High Vacuum L Type Valve

oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW

Cylinder with Lock

100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Ordering Example of Cylinder Assembly Cylinder model: CP96NDD50-100C-NW-M9BW

XLAQ/XLDQ

Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature (C) 5 to 60 (High-temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure (Pa) (abs) Conductance (L/s) Note 1) 5 14 45 80 Internal 1.3 x 10-10 at normal temperatures (in case of standard material, FKM), excluding gas permeation Leakage (Pam3/s) External Flange type KF (NW

Magnet: D (Built-in), Type: Pneumatic, Mounting: UZ (Boss-Cut, Rod Trunnion), Bore: 32mm, Port Thread: Rc, Stroke: 100mm, Cushion: Rubber Bumper, Rod End Thread: F (Female Rod End), Rod Boot: None

Magnet: D (Built-in), Type: Pneumatic, Mounting: UZ (Boss-Cut, Rod Trunnion), Bore: 32mm, Port Thread: Rc, Stroke: 200mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None

Magnet: D (Built-in), Type: Pneumatic, Mounting: UZ (Boss-Cut, Rod Trunnion), Bore: 32mm, Port Thread: Rc, Stroke: 100mm, Cushion: A (Air Cushion), Rod End Thread: Male Rod End, Rod Boot: None

Magnet: D (Built-in), Type: Pneumatic, Mounting: UZ (Boss-Cut, Rod Trunnion), Bore: 32mm, Port Thread: Rc, Stroke: 50mm, Cushion: A (Air Cushion), Rod End Thread: Male Rod End, Rod Boot: None

Magnet: D (Built-in), Type: Pneumatic, Mounting: UZ (Boss-Cut, Rod Trunnion), Bore: 32mm, Port Thread: Rc, Stroke: 125mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None

Magnet: D (Built-in), Type: Pneumatic, Mounting: UZ (Boss-Cut, Rod Trunnion), Bore: 32mm, Port Thread: Rc, Stroke: 150mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None

Magnet: D (Built-in), Type: Pneumatic, Mounting: UZ (Boss-Cut, Rod Trunnion), Bore: 32mm, Port Thread: Rc, Stroke: 25mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None

Magnet: D (Built-in), Type: Pneumatic, Mounting: UZ (Boss-Cut, Rod Trunnion), Bore: 32mm, Port Thread: Rc, Stroke: 50mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None

Magnet: D (Built-in), Type: Pneumatic, Mounting: UZ (Boss-Cut, Rod Trunnion), Bore: 32mm, Port Thread: Rc, Stroke: 75mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None

Magnet: D (Built-in), Type: Pneumatic, Mounting: UZ (Boss-Cut, Rod Trunnion), Bore: 32mm, Port Thread: Rc, Stroke: 150mm, Cushion: A (Air Cushion), Rod End Thread: Male Rod End, Rod Boot: None

Magnet: D (Built-in), Type: Pneumatic, Mounting: UZ (Boss-Cut, Rod Trunnion), Bore: 32mm, Port Thread: Rc, Stroke: 100mm, Cushion: Rubber Bumper, Rod End Thread: Male Rod End, Rod Boot: None

Magnet: D (Built-in), Type: Pneumatic, Mounting: UZ (Boss-Cut, Rod Trunnion), Bore: 32mm, Port Thread: Rc, Stroke: 75mm, Cushion: A (Air Cushion), Rod End Thread: Male Rod End, Rod Boot: None

Magnet: D (Built-in Magnet), Mounting: UZ (Boss-cut Rod Trunnion), Bore: 32mm, Stroke: 200mm, Action: T (Single Acting, Spring Extend), Rod End Thread: Male Rod End

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 25, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: Rubber cushion, Specification: Built-in magnet, Port thread type: Rc, Auto

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushion, Specification: Built-in magnet, Port thread type: Rc, Auto

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: Rubber cushion, Specification: Built-in magnet, Port thread type: Rc, Auto

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, Operating Pressure(MPa): 0.05～1, Cushion: Air cushion, Specification: Built-in magnet, Port thread type: Rc, Auto