Low Profile Guide Type

Coordinates and Moments z M3: Yawing M1: Pitching y x M2: Rolling Static Moment Ceiling mounting Horizontal mounting Wall mounting M2 M1 M1 M2 M2 M3 y x y x z x Y Y X X X Z m1 x g m2 x g m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m m1 x g x X m2 x g x X m4 x g x Z Static moment M1 M3 M1 CY3B CY3R m3 x g x Z m1 x g x Y m2 x g x Y

CQS

Example 7-4-5 6 Series CQS Weight/Without Auto Switch (g) For standard stroke Calculation: (Example) CQSD20-20DCM Cylinder weight: CQSB20-20D101 g Option weight: Rod end male thread 10 g : Rubber bumper 2 g : Double clevis style 92 g Cylinder stroke (mm) Bore size (mm) 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 12 29 36 42 49 56 63 93 100 113 147 180 107 16 38 47 56 64

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Coordinates and Moments z M3: Yawing MX MTS MY CY M1: Pitching y x MG CX M2: Rolling DStatic Moment -X Ceiling mounting Horizontal mounting Wall mounting 20Data M1 M2 M2 M1 M2 M3 y X x Y y z X x Y X x Z m1 x g m2 x g m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2 x g x Y m3 x g x Z y z M2 z Y m3 x g x X m4 x g x Y M3 m4 x g g: Gravitational acceleration Dynamic Moment z Mounting orientation Horizontal Ceiling Wall Vertical M1 x a x mn x g 1.4 100 Dynamic load FE 1 3 a Dynamic

Manifold Specifications

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

Speed Controller: Standard Type Series AS In-line Type

Free flow Controlled flow Model Port size Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Weight (g) 4.7 AS1000-M3 M3 x 0.5 20 0.3 20 0.3 2.5, 4, 6 33 AS1000-M5 M5 x 0.8 90 1.4 80 1.2 6, 10, 16, 20, 25 90 AS2000-01 1/8 340 5.2 250 3.8 20, 25, 32, 40 115 AS2000-02 1/4 340 5.2 250 3.8 130 AS3000-02 1/4 810 12.3 810 12.3

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

DO Without connector Do not replace V111 (G, H, L, M, W) to V115 (DIN terminal) and vice versa when replacing pilot valve assembly only. 18 Series SYJ500 Body Ported [ ] for AC Grommet (G), (H): SYJ52G H -M5 With bracket: SYJ52G H -M5-F G: Approx. 300 H: Approx. 600 (Lead wire length) 55.6 [57.8] 37 M5 x 0.8 (A port) 33.5 2-3.5 (For mounting) 30 3.5 15.5 2.5 15 11 A 18 25 + Manual override

CJ2

Calculation: (Example) CJ2L10-45S Basic weight 44 (10-45 stroke) Mounting bracket weight 8 (Axial foot style) 44 + 8 = 52 g Refer to the Single acting, Spring return cylinder in Theoretical Output 1 of Technical data 3 on page 6-19-7.

CE

D M E J F C X B + Stroke L Z M A + Stroke E T 2-P (port size) I Q Metal connector Made by TAJIMI R04-J8M7.3 15.5 M14 x 1 38 (mm) G A C D E F H J K B I Bore size (mm) 32 40 50 63 Standard stroke 64 131 27 16 45 49.5 M14 x 1.5 4.5 14 90 14 50, 75, 100, 125, 150, 175, 200, 250, 300 71.5 177 27 16 52 57 M14 x 1.5 5 14 136 24 100, 125, 150, 175, 200, 250, 300, 400, 500 85.5 200, 300, 500 193 32

Compressed Air Preparation Filter

Bracket B Line filter Mist separator Micro mist separator Bracket A Mounting screws Specific Product Precautions Bracket mounting view 14 AFF/AM/AMD Series Dimensions AFF/AM/AMD20 AFF/AM/AMD30 AFF/AM/AMD40 M D J U J D M S U N T S N T 2 x P (Port size) 2 x P (Port size) R Q Q R V C V C B G IN OUT IN OUT B G Maintenance space A Maintenance space E A AFF/AM/AMD50 AFF/AM/AMD60 J M D N T U S 2

Rotary Table/Rack & Pinion Style Series MSQ

MSZ Mass CRQ2X MSQX (g) MRQ 1 2 3 7 Size Basic type 75 105 150 250 High precision type 80 115 165 265 Note) Excluding the mass of auto switches Clean Series Prevents dispersion of the particles generated inside of the product into the clean room by sucking them out of the vacuum port on the body side.

Lubrication Equipment

Mounting orientation is Upper direction Model Port size Rc(PT) 63 63 80 85 90 100 B C A INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 1/4 141 164.5 170 180 230 251 15 15 15 20 22 22 3/8 1/4, 1/2 3/8, 3/4 3/4, Bracket dimensions Model Port size B C D E A 1 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 1 1 2 4, 1 2, 1 175 250 175 250 87.5 125 460 613 135 209 4, 3 ALD600

SMC Pneumatic Clean Series

Nil TN TF D With auto switch (Built-in magnet) 10 C D G 1 B N 40 150 H7B 21 C D G 1 B N 40 150 H7B Cylinder stroke (mm) Number of auto switches Mounting style Basic style Axial foot style Rod side flange style Head side flange style B L F G Reed switch Type of auto switch C73, B54 2 pcs. 1 pc.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Inch-size One-touch fittings and NPT/NPTF/G threads are available.

Slide Unit Series CX2/CXWM/CXWL

Contents CXWL20-PS CXWL32-PS CXWL20 CXWL32 Grease pack part no.: GR-S-010 (10 g) Grease pack part no.: GR-S-010 (10 g) 504 Slide Unit: Built-in Shock Absorber Ball Bushing Bearing Type Series CXWL 10 Basic Type: CXWL10Stroke/25 to 100 Max.

Slide Unit Series CX2/CXWM/CXWL

Contents CXWL20-PS CXWL32-PS CXWL20 CXWL32 Grease pack part no.: GR-S-010 (10 g) Grease pack part no.: GR-S-010 (10 g) 504 Slide Unit: Built-in Shock Absorber Ball Bushing Bearing Type Series CXWL 10 Basic Type: CXWL10Stroke/25 to 100 Max.

Air Slide Table/Long Stroke Type Series MXY

seal X42 Anti-corrosive guide unit X45 EPDM seal Mass (g) Stroke (mm) Stroke (mm) One side centralized piping, with switch rail One side centralized piping, without switch rail Model 250 300 350 400 250 300 350 400 50 230 410 910 100 280 480 1020 150 330 550 1130 200 380 620 1240 100 330 510 1060 150 390 600 1190 200 450 690 1320 50 270 420 930 MXY6 MXY8 MXY12 690 1350 760 1460 780 1450

CQS

Rubber bumper * * Rubber bumper is a standard equipment for long stroke models. 2.2-3 Series CQS Weight/Without Auto Switch Unit: g Standard stroke model Calculation Example) CQSD20-20DCM Cylinder weight:CQSB20-20D101g Option weight :Rod end male thread10g :Rubber bumper2g :Double clavis 92g Stroke (mm) Bore (mm) 5 15 20 30 35 40 50 75 25 300 150 175 200 250 100 10 125 45 12 100 113 147

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300 Variations Cv Metal/Rubber Configuration Voltage Electrical entry Light and surge voltage suppressor Manual override VQZ100 Grommet (G) (Poppet) 0.3 L plug connector (L) Indicator light and surge voltage suppressor (A) 2 VQZ200 (Standard) 12V DC 24V DC Base Mounted Non-locking push style (Flush) 1 (P) 3 (R) N.C. 3 Port

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

] LEKFS40 Series Stroke[mm] 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 Product weight[kg] 5.5 5.8 6.1 6.4 6.7 7.0 7.3 7.6 8.2 8.8 9.4 10.0 10.6 11.2 11.8 0.53 Additional weight with lock[kg] 4 - 2How to order L E K F S 32 G A 300 R1 CDH7T Motor type Size Lead[mm] Motor mounting position Symbol LEKFS25 LEKFS32 LEKFS40 Nil In-line 25 32 40 High performance R Right side parallel