Therefore, SMC products cannot be used for business or certification ordained by the metrology (measurement) laws of each country. 3 - 1Specification 1.1 How to Order L E K F S 32 E A 300 R1 CD17T Motor type Size Motor mounting position Lead[mm] 16 25 32 40 Nil In-line Size E Battery-less Absolute Symbol R Right side parallel 16 25 32 40 (Step Motor 24VDC) L Left side parallel H 20 24 30
5 w e r t @0 !4 !3 !8 !6!7 i q A A !1 !2 u @1 Section AA Parts list Material Note No. Description No.
Relief flotv characledstics suppry pressurc: i .0 r pa Pressure characteiistics sei plessu:0.4 Mpa Flow characteristics supp y pGssure: 1.0 M Pa 1 0.9 0.8 d : 0 . 7 0 6 0 .s 'rt E o.+ 0 0.1 0.0 0.0" " " o 50 100 150 200 250 300 o 1 0.6 0.8 1 1.2 Supply pfessure (lvlPa) 50 100 150 200 250 Frow rale (4min (ANB)) Series lTV205n Hysteresis Linearity Repeatability 0.9 0.8 o.7 ii 0.6 3 o.s : 0.4
, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Kit No.
, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.
, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
Applicable base VV5Z5-45F Caution Mounting Screw Tightening Torques M2.5: 0.32 Nm (For stacking type manifold) 3-3-77 Series VZ5000 Exploded View/DIN Rail Manifold Type 45 Manifold r w r q U side e w (a) Bolt (Both sides) e (b) Lever D side (a) Bolt (Both sides) Replacement Parts No. Part no.
(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65
J F L X C B + Stroke Z M E A + Stroke T 2-P Q I (Port size) Metal connector Made by TAJIMI R04-J8M7.3 15.5 M14 X 1 38 (mm) A B C D E F G H I J K Bore size (mm) Standard stroke 50, 75, 100, 125, 150, 175, 200, 250, 300 100, 125, 150, 175, 200, 250, 300, 400, 500 32 131 90 27 16 45 49.5 64 M14 X 1.5 14 4.5 14 40 177 136 27 16 52 57 71.5 M14 X 1.5 24 5 14 50 63 200, 300, 500 193 144 32 20 64
J F C X B + Stroke L Z M A + Stroke E T 2-P (Port size) I Q Metal connector 15.5 M14 x 1 A B C D E F G H I J K Bore size (mm) 32 40 50 63 Standard stroke 50, 75, 100, 125, 150, 175, 200, 250, 300 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200,
Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T Z2K Z2L Z2M Z2N Z2P Z2Q Z2R Z2S Z2W Z2T Z3A Z3B Z3C Z3D Z3E Z3F Z3G Z3H Z3V Z3J A B C D E F H J K L M N Nil A B C D E F G H K L Z Nil XB A B D E H J L M Nil A B C D E F G H K L Z Nil XB A B C D E F G H J K L M N P Nil A B C D E F G H K L Z Nil XB A B C D E F M N P Q R S T U V W Y Z1A Z1B Z1C Z1U Z1D Z1E Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T
J F C X B + Stroke L Z M A + Stroke E T 2-P (port size) I Q Metal connector Made by TAJIMI R04-J8M7.3 15.5 M14 x 1 38 (mm) G A C D E F H J K B I Bore size (mm) 32 40 50 63 Standard stroke 64 131 27 16 45 49.5 M14 x 1.5 4.5 14 90 14 50, 75, 100, 125, 150, 175, 200, 250, 300 71.5 177 27 16 52 57 M14 x 1.5 5 14 136 24 100, 125, 150, 175, 200, 250, 300, 400, 500 85.5 200, 300, 500 193 32 20 64
Power supply connector POWER Connector (e-con) IZS41, IZS42 7 8 12 13 9 1 2 3 4 5 10 11 14 6 Operation NO.
Cylinder stroke (mm) Rubber bumper only Model Cushion Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 Non-lube Double acting, Single rod 150, 200, 250
E MM A MA D K G H ZZ MM A MA D K G H ZZ 32 32 34 M16 x 1.5 25 22 18 7 14 55 250 +0.043 0 0.025 0.064 40 40 40 36 M20 x 1.5 30 27 22.4 9 19 60 255 25 22 18 7 14 55 250 M16 x 1.5 0.025 0.064 +0.052 0 50 50 46 40 M24 x 1.5 35 32 28 11 24 65 285 30 27 22.4 9 19 60 280 M20 x 1.5 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 80 337.5 35 32 28 11 24 70 327.5 M24 x 1.5 0.030 0.076 +0.062 0 80 80 65 55
G P (51) (6) 3 3 t = 1 mm x 2 t = 0.5 mm x 2 (21) (6) 3 3 G P MK t = 1 mm x 2 t = 0.5 mm x 2 CKQ CLKQ (66) 330.05 330.05 CK1 38 With shims (Clamping height: HIGH type) With shims (Clamping height: LOW type) CLK2 33 33 (66) 72 120 38 C W W K 120 SR SR 65 (Guide tube O.D.) 10 (Clamp stroke) 0 d0.05 0 d0.05 Z D E E G 6 51 77 67.5 10.5 Diamond type Round type (Guide pin dia.: 17.5 or more) H
2 u r e q w No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !
Adjustment bolt B ta ro ro 5 (For clockwise rotation end adjustment) 5 9 e 9 se is e e wi g w g n k n k ra c oc ra o t cl cl en nt er er e tm m nt nt e is 0 u us t 0 u C w us o o k lo c o C dj C l 19 C 19 dj se c Cl A k A A wi w oc e e dj A ck is ng ng k dj o u wi e Cl st us se ro ra ra m ta ro t m ta ti d e ti n o on e n n e n nt nt en tio tio d ra ra 5 n n g ta e ta 9 g e 5 9 ro ro m