smcmaintenancepartslist

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

LEC-OM02704CN

[0]) [C][0] [0][1][F][F] 9 8 (16)10 9 14 15 14 (7) ([C][6]) [C][6] [0][1][F][F] 0 8 (16)10 (8) ([C][7]) [C][7] [0][1][F][F] 020 8 (16)10 (9) ([C][8]) [C][8] [0][1][F][F] 020 8 (16)10 (10)(DWELL)([C][A]) [C][A] [0][1][F][F] (DWELL) 020 8 (16)10 (11)([C][B]) [C][B] [0][1][F][F] 03 8 (16)10 (12)([9][0]) [9][0] [0][0] EMGLSPLSN OFF ON/OFF 1EA5 4 [0][3] (DO) 1EA5 4 [1][0] EMGLSPLSN

Table of Contents

(Values at the initial period) Note 4) Based on JIS C 0920. Note 5) Based on JIS C 4003.

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

•

/>B ' C . 0 E . F.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Body width of 10 mm, C: 0.22 dm3/(sbar) 2 W C: 0.27 dm3/(sbar) 3.2 W (U type: Large flow) SQ VQ0 VQ4 Clean room specifications available as special.

IDG

Construction 0 P1 = 0.3 MPa Outlet air atmospheric pressure dew point (C) 10 Refer to pages 14-19-30 to 31.

Free Mount Cylinder

(g) Stroke (mm) Model 15 10 5 C(D)U6-S,T C(D)U10-S,T C(D)U16-S,T C(D)U20-S,T C(D)U25-S,T C(D)U32-S,T 28(38) 25(35) 22(27) 48(58) 40(50) 36(41) 71(101) 56(86) 50(75) 133(170) 106(143) 95(128) 235(294) 193(252) 176(230) 347(425) 286(364) 262(335) For the weight of auto switch, refer to page 68 to 72.

Table of Contents

C D E F Dimensions Part no.

SX

83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 10 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 SY D-sub connector: Conforms to MIL-C24308 Flat ribbon cable Terminal block (M3) 18 pins Terminal block

LEC-OM02904

C G3 D (2) G4 5m 5m (1) 1.

Series AP500

C-22 VS Hastelloy C-22 H 3) Not available with SHP, SH, H materials.

Series IDG

C 0 0 Outlet air atmospheric pressure dew point C P1 = 0.5MPa P1 = 0.5MPa 10 10 P1 = 0.7MPa P1 = 0.7MPa 20 20 30 30 40 0 40 80 120 160 100 0 200 300 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG30H IDG50H P1 = 0.3MPa 0 P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1= 0.5MPa P1 = 0.5MPa 10 10 P1 = 0.7MPa P1 =

Vacuum Unit

A B C A B C A B C A Black For supply valve (,+) + + + ZK2-ZSmBmm-A (PNP 2 outputs) + Pilot valve for supply + B C A LED (Red) White White White White Pilot valve for supply + Pilot valve for release Pilot valve for release + Pilot valve for release Pilot valve for release + B C A + + White White Connector cord assembly (ZK2-LWA20-A) Connector cord assembly (ZK2-LWB20-A) Brown DC

Refrigerated Air Dryer

IDF-BP300 IDF-BP301 IDF-BP302 IDF-BP308 IDF-BP309 IDF-BP310 IDF1E IDF1E 56 114 549 56 114 573 440 1.5 444 1.6 IDF2E IDF2E 628 652 443 447 5 12 3/8 1.7 3/8 1.6 IDF3E IDF3E 642 666 445 450 IDF4E, 6E, 8E, 11E IDU3E, 4E, 6E For NPT Air outlet Air inlet For Rc Air outlet Air inlet (D) (D) Port size (B) (A) Port size (E) (E) (B) (A) (C) (C) Applicable dryer Port size Rc A B C Weight (kg) Weight

C85

M M U U D F G B B E H C E P A (mm) M Max. operating tension and compression power (kN) Maximum screwed depth P Allowable eccentricity U A B C D E F G H Bore Model Nominal thread dia.

Vacuum System Peripherals:

ZP Flow characteristics C (dm3/(sbar)) Effective area (mm2) (Cv) Port size Rc Model Orifice dia.

Modular Type Filter Regulator Series AW

R Z W N AWD30 to 40 Accessory/Optional specifications B C D E G H 1 2 6 8 C J N R W Z With bracket (with set nut) Accessories Float type auto drain (N.C.)

CLA

-A34(C), IJ.-A44(C), IJ.-AS4, F-B54 Max. SOmA I Max, 25mA Max. 12.SmA .