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Determine the mean suction flow: Q r = v x 6 o T1 9 9 0 . s : s : : P o o . g u o.z T 2 = 3 1 o 1 mean suction flow required from ejector (N/min), 0.1 0.2 0.3 0.5 0.7 1 2 3 | 5 7 10 20 30 50 70 100 O T1 i(sec) o1 adsorption response time to 63% to P, (sec), T1 adsorption response time to 95% of P" (sec), T2 1 l lncnnica System Specif ication (continued) 2.

Determine the mean suction flow: Q r = v x 6 o T1 9 9 0 . s : s : : P o o . g u o.z T 2 = 3 1 o 1 mean suction flow required from ejector (N/min), 0.1 0.2 0.3 0.5 0.7 1 2 3 | 5 7 10 20 30 50 70 100 O T1 i(sec) o1 adsorption response time to 63% to P, (sec), T1 adsorption response time to 95% of P" (sec), T2 1 l lncnnic System Specif ication (continued) 2.

For 100/120C 1 XL Series High Vacuum Angle Valve Aluminum High Vacuum Angle Valve XL-2 Series New Variations Type Series Valve type Shaft seal type Application Flange size 16 25 40 50 63 80 100 160 XLA-2 Single acting (N.C.) Bellows seal Dust free, P.3 cleaned Single acting (N.C.)

Center trunnion: CS2WT z+ 1 '2 stroke Width across ilats KA 2, P G -! P IRe ,NPT , G) ...,.,l\ With rod boot Width across flats KA , I J I ~ G M ~1<;lL, 1~ '-~ {~ ~~j I" OJ > -~ I ~ ~ rI< I AL ~ ~ " I 0 c ~ c .s.!! ~ H S + Stroke Ji.'.

output mode Ripple E P. 878 Ejector Extended analog output P. 876 F S F.S.

Applicable for strong alkali-based cleaning fluid Suitable for filtering cutting fluids P.57 P.57 P.58 (For coarse filtration) (For coarse filtration) Leg Material: Stainless Steel X47 P.58 54 FGF Series Made to Order Please consult with SMC for details.

A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture

0.9 1 Operating pressure P (MPa) Operating pressure P (MPa) -X Selection Graph (6) to (8) (Horizontal mounting) 20Data Graph (6) l: 100 mm or less Graph (7) l: 101 to 200 mm Graph (8) l: 201 to 300 mm 300 100 200 100 100 Load weight m (kg) Load weight m (kg) Load weight m (kg) 80 80 80 10 10 10 63 63 63 50 50 50 40 1 1 1 25 20 25 20 40 32 40 32 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000

P.22~27 LJ1H202SCLC1-1B2M LJ1S20 Series. P.28~33 LJ1H202PFK LJ1S30 Series. P.34~39 LJ1H202NFK Option Specifications. P.40, 41 LC1-1B2V LJ1H202PAK Motor Reference Data, Nonstandard Motors . P.42~46 Order Made Specifications. P.47 LJ1H202NAK LJ1H303PDLC1-1B3H Dedicated Controller LC1 Series .P.49 LJ1H303NDTypical Equipment Configurations . P.50, 51 LJ1H303SELC1-1B3M LC1 Series.

to 100 LXSHABC LXSHABD LXSHABC-B LXSHABD-B to 50 to 100 292 304 to 50 to 100 Features 4 Line-up of Products Line-up of Products Single Axis Electric Actuator Series LJ1 Series LJ1 LJ1H/High Rigidity Guide LJ1S/Slider Guide P. 1 P. 87 Horizontal mount specification Horizontal mount specification Vertical mount specification Dust Seal Specification TSUBAKI CABLEVEYOR Specification Clean Room

center (A) 4 (B) 2 SX q t r w 5 (R) 3 (R) 1 (P) (B) 2 (A) 4 3 position exhaust center (A) 4 (B) 2 5 (R) 3 (R) 1 (P) 3 position pressure center u (A) 4 (B) 2 3 (R) 1 (P) 5 (R) (This figure shows a closed center type.) 5 (R) 3 (R) 1 (P) Component Parts Replacement Parts Note Zinc die-casted Part no.

mass m (kg) Operating pressure P (MPa) Operating pressure P (MPa) Graph (5) up to 500 mm/s Graph (8) up to 450 mm/s MGJ 160 700 80 80 MGP 140 600 10 120 MGQ 500 Load mass m (kg) Load mass m (kg) 100 63 63 MGG 400 80 300 MGC 50 50 60 200 MGF 40 40 40 32 25 20 32 100 20 MGZ 0 0 MGT 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 1 100 50 1000 Operating pressure P

T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire 100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 LC1-1B1H1Without brake (Horizontal specification) 50 Main

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

size determination F3 D 1.6 x P WB Inclined operation W + WB WV P PV W + WB WV P PV Determination of allowable load mass & pressure (Refer to page 1466 for vertical operation.)

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Attachment Specifications P. 14-2-24 IR Accessory P. 14-2-29 VEX Made to Order Specifications P. 14-2-31 AMR ITV IC VBA VE VY1 G PPA AL Soft Start-up Valve: AV2000/3000/4000/5000 P. 14-3-1 Lube Unit: AU P. 14-3-11 Large Flow Air Filter: AF800/900 P. 14-3-13 14-2-1 2 F.R.L.

ZR1-F-100 to 100 kPa 500 kPa 5 to 50C 30 m PVF Refer to page 949 and 952 regarding pressure switch for vacuum.

16 16 0.2 0.05 0.1 0.2 0.1 0.05 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

3A Applicable connector assembly DXT192-52-1-A (For 2 position single) DXT192-52-2-A (For 2 position double, 3 position) 1: 100 VAC, 3: 110 VAC, 4: DC 1(P) port 12 12 stations G Rc 1/8 NPT 3/5(R) port Rc 1/8 How to Order Flat ribbon cable type 43P VV5Z3 43P 05 C4 Stations 1(P), 3/5(R) port thread type 4(A), 2(B) port size 4(A), 2(B) port 03 3 stations C4 For How to order applicable connector

= 41 58.5 216 with AMC610-10 installed ( 261.5 with AMC810-14 installed) L2 L1 P = 41 58.5 3 3 2 2 P=41 68.5 34.5 48 68.5 P=41 1 1 Stations Stations 34.5 48 D side entry (LD) ( 261.5 with AMC810-14 installed) 216 with AMC610-10 installed D side U side D side U side 100 with AMC610-10 installed ( 105 with AMC810-14 installed) 100 with AMC610-10 installed 100 with AMC610-10 installed