F D-F5NTL D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 D-A59W D-F5NTL D-F5F Bore size (mm) Bore size (mm) A B A B A B B A B Hs Hs Ht Hs Ht A Hs 125 125 0 0 2 2 4.5 4.5 8.5 8.5 9.5 9.5

REC

30.0 40 70.0 39.5 64.0 33.5 69.0 38.5 65.5 35.5 67.5 37.0 67.0 36.5 63.5 33.0 Auto Switch Mounting Height (mm) D-C7 D-C8 D-H7 D-H7lW D-H7lF D-H7BAL D-B5 D-B6 D-B59W D-G5NTL D-H7C D-G39 D-K39 D-A33 D-A34 Bore size (mm) D-C73C D-C80C D-A44 HS HS HS HS HS 20 24.5 27 62 69.5 27.5 25 27 29.5 64.5 72 30 32 30.5 33 68 75.5 33.5 40 35 37.5 72.5 80.0 38 4.9-16

CNS

D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch model D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-F59F D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 MLGP D-A59W D-F5NTL RLQ Bore size (mm) Bore size (mm) MLU A B A B A B A B Hs Hs Ht Hs Hs Ht 125 125 0 0 2 2 4.5 4.5 9.5 9.5 116 126 75.5 69.5 74.5 70 ML1C 140 140 0 0 2 2 4.5 4.5 9.5 9.5 124 134 81 76.5 80 76.5 160 160

Regulator

mount Q R U AR20-D 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AR30-D 41 40 46 6.5 8 53 2.3 31.3 38.5 19 7 AR40-D 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AR40-06-D 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50-D 70 75 66 11 22 113 3.2 AR60-D 70 75 66 11 22 113 3.2 The dimension of B is the length when the regulator knob is unlocked. -29- 12-3.

SYJ300/500/700

It is already built-in to the rectifier circuit. 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] Electrical entry D With connector DIN terminal DC specifications of type D and DO is only available with 12 and 24 VDC. Power saving circuit is not available in the case of D or DO type.

CE

Bore size (mm) Applicable switch Note 175 200 250 300 400 500 150 125 100 75 25 50 12 Switch mounting screw (M3 x 0.5 x 8l) Square nut D-A7, A8 D-A7H, A80H D-A73C, A80C D-A79W D-F7V D-F7, J7 D-J79C D-F7WV D-F79W, J79W 12 20 BQ-1 20 32 32 40 50 63 40 Switch mounting screw (M3 x 0.5 x 10l) Switch spacer Switch mounting nut 50 BQ-2 63 Contact SMC regarding non-standard strokes.