CG5-S

B A A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulfuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide B A A B B D 6 Sodium hydroxide (30%, Room temperature) Inorganic alkali A D C D A A 7 Calcium hydroxide A A A D C A 8 Magnesium hydroxide A A A B B A 9 Acetylene A A A A A A 10

CXWM/CXWL

Note 2) 2 magnets for auto switches are installed in the housing. 8-26-49 48 Series CXWL Operating Range (mm) Auto switch model Applicable cylinder size 10 16 20 25 32 Housing mounting D-A7/A80 D-A7H/A80H D-A73C/A80C 6 6 6 6 Plate mounting 6 D-E7A/E80A 6 Housing mounting D-F7/J79 D-F7V/J79C D-F7W/F7WV D-F7BAL/F7BAVL D-F79F, D-F7NTL Housing mounting 4 4 3.5 3.5 Plate mounting 3 2.5 2.5

Rotary Actuator/Vane Type

1 y u i D-M9m !6 Component Parts No. Description Material No.

Compact Type Dual-Rod Cylinder Series CXSJ

47 C 11 21 27 34.5 35.5 44.5 A 19.5 29.5 35.5 43 44 53 6 10 15 20 25 32 Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

CL

Minimum Stroke for Auto Switch Mounting (mm) No. of auto switches mounted 2 Different sides Auto switch model Same side n Different sides 1 Same side D-C7 D-C80 15 50 + 45 (n 2) 50 10 n 2 2 15 + 45 ( ) (n = 2, 4, 6) D-H7 D-H7W D-H7BAL D-H7NF 15 60 + 45 (n 2) 60 10 D-C73C D-C80C D-H7C n 2 2 15 + 50 ( ) (n = 2, 4, 6) 65 + 50 (n 2) 15 65 10 n 2 2 D-B5 D-B64 15 + 50 ( ) (n = 2, 4, 6) 15

Vacuum

:t ; : ; = '6;; 6 < EI 6 < EI d-z E < 8i E < ' 6 2 'dz 'Eiz 6 Z ,n2 < 2 6 V < 2 6 Y a z 6 Y d t d 2 45 90 PSI (3 ^ 6 kg cm'?) o.17 0.004/ 0,025/ o.17 ).00410.025 5 c/s 40 120"F (5 50.C) I I I (PV) . (PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also.

VQ5000

How to order applicable valves Stations VQ 5 1 0 0 Y 5 7 B W D side 3 2 4 6 1 5 Note) Stations are counted starting from station 1 on the D side. Body type 4.

Vacuum

:t ; : ; = '6;; 6 < EI 6 < EI d-z E < 8i E < ' 6 2 'dz 'Eiz 6 Z ,n2 < 2 6 V < 2 6 Y a z 6 Y d t d 2 45 90 PSI (3 ^ 6 kg cm'?) o.17 0.004/ 0,025/ o.17 ).00410.025 5 c/s 40 120"F (5 50.C) I I I (PV) . (PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also.

Series VQ Metal Seal/Rubber Seal Body Ported

Blank plug Dimensions 23 04 06 KQP-X19 A L D Model Fittings size d Color: White 3.2 4 6 16 16 18 3.2 6 8 31.5 32 35 KQP-23-X19 KQP-04-X19 KQP-06-X19 It is inserted into an unused cylinder port and SUP/ EXH ports. The minimum order quantity is 10 pcs.

MXQ

Tightening Torque 6 8 12 16 20 25 D-A9/A9V D-M9/M9V D-F9W/F9WV 4.5 5 6 7 8 9 2 (2.5) 2.5 (2.5) 3 (3) 4 (3) 6 (3.5) 6 (3.5) Use a torque of approximately 0.05 to 0.1 Nm. As a guide, it can be tightened about 90 past the position at which tightening can be felt. Note) Figures in parentheses are the cases for D-M9, D-M9V switch types.

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

V

(Color) NBR (Black) Hardness 50 D I M E N S I O N S PA D D I A M E T E R S 2, 4, 6, 8 D I M E N S I O N S PA D D I A M E T E R S 10, 13, 16 F L AT T Y P E F: M5X0.8 F: M6X1 Model A B C Y D E D E ZPR02U 2 2.6 1.2 0.8 ZPR04U 4 4.8 1.6 0.8 20 65.5 25 70.5 ZPR06U 6 7 2.5 0.8 ZPR08U 8 9 2.5 1 A P P L I C A B L E T U B E Applicable Tube OD G H I J 4 4 20.6 15.6 10.4 6 6 21.6 16.68 12.88 F L AT

Solid State Auto Switches

Weight (g) Model D-A90 6 30 D-A90V 6 30 D-A93 6 11 30 47 D-A93V 6 30 47 D-A96 8 41 D-A96V 8 41 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-A90/D-A93/D-A96 D-A90V/D-A93V/D-A96V 2 2.8 4.5 2.7 Slotted set screw M2.5 x 4 L 4 24.5 (22) 22 2 6 Slotted set screw M2.5 x 4 L D-A90 without indicator light Indicator light 2.7 D-A90V without indicator light Indicator

SYJ3000/5000/7000

8.5 21.5 6 43.9 32 24 15 17 17 1/8 (P, R port) 45.5 L plug connector (L): SYJ5240-L-01 M plug connector (M): SYJ5240-M-01 DIN terminal (D): SYJ5240-D-01 M8 connector (WO): SYJ5240-WO-01 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 125.2 Max. 10 75.4 50.1 [57.1] 64.1 34.7 54.6 49 M8 x 1 37.1 61.2 [68.2] Approx. 300 (Lead wire length) Pg7 6 6 6 6 107 [111.4] 87.4 [91.8

Fieldbus System

Note 6) Built-in silencer type dose not satisfy IP67. Note 7) When specification change from no DIN rail type to DIN rail mounting type, please consult SMC. Note 8) When "Without SI Unit (SD60)" is specified, With DIN rail (D) cannot be selected.

VQ5000

U Direct exhaust with silencer box [-S ] Interface regulator ARBQ5000-00-1 A B P D U Refer to pages 2-6-34 to 2-6-38 for detailed dimensions of each option.

5 Port Solenoid Valve, Series VQC

Series VQC2000 4 5 6 7 Base-Mounted plug-in Stations Options Electrical entry/Cable length 01 Nil None 1 station D-side entry Kit, Cable length Stations Note 2) All stations with back pressure check valve Note 1) B D D FD0 FD1 FD2 FD3 PD0 PD1 PD2 PD3 PDC TD0 D-sub connector kit (25P) without cable D-sub connector kit (25P) with 1.5m cable D-sub connector kit (25P) with 3.0m cable D-sub

AC

Note 2) Without valve mechanism Option Combinations Combinable Impossible Depends on the model Applicable Filter Regulator Option Auto drain Symbol AW4000 Description AW1000 D D C 1 2 6 8 C J N R W AW2000 AW3000 D D C 1 2 6 8 C J N R W Auto drain pressure differential style Auto drain float style (N.O.)

NCQ8

Auto Switch Internal Circuit D-A90, A90V Contact protection box CD-P11 CD-P12 OUT () Brown Reed switch Unit: OZ, ( ): g Weight to OUT () Blue D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model 0.21 ( 6) 0.21 ( 6) 0.21 ( 6) 0.21 ( 6) 0.28 ( 8) 0.28 ( 8) Lead wire length 30 in (0.5 m) D-A93, A93V Lead wire length 118 in (3 m) 1.06 (30) 1.06 (30) 1.06 (30) 1.06 (30) 1.45 (41) 1.45 (41) Brown (+) Contact

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

D A L Series Part no. 10-SZ3000 SZ3000-114-2A Dimensions Applicable fitting size d Model A L D 10-KQP-04 10-KQP-06 10-KQP-08 10-KQP-03 10-KQP-07 10-KQP-09 4 16 32 6 6 18 35 8 8 20.5 39 10 5/32" 16 32 6 1/4" 18 35 8.5 5/16" 20.5 39 10 383 Cassette Type Manifold 10-SZ3000 Manifold Option DIN rail dimensions / Weight D-sub connector (25 pins) / Cable assembly Directional Control Valves Air Grippers