HRL

0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump Circulating fluid head pressure head pressure Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] [m] [MPa] [m] [MPa] HRL300-Am-20 (CH1) HRL100/200/300-Am-20 (CH2) 0.9 0.6 90 60 0.8 80 0.5 50 0.7 70 Circulating fluid outlet 0.6 0.4 60 40 Usable flow rate range Circulating fluid outlet 0.5 50 0.3

energy saving effect

Circulating fluid flow rate [L/min] 45 0 20 10 40 30 50 60 70 80 90 100 110 120 130 Circulating fluid flow rate [L/min] IDH HRSH250/300-A-20/4090 0.9 Usable flow rate range Circulating fluid pressure [MPa] 80 0.8 0.7 70 Pump head [m] 0.6 60 Outlet 0.5 50 0.4 40 0.3 30 0.2 20 Return port 0.1 10 0 0 125 0 20 40 60 80 100 120 140 160 180 Circulating fluid flow rate [L/min] 171 HRSH Series Inverter

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

ZZ + Stroke H 3.5 (mm) ZZ S P I E D A H H1 13.5 10.5 10.5 10.5 FL Bore size H2 41 32 32 26 B2 22 17 17 13 B1 AL K 11 8 8 8 13 F 12 10 8 6 KA MM NA NN G 0 50 45 45 41 6 6 5 8 8 8 40 32 25 20 24 22 22 18 21 19.5 19.5 15.5 14 12 10 8 20-0.033 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 M26 x 1.5 M26 x 1.5 M20 x 1.5 46.5 37.5 33.5 28 7 5.5 5.5 5 42.5 34.5 30 24 154 122 120 116 1/8 88 64 62 62 16

SMC Pneumatic Clean Series

MM NA 20, 25 2-Eh8 D Standard port Relief port 45 AL 1.5 A 1.5 K F N N H S + Stroke F ZZ + Stroke 32, 40 (mm) H2 22 17 17 13 B1 41 32 32 26 B2 H H1 11 8 8 8 13 F Bore size AL K MM NA NN G ZZ S P N I E D A 0 50 45 45 41 6 6 5 8 8 8 14 12 10 8 20-0.033 21 19.5 19.5 15.5 154 122 120 116 1/8 24 22 22 18 40 32 25 20 42.5 34.5 30 24 21.5 15 15 15 88 64 62 62 7 5.5 5.5 5 46.5 37.5 33.5 28 M26 x

70astamb1

Rod Standard Type: With Mounting Bracket Rod Side Flange Style Rod side flange style (F) Bore size (mm) Stroke range B FD FE FT FX FY FZ Fd Port Cushion valve 32 40 50 63 80 100 Up to 700 50 55 70 80 100 120 7 9 9 9 12 14 3 3 2 2 4 4 10 10 12 12 16 16 64 72 90 100 126 150 32 36 45 50 63 75 79 90 110 120 153 178 25 31 38.5 39.5 45.5 54 Up to 800 4-FD Up to 1000 Up to 1000 Fd B FY Up to 1000

MTS

80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 25 20 0.1 0.1 100 120 140 160 180 200 0 40 60 80 100 120 140 160 180 200 0 40 60 80 20 20 Overhang L (mm

I/O Configurator (NFC version)

Error Codes 120 9. Troubleshooting 121 10. Release Notes 123 -2No.EX-OMV0017-C 1. Introduction This operation manual describes the installation, construction of screens and operation method of the I/O configurator for NFC.

Table of Contents

Series ARP3000 Direct Operated Precision Regulator Modular Style Specifications 111 111 111 112 112 112 112 113 113 114 114 114 115 115 117 118 119 119 119 120 121 122 122 122 123 123 124 126 127 133 133 134 134 136 137 142 142 142 146 146 148 149 150 155 155 155 156 156 157 158 158 158 159 160 161 162 162 162 163 163 163 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

2/3 Port Valve

20A VNA4-25A 72.5 80.5 74.5 79.5 82.5 125.5 142.5 24.3 63 124 2.3 52 42 25 26 28 34 4.5 14 55 60.5 73 1 84 100 92 108 135.5 137 153 154 170 83.5 89.5 88.5 94.5 91.5 97.5 28.3 33.3 80 90 2.3 2.3 62 72 50 60 30 35 31 36 35 40 43 49 5.5 6.5 17.5 20 151.5 32A, 40A, 50A Port size Main Port Rc(PT) Pilot port A B C D E F G H I J K L M Model Rc(PT) 1 8 1 4 1 4 VNA5-32A VNA6-40A VNA7-50A 1 4 1 105 120

Title not found

113.10 Table A Cf Compression Factor "A" Constants for Various Pressure Drops Inlet Pressure (PSI) 2 PSI P 5 PSI P 10 PSI P 10 1.6 0.102 20 2.3 0.129 0.083 0.066 30 3.0 0.113 0.072 0.055 40 3.7 0.097 0.064 0.048 50 4.4 0.091 0.059 0.043 60 5.1 0.084 0.054 0.040 70 5.7 0.079 0.050 0.037 80 6.4 0.075 0.048 0.035 90 7.1 0.071 0.045 0.033 100 7.8 0.068 0.043 0.031 110 8.5 0.065 0.041 0.030 120

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) 130 130 L (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) 90 90 m L (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1MW40

Title not found

113.10 Table A Cf Compression Factor "A" Constants for Various Pressure Drops Inlet Pressure (PSI) 2 PSI P 5 PSI P 10 PSI P 10 1.6 0.102 20 2.3 0.129 0.083 0.066 30 3.0 0.113 0.072 0.055 40 3.7 0.097 0.064 0.048 50 4.4 0.091 0.059 0.043 60 5.1 0.084 0.054 0.040 70 5.7 0.079 0.050 0.037 80 6.4 0.075 0.048 0.035 90 7.1 0.071 0.045 0.033 100 7.8 0.068 0.043 0.031 110 8.5 0.065 0.041 0.030 120

CV/MVGQ

120 + 55 n = 4, 8, 12, 16 n (Same side) RE A B 100 110 120 15 90 1 REC 2 (Different sides, Same side), 1 120 130 140 25 110 D-F5NTL (n 2) 2 25 + 55 n = 2, 4, 6, 8 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 110 + 55 n = 4, 8, 12, 16 120 + 55 n = 4, 8, 12, 16 130 + 55 n = 4, 8, 12, 16 140 + 55 n = 4, 8, 12, 16 CX n (Same side) 15 75 90 90 100 100 110 110 Different sides 2 CY D-B5/B64 D-G5/K59 D-G5W

90

131.8 142.5 137.5 148 120 135 146.8 157.5 150 160.5 135 150 161.8 172.5 162.5 173 150 165 176.8 187.5 187.5 198 165 180 191.8 202.5 200 210.5 Inch size 1 Common pilot pressure supply port is only for vacuum pump system.

Compact Cylinder with Air Cushion and Lock Series RLQ

CL1 100 M5 x 100 L 105 M5 x 105 L MLGC 110 M5 x 110 L 120 M5 x 120 L 9 CNG 130 M5 x 130 L 155 M5 x 155 L MNB 180 M5 x 180 L 120 M6 x 120 L CNA 130 M6 x 130 L 140 M6 x 140 L 13.5 CNS 165 M6 x 165 L 190 M6 x 190 L CLS 125 M8 x 125 L 135 M8 x 135 L CLQ 145 M8 x 145 L 12.5 170 M8 x 170 L RLQ 195 M8 x 195 L MLU Working Principle MLGP ML1C Locked Unlocked Brake spring Lock ring Piston rod FREE

Mechanically Jointed Rodless Cylinders

Guide for Using MY3B Side Support Guide for Using MY3A Side Support 120 120 100 100 m MY3A63 (1900) MY3B63 (1800) 80 80 Weight W (kg) Weight W (kg) l 60 60 MY3A50 (1650) MY3B50 (1650) MY3A40 MY3B40 (1300) (1400) 40 40 m l MY3A32 MY3B32 (1200) (1250) 20 20 MY3A25 MY3B25 (1100) (1000) m (1050) MY3A20 (1000) MY3B20 MY3A16 MY3B16 (1000) (900) 0 0 0 500 1000 1500 2000 2500 3000 0 500 1000 1500

LEC-OM02704CN

PB26) kpps pulse r/min (6) (PB28) 9 14 9 9.6.4 (1) (a) PB06 GD2 4.0 PB07 PG1 100 rad/s PB08 PG2 120 rad/s PB09 VG2 3000 rad/s PB10 VIC 20 ms PB29 GD2B 10.0 PB30 PG2B 84 rad/s PB31 VG2B 4000 rad/s PB32 VICB 50 ms PB26 CDP 0001 (ON/OFF ) PB28 CDT 100 ms PB33 VRF1B Hz PB34 VRF2B Hz (b) (CDP) OFF ON OFF CDP CDT100ms 100 4.0 10.0 4.0 120 84 120 3000 4000 3000

CV/MVGQ

, 12, 16 90 + 55 (n 4) 2 15 + 55 (n 2) 2 n = 4, 8, 12, 16 100 + 55 (n 4) 2 n = 4, 8, 12, 16 110 + 55 (n 4) 2 120 + 55 (n 4) 2 n = 4, 8, 12, 16 n (Same side) n = 2, 4, 6, 8 2 (Different sides, Same side) 90 100 110 120 20 n = 2, 4, 6, 8 n = 4, 8, 12, 16 90 + 55 (n 4) 2 20 + 55 (n 2) 2 n = 4, 8, 12, 16 100 + 55 (n 4) 2 n = 4, 8, 12, 16 110 + 55 (n 4) 2 120 + 55 (n 4) 2 n = 4, 8, 12

IO-Link/ELECTRO-PNEUMATIC REGULATOR

. *1 Setting up to 120% F.S is possible by using the 15th BIT (However this is out of warranty). *2 Either 0 or 1 will have no effect.