Aluminum High Vacuum Angle Valve XLA (Size 16: None) P.416 to P.419 Single acting (N.C.) XLAV (With solenoid valves) 10-6 to atmospheric pressure Particle free cleaned Bellows seal 10-10 10-11 XLC (Size 16: None) P.420 to P.424 Double acting XLCV (With solenoid valves) XLF Manual Electromagnetic Air operated (Size 16: None) P.426 to P.435 Single acting (N.C.)
Withstand pressure Minimum unit setting Applicable fluid Power supply voltage Current consumption Switch output ZSE30AF (Compound pressure) 100.0 to 100.0 kPa 105.0 to 105.0 kPa 500 kPa 0.1 kPa Air, Non-corrosive gas, Non-flammable gas 12 to 24 VDC 10%, Ripple (p-p) 10% or less (with power supply polarity protection) 40 mA or less NPN or PNP open collector 1 output, NPN or PNP open collector
kPa 0.1 kPa 12 to 24 VDC 10%, Ripple (p-p) 10% or less (with power supply polarity protection) 40 mA or less NPN or PNP open collector: 2 outputs (selectable) 80 mA 28 V (with NPN output) 2 V or less (with load current of 80 mA) 2.5 ms or less (Response time selections with anti-chattering function: 20, 100, 500, 1000 and 2000 ms) 0 to 101 kPa 10 to 105 kPa Maximum load current Maximum applied
(P.12) ) INP ON (INP 9.1 (P.32) PLC ) 5 3.(P.12) PLC (PLC) 2 11.4 (P.49) () 10.(P.41) 3.(P.12) -81- 5(P.23) 9.1 (P.32) 3.(P.12) PLC (PLC) 2 11.4 (P.49) () () 3.2 (P.13) USB 10.(P.41) 5 10.(P.41) 10.(P.41) 3.(P.12) ( EMG ) 3.
" '&& &' & (& & )* Axial piping type (25): MXQ25L-P $ D-X !
Dimensions/40 to 100 Basic/CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10
CN1(P.18) 4.2 CN2CN3: LE-CP-CN3 CN2 4.3 CN4I/O 1 CN4 3m 16 - 2 USB 120.3 120.3 mm mm 200 200 mm/s mm/s USB A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN4 4.4 CN5I/O PLC I/O CN5 PLC 6.4 I/O P.27 6.3 /(P.24) 17 - 5.
CN1(P.18) 4.2 CN2CN3: LE-CA-CN3 CN2 4.3 CN4I/O 1 CN4 3m 16 - 2 (USB ) 120.3 120.3 mm mm 200 200 mm/s mm/s USB A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN4 4.4 CN5I/O PLC I/O CN5 PLC 6.4 I/O (P.27) 6.3 (P.24) 17 - 5.
Cap p. 17 Digital Input/Output Unit p. 7 tMarker p. 18 Analog Input Unit p. 8 y Communication Cable with Connector/ Communication Connector p. 18 Analog Output Unit p. 8 Analog Input/Output Unit p. 8 uPower Supply Cable with M12 Connector (A-coded) p. 19 End Plate (D side) p. 8 uPower Supply Cable with M12 Connector (B-coded) p. 20 End Plate (U side) p. 8 iPower Supply
Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% 1 Electric spec.
P Step motor (Servo/24 VDC) Note) DIN rail is not included. Order it separately.
(Refer to About TEMP READY function (P.527) for TEMP READY function.) Display [ ] if the circulating fluid discharge pressure has reached the pressure limit value. (Refer to About control function of circulating fluid discharge pressure (P.5-32) for details of PRESS LIMIT.) Ready / P.
P.5-12 (16) CH2 Independent pump operation CH2 pump operates independently while the button is pressed. P.5-12 To select a operation mode from the touch panel ( mode), contact input ( mode) (17) Operation mode P.5-12 Common or serial communication ( mode). (18) Operating condition display It indicates the run and stop status of the product. P.5-12 (19) Run/Stop To run/stop the product.
(factory-wired) When using a driver built-in regenerative resistor, connect P+ and D. (factory-wired) When using a regenerative option, disconnect P+ and D, and connect the regenerative option to P+ and C. P+/C/D Regenerative option Refer to section 11.2 for details. Supply the following power to L11 and L21.
250 143 1000 500 250 Different from the initial value. *5.
Rc(PT) 3/8 03 P P Connection Rc(PT) 1/2 04 P Bracket B p p Accessories 178 Bracket C p p Connection NPT1/4 N02 p p qAF3000 wAFM3000 eITV2000 Connection NPT3/8 N03 p p Connection NPT1/2 N04 p Connection G(PF) 1/4 F02 p p REGULATOR Connection G(PF) 3/8 F03 ITV3000 p p Connection G(PF) 1/2 F04 p Approx. 243 Modular Connection Part Numbers Approx. 172 ITV20ll ITV30ll Description AF3000 AF4000
ZSE40A ISE40A (vacuum) (positive pressure) Rated pressure range 0 to -101.3 kPa -0.100 to 1.000 MPa Set pressure range 10.0 to -105.0 kPa -0.105 to 1.050 MPa Withstand pressure 500 kPa 1.5 MPa Minimum display unit 0.1 kPa 0.001 MPa Applicable fluid Air, inert gases and incombustible gases Power supply voltage 12 to 24 VDC 10%, ripple (p-p) 10% or less (protected against reverse connection
Basic style: CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G RE A B REC CX D E CY H1 MQQ M AL B1 K A N F N B C M S + Stroke H RHC ZZ + Stroke MK(2) RS Q G (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 RS H A B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92
Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.