Magnet: Built-in, Mounting: Rod Flange, Bore Size: 160mm, Port Thread: Rc, Stroke: 400mm, Rod Boot: None, Auto Switch: J59--Solid State, Gen. Purpose, 2 Wire, Lead Wire or Prewired Connector: 3m, Number: -

Magnet: Built-in Magnet, Mounting: Rod Flange, Bore Size: 160mm, Thread: Rc, Stroke: 25mm, Rod Boot: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Rod Port Location: B, Cushion Valve Location: B

Magnet: Built-in Magnet, Mounting: Rod Flange, Bore Size: 160mm, Thread: Rc, Stroke: 300mm, Rod Boot: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Environmental Options: Stainless Steel, w/Hand Chrome Plated Piston Rod

Cylinder (Tube) Inner Diameter(φ): 160, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Specification: -, Port thread type: Rc, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

Cylinder (Tube) Inner Diameter(φ): 160, Stroke(mm): 150, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Specification: -, Port thread type: Rc, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

Cylinder (Tube) Inner Diameter(φ): 160, Stroke(mm): 195, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Specification: -, Port thread type: Rc, Auto Switches: M9N, Lead Wire Length(m): 3, The number of the switches: 2, Type of Auto

Cylinder (Tube) Inner Diameter(φ): 160, Stroke(mm): 260, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Specification: Built-in magnet, Port thread type: Rc, Auto Switches: M9BW, Lead Wire Length(m): 0.5, The number of the switches

Cylinder (Tube) Inner Diameter(φ): 160, Stroke(mm): 300, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Specification: -, Port thread type: Rc, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

Cylinder (Tube) Inner Diameter(φ): 160, Stroke(mm): 300, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Specification: -, Port thread type: Rc, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

Cylinder (Tube) Inner Diameter(φ): 160, Stroke(mm): 600, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Specification: -, Port thread type: Rc, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

Cylinder (Tube) Inner Diameter(φ): 160, Stroke(mm): 900, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Specification: -, Port thread type: Rc, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80

3-Position Rotary Table MSZ Series Size: 10, 20, 30, 50

IC circuit A96 A96V 5 V Yes 24 V Grommet A93V2 A93 A90 100 V Relay, PLC 2-wire 12 V A90V No IC circuit 100 V or less 1Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction. 21 m type lead wire is only applicable to D-A93.

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Nil (Example) A93 3m . L (Example) A93L 5m . Z (Example) F9NWZ Solid state auto switches marked "" are produced upon receipt of order.

1

16 20 25 c + Stroke 378.5 115 132.5 45 37.5 45 50 80 M42 x 1.5 NCA (61.1) 56.1 (27) 22 14 19 7 11 5 3.5 378.5 115 132.5 45 37.5 50 50 80 M42 x 1.5 5 to 30 h + Stroke + Adjustment (61.5) 56.5 (27) 22 14 19 7 11 5 3.5 476 140 175 55 50 60 70 110 M56 x 2 ZZ + 2 x Stroke + Adjustment (A: 25 mm, B: 50 mm) D(77.5) 67.5 (36) 26 20 22.5 10 17 8 4.5 496 140 175 55 50 70 70 110 M56 x 2 5 to 50 (81

NCG/CG1

speed 50 to 400 mm/s 50 to 1000 mm/s Relief port size Auto switch can be mounted.

17

50 40 40 32 32 25 22 (10) 22 (10) 25 Load mass m lbs (kg) Load mass m lbs (kg) 20 20 11 (5) 11 (5) 16 16 12 12 2.2 (1) 2.2 (1) 0.22 (0.1) 0.22 (0.1) 10 50 100 200 10 50 100 200 Eccentric distance L (mm) Eccentric distance L (mm) (3) 50 stroke or less, V = 400 mm/s (4) Over 50 stroke, V = 400 mm/s 220 (100) 220 (100) 100 100 110 (50) 110 (50) 80 80 63 63 50 50 22 (10) 22 (10) 40 40 11 (5)

Compact Cylinder with Lock Series CLQ

A B B RLQ 93.5 30.5 40.5 83.5 93.5 10 to 50 75, 100 Rod end nut 50 40.5 43.5 MLU Head Side flange style: CLQG50 MLGP ML1C 67 50 35 B + Stroke 9 8 4 x 6.6 76 89 A + Stroke Head Side Flange Style (mm) Stroke range Without auto switch With auto switch Bore size (mm) A A B B Rod end nut 92.5 30.5 40.5 82.5 92.5 10 to 50 75, 100 50 40.5 33.5 Double clevis style: CLQD50 7 4 x M6 x 1 Cap bolt 14

CLQ

If it is long, this may cause unlocking malfunction and reduce the lock's service life, etc. 100 100 50 50 Load weight (kg) Load weight (kg) 100 100 80 80 10 10 63 63 5 5 50 50 40 40 32 32 1 1 0.5 MPa 0.4 MPa 0.5 MPa 0.4 MPa 25 25 0.5 0.5 20 20 100 500 Maximum speed (mm/s) 100 500 Maximum speed (mm/s) Extension Locking, Rubber Bumper Retraction Locking, Rubber Bumper 200 200 100 100 W 50