CJ2X

Low Speed Cylinder Double Acting, Single Rod Series CJ2X 10, 16 How to Order Bore size 10 16 10 mm 16 mm Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate stroke other than above is manufactured upon receipt of order.

Electric Slide Tables

Motor cable 20 20 24 20 24 Lock cable 20 15 15 Dimensions (mm) Model L C D E F G H 108.5 J 40 LES16R-304 38 102.3 78 2 40 LES16R-50136.5 6 34 130.3 106 2 78 78 LES16R-75180.5 8 36 174.3 150 4 36 72 LES16R-100205.5 10 36 199.3 175 5 36 108 16 Series LES Dimensions: Basic Type/R Type LES25R 5H9 (+0.030 0 ) depth 2 A-A 66.5 0.3 Motor cable (2 x 5) 18 7.3 (Max. screw-in depth) 5.5 45.8 24 3.3

Refrigerated Thermo-chiller

Mass Note 10) (kg) Safety standards 170 175 275 145 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation. Note 2) FluorinertTM is a trademark of 3M and GALDEN is a registered trademark of Solvay Solexis, Inc. Regarding the fluid other than the above, please contact SMC.

2-Color Display Digital Flow Switch Series PFM

NPT 1/4 Rc 1/8 Port size G1/8 G1/4 Straight Without orifice: 95 g Bottom Without orifice: 105 g Straight With orifice: 135 g Bottom With orifice: 145 g LCP, PBT, Brass (Electroless nickel plated), HNBR (+ Fluoro coated), FKM (+ Fluoro coated), Silicon, Au, Stainless steel 304 Straight Without orifice: 125 g Bottom Without orifice: 135 g Straight With orifice: 165 g Bottom With orifice: 175

Modular/F.R.L. Units Series AC

98 110 43.5 28 27.8 1 44.5 61.5 42.5 84 1/4 3.2 42.5 196 84 409 175 98 110 43.5 Optional specifications Semi-standard specifications Bracket mount With auto drain With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model M Q1 Q2 R1 R2 S U V B B B B B AC10A AC20A AC30A AC40A AC40A-06 AC50A AC60A 4.5 25 125 107 7 20 2.8 27 24.5 4.5 5.5 164 30 177 160 12 24 3.2 33 29

Compact Cylinder

M8 x 85 l x 90 l x 95 l x 100 l x 105 l x 110 l x 115 l x 120 l x 125 l x 135 l x 155 l x 175 l 85 90 95 100 105 110 115 120 125 135 155 175 C(D)55B100-10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 M4 x 50 l x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l 50 55 60 65 70 75 80

CG5-S

One-touch Fittings/Stainless Steel Series AS-FG P. 20 One-touch Fittings/Stainless Steel Series KG P. 21 Miniature Fittings MS P. 25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Se ries CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175

Electric Actuator

Note 5) Grease Ball screw /Linear guide portion Low particle generation grease 100 W/;40 200 W/;60 400 W/;60 Motor output/Size AC servo motor (100/200 VAC) Motor type Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev) Encoder Horizontal 45 65 210 Power consumption [W] Note 6) Vertical 145 175

/

Model SGH130-10 SGH230-3015 SGH230-7015 SGH330-3020 SGH330-7020 SGH430-3025 SGH430-7025 Main port Pilot port 3 x 3/8 1/8 60 28 46 133 34 60 24 29 142 37.5 75 62 6.5 33 3 x 1/2 1/8 60 28 48 135 34 65 24 29 144 37.5 75 62 8.5 35 3 x 1/2 1/8 77 33 49 150 20 44.5 80 36 25 159 50 100 70 5 33 3 x 3/4 1/8 77 33 53 154 20 44.5 84 36 25 163 50 100 70 9 37 3 x 3/4 1/4 96 43 60 163 24 60.5 100 49 34 175

Low Profile Slide Table Series MXF

H G 5H9 depth 5 +0.030 0 33.5 6 5H9 +0.030 0 depth 5 (mm) N G H NN J M Z ZZ Model MXF20-30 4 29 30 4 57 91 91 104 MXF20-50 4 36 45 4 77 113 113 126 MXF20-75 6 40 45 6 125 162 162 175 MXF20-100 6 59 60 6 175 211 211 224 144 Low Profile Slide Table Series MXF Auto Switch Proper Mounting Position (Detection at Stroke End) Reed Auto Switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V (mm) B E

Air Slide Table Series MXS

11 12 12 6.6 B A 16 34 16 34 G H Section AA Section BB (NN 1) x H (mm) Model F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 GA 22 22 22 22 55 61 102 154 190 HA 45 45 45 55 35 70 70 76 80 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35 45 55 65 75 100 125 150 175

Air Slide Table Series MXQ

, G 1/8) 4 16 Max. 17 (Retraction end adjuster) 22 50 65 6H9 depth 6 +0.030 0 HA GA NN x M8 x 1.25 thread depth 16 7 B A 35 12 12 6H9 depth 6 +0.030 0 6.6 6.6 11 11 B H A 32 11.5 32 11.5 (NN 1) x H G Section AA Section BB (mm) ZZ 123 123 123 133 157 182 221 274 299 M 107 107 107 117 141 166 205 258 283 Z 105.5 105.5 105.5 115.5 139.5 164.5 203.5 256.5 281.5 K 35 45 55 65 75 100 125 150 175

VDW

VXR 2.5 Approx. 300 14.7 20 VXH (24.5) 4.5 VXF 49 28 38 VX3 24.5 VXA R2.25 L3 L2 L1 2 x 3/8 (IN port) (: Thread type) 10.5 5.5 VCHm VDW 1 Stations D side 2 3 4 5 n U side VQ LVM VCA VDW33-*G-* VDW33-*G-* VDW33-*G-* VDW33-*G-* VCB 83 VCL VCS 34 21 5.5 16 VCW n x 1/8 17.25 17.25 (OUT port) n x 1/4 P = 34.5 2 L Dimension (mm) n (stations) Dimension 2 10 5 7 8 9 3 4 6 L1 70 315 350 105 140 175

Compact Cylinder: Standard Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

For details, refer to page 175.

Digital Gap Checker ( compatible)

Relationship between boundary value and display value of the level bar/switch point value bar and process data Distance type Level 1 Level 2 Level 3 Level 4 Level 4 60 or less (60 to 36) X+30 X+25 X+20 ISA-F (35 to 31) (30 to 26) (25 to 21) ISA3-G 300 or less X+150 X+125 X+100 Display (300 to 176) (175 to 151) (150 to 126) (125 to 101) value ISA3-H 500 or less X+300 X+250 X+200 Constantly

Microspeed Cylinder: Double Acting/Single Rod Series CJ2X ø 10, ø 16 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

How to Order Bore size 10 16 10mm 16mm Standard stroke (mm) 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes other than the above are produced upon receipt of order.

End Lock Cylinder Series CBG1

Rear trunnion type (mm) With front lock/R Bore size (mm) Rear trunnion type/CBG1T (with front lock-R only) Z (rear trunnion) ZZ (rear trunnion) With rod boot With rod boot Without rod boot Without rod boot 124 + l 145 + l 20 125 104 131 + l 152 + l 25 130 109 133 + l 157 + l 32 135 111 147 (154) + l 175 (182) + l 40 155 (162) 127 (134) 168 (179) + l 200 (211) + l 50 180 (191) 148 (159) Z

Plate Cylinder with Lock Series MLU

Foot type Flange type Knuckle joint Clevis type Flexible mounting: Possible to mount on all surfaces except for the one with ports Bottom mounting type Side mounting type Axial surface mounting Series Variations Standard stroke (mm) Locking direction Bore size (mm) Series 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 25 Extension lock 32 MLU 40 Retraction lock 50 Features 2

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

Standard strokes Bore size (mm) Standard stroke (mm) Long stroke (mm) 75, 100, 125, 150, 175 350, 400, 450, 500, 600 40, 50, 63 200, 250, 300 700, 800, 900, 1000 Intermediate strokes and strokes of 75mm or less can also be manufactured.

Soft Start-up Valve AV2000/3000/4000/5000

128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.