Electric Actuator / Low profile slider type

( (L Li in ne ea ar r g gu ui id de e ( (L Li in ne ea ar r g gu ui id de e s si in ng gl le e a ax xi is s t ty yp pe e) ) d do ou ub bl le e a ax xi is s t ty yp pe e) ) LECP Series This manual describes the actuators operation in combination with the LECP6 series controllers.

Modular F.R.L. Units

q IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

NCA1

Stainless steel w/ composite tube Item No from CHART 1 to reference Par t required M O U N T I N G S T Y L E H O W T O O R D E R S E R I E S NCA1 S E A L K I T NCA1PS B O R E S I Z E R O D T H R E A D R O D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 100010 120012 140014 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8

VFS

EZ VFS1320-E/EZ VFS1420-E/EZ VFS1520-E/EZ Lead wire O.D.

Valve Single Unit

port) Applicable tubing O.D.: 10 4 6 8 L plug connector M plug connector DIN rail holding screw 300 (Lead wire length) 300 (Lead wire length) (Rail mounting hole pitch 12.5) L1 (mm) Stations n L1 L2 L3 L4 2 stations 148 137.5 118 15 3 4 5 6 7 8 9 10 stations 135.5 125 102 16.5 160.5 150 134 13 185.5 175 150 17.5 198 187.5 166 16 210.5 200 182 14 223 212.5 198 12.5 248 237.5 214 17 260.5

CG5-S

JS63-18-150 1MPa or less 3.5MPa or less -5 to 60C Note 2) Note 1) Use the applicable bore sizes as a guide.

Sine Rodless Cylinder Series REA/REB

6 e #5 #4 w #3 @5 @7 @4 @6 REBH15 @8 @3 Component Parts Component Parts No. Description Body No.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Floating Joint Center of sphere M M U U D H G B F P C E R A (mm) Max. operating tension and compression N Center of sphere R Model Max. screw-in depth P Allowable eccentricity U M A Applicable bore size Weight (kg) B C D E F G H Nominal size Pitch Compression Tension JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 20, 25 32 40 50, 63 80 8 10 16 20 22 29 35.5 47.5 59 71.5 1.25

ARM10/11

Material Description Description q w e r t y u i o !0 !

ARM10/11

Material Description Description q w e r t y u i o !0 !

e-Rodless Actuator

Refer to pages 5 and 6 for detailed selection procedures. 2 How to Select Series E-MY2 Moment / E-MY2C E-MY2C/M3 E-MY2C/M1 E-MY2C/M2 50 40 50 40 50 40 30 30 30 20 20 20 10 10 10 Moment (Nm) Moment (Nm) Moment (Nm) 5 5 5 E-MY2C25 E-MY2C25 4 4 4 3 3 3 E-MY2C25 2 2 2 E-MY2C16 E-MY2C16 E-MY2C16 1 1 1 0.5 0.5 0.5 100 200 300400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400500 1000

Electric Rotary Table

1 R 3 1 / 0 180 L 0 E T 2 R 3 3 / a 0 0 5 , bl 1) e e ot o N p er e g at n in ra g The figures show the origin position for each actuator.

Air Catch Sensor Series ISA

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 3 0 3 0 3 0 Regulator 3 0 3 0 3 0 Supply port P P P T T T U U U E E E L L L Supply port S S S L L L P P P T T T U U U E E E L L L S S S L L L 6 9 6 9 6

CXS

CXS15 CXS20 CXS25 CXS32 Model 120 150 200 175 150 125 120 110 200 175 150 125 120 110 200 175 150 125 120 110 125 120 110 150 125 110 100 90 80 Stroke SS ZZ Z 175 210 282 257 232 207 202 192 272 247 222 197 192 182 270 245 220 195 190 180 185 180 170 205 180 165 155 145 135 Symbol Made to Order 192 229 312 287 262 237 232 222 296 271 246 221 216 206 294 269 244 219 214 204 204 199 189 222

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

Electric Actuator Triple Axis P&P Unit

100 4H10depth5 5 (26) (44) 110 100 Stroke69 (Stroke+131) 10 92 85 (For 100 to 150 strokes) 208 (For 200 to 1000 strokes) C section detail (S=2/1) 12 3 500 12 3 450 10 2 400 10 2 350 8 1 300 8 1 250 6 0 200 6 0 150 6 0 100 Stroke F E Stroke F E Dimension table 1) The motor mounting plate and coupling are attached but no motor, controller, driver, motor cable and encoder cable are included.

Gun Type Ionizer

: 150 mm x 150 mm, Capacitance: 20 pF) as defined in the U.S.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Double acting, Single rod 25, 50, 75, 100, 125, 150 1/8 25, 50, 75, 100, 125, 150, 200 1/4 25, 50, 75, 100, 125, 150, 200, 250, 300 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing