CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

Table of Contents

Solid state switch D-F8 CUJ (As compared with SMC Series CU cylinders without magnet) Dimensions (Without magnet) Series Variations Bore size (mm) A(a) B(b) C(c) Bore size (mm) Rod end configuration Stroke (mm) Clean series 4 6 8 10 15 20 b Action Series Auto switch B Double acting Male thread Without thread None 4 10() 15() 13() 4 Single acting, Spring return 6 13(13) 19(22) 13(33) Double

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

closing port M3 x 0.5 Finger opening port 10 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port 25 25 6-M3 x 0.5 thread depth 6 (A, B, C common view) 3-3 depth 6 +0.02 0 34 (A, B, C common view) 12h9 0 0.043 1.5 5 19.5 12 41.5 (45) 8 17 2 8 0 0.05 2 3.5 0 0.03 3.5 0 0.03 Open: 22 Closed: 14 2-M3 x 0.5 thread depth 6 (Thread for mounting attachment) 15 15 6 5 5 6 12-5-12 13 2 Finger

OMU0023

(1 bit) 145 20 10 85 15 10 Reading of internal parameters (7 words) 270 40 15 150 25 10 Operation mode selection 165 25 10 95 15 10 Commands for virtual I/O operation by serial communication 195 30 15 110 20 10 Reading of alarm history (4 words) 215 30 15 120 20 10 Clearing of alarm history 245 35 15 135 20 10 Confirmation of communication connection 165 25 10 95 15 10 The communication

VM

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Voltage 2 2 4 4 15 10 250 VAC 1.5 1.5 3 3 15 10 8 VDC 1.5 2.5 3 5 15 15 14 VDC 1.5 2.5 3 5 15 10 30 VDC 1.5 2.5 3 5 6 5 125 VDC 0.3 0.05 0.3 0.05 0.5 0.05 250 VDC 0.2 0.03 0.2 0.03 0.25 125 VAC 15 15 15 15 6 0.5 0.25

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Diagnostic mode 0 and byte order of analogue value (LSB-MSB) are selected. 1 Input data Output data Lo byte Byte 0 DY#B (Unit 1) Output 0 to 7 Byte 0 AXA channel 0 (Unit 0) Byte 1 Hi byte Byte 1 DY#B (Unit 2) Output 0 to 7 Lo byte Byte 2 Byte 2 AXA channel 1 Output 0 to 7 (Unit 0) Byte 3 Hi byte Byte 3 Output 8 to 15 SEN3 (Unit 5) Byte 4 DX#B (Unit 3) Input 0 to 7 Byte 4 Output 16 to 23

Rotary Actuator

CRQ2X MSQX MRQ Auto Switch Working Principle [Pressure is applied from the B port.] The auto switch B is turned ON by the magnet B in the state that the pressure is applied from the B port and the piston B moves to the left side. At this time, the auto switch A turns OFF . Magnet B Piston B A port B port Auto switch B Auto switch A [Pressure is applied from the A port.]

New

B 2 x M5 Thread depth N 2 x M5 Thread depth N Terminal part Faston connector 250 Series 23 K K 11 9 6.5 J H H J 15 (mm) Conduit Faston type Dimensions Size Port size A B B1 C D E F P H J Q R Q R K N 1 1/8 1/8 1/4 3/8 1/8 1/4 3/8 14 14 19 22 14 19 22 30 30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14

Fieldbus system Digital unit

Signal name Input 1 Input 3 Input 5 Input 7 Input 9 Input 11 Input 13 Input 15 Input signal Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 -30No.EX-OMN0036-B Input signal assignment (EX600-DX F) Group 0 1 2 3 4 5 6 7 Terminal position Pin 2 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 Input signal Pin 3 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 Dimensions EX600-DX B -31No.EX-OMN0036

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

0 0 0 1.5 4 A 2 2 2 7.5 10 B 2 2 2 5.5 8 A 4.5 4.5 4.5 10 12.5 B 9.5 9.5 9.5 13 15.5 Hs 116 124 134.5 144 154 Hs 126 134 144.5 154 164 Hs 75.5 81 89 97 107 Ht 69.5 76.5 87.5 97.5 108 Hs 74.5 80 88 96 107.5 Ht 70 76.5 87.5 97.5 108 B 9.5 9.5 9.5 15 17.5 B 4.5 4.5 4.5 8 10.5 Operating Range D-Z7/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL Auto switch model Bore size (

CQM

10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 15 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

High Power Cylinder Series RHC

AS600 (258) AS420 (102) AS600 (258) AS600 (258) AS600 (258) AS800 (586) AS500 (123) 1-A 2-B 1-C 2-A 2-B 1-A 2-B 2-A 2-B 2-B 2-B 2-B 2-B 1-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 20 8, 10 1/4 500 9.5 0 1,000 2,000 3,000 Maximum speed Vmax (mm/s) 50 12, 16 1/4, 3/8 1000 19 63 Composed effective area So (mm2) Composed effective area So (mm2)

CJ5-S

LS + Stroke LX LZ ZZ + Stroke Bore size (mm) Stroke range A AL B1 B C D GA GB H H1 I J K KA LD LH LS LT LX LZ M MM NA P S X Y ZZ 20 Up to 350 18 15.5 13 37.5 16.5 8 18 12 35 5 31 M4 x 0.7 5 6 6 22 59 3 40 50 3 M8 x 1.25 29 1/8 83 15 7 124 25 Up to 400 22 19.5 17 41.5 18.5 10 18 12 40 6 33 M5 x 0.8 5.5 8 6 25 59 3 44 60 3.5 M10 x 1.25 29 1/8 83 15 7 129.5 32 Up to 450 22 19.5 17 44 20 12

CJ5-S

BA BB CA CB D F GA GB H MM NN NA NB NDn8 S Z MK(2) 0 0.022 0 0.027 10 15 15 12 17 14 4 8 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 10 46 74 RS Q G 16 15 18.3 18.3 20 20 5 8 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 12 47 75 RS H A R V Axial foot style (L): CJ5LS RZQ CA MI W S Rod cover side GB F NN MM GA Piping port 2-M5 x 0.8 Cover surface Piping port M5 x 0.8 0 0.3 CEP1 BA CB D CE1 LH LB LY CE2 With

/

6 to 12 Applications B B 8 x 18 8 x 18 F F S S Conduit terminal: T (V) (U) E 25 32 G1/2 R T B 8 x 18 F S (mm) Electrical entry Grommet Model Applicable flange Conduit DIN terminal Conduit terminal U 103.5 106 106 B C D A E F H N Q R S N.C.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

A B Hs MXY MTS Hv Hv Hv Hv 12/16/20 12/16/20 Hs Hs 25/32/40 25/32/40 Auto Switch Proper Mounting Position Solid state auto switch Bore size (mm) 2-color indication solid state auto switch Reed auto switch D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV A B C A B Hs Hv A B C A B Hs Hv A B C A B Hs Hv 15.5 15 20 15 20 19.5 46 19.5 31.5 46 46 19.5 31.5 18 46 19.5 35.5 42 15.5 13 42 12 17 17 22 17 22 21 47.5

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

9 8.5 4.2 B A 8.5 18.5 8.5 18.5 H (NN 1) x H G Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 J 40 40 40 52 60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 NA 2 2 2 2 2 4 4 N 4 4 4 4 6 6 6 GA 15 15 15 42 51 61 111

MTS

A B Hs A B Hs Hv Hv Hv Hv 12/16/20 12/16/20 Hs Hs 25/32/40 25/32/40 Proper Auto Switch Mounting Position Solid state switch Bore size (mm) 2-color indication solid state switch Reed switch D-A9 D-A9V D-M9 D-M9V D-F9W D-F9WV A B C A B Hs Hv A B A B Hs Hv A B C A B Hs Hv C 15.5 15 20 20 15 19.5 19.5 19.5 19.5 46 46 46 46 18 13 15.5 35.5 42 31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5

Electric Actuators

B-1 A-1 B-2 A-2 B-3 A-3 Signal Cable color S Brown Red Orange Y ellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.