Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 4 33 25 10 10.5 10.5 12 8.5 13.75 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 53.2 9.1 14.1 30 10 18 11.6 19.5 23 20 29 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 67 15.5 17.5 34 14 22

NVEPA|VEFseies

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Body size 3 4 5 6 1 Pressure gauge 8 3 ARX 1 2 None With pressure switch Nil S None Adapter assembly 4 3 1/4 3/8 1/2 3/4 1 AMR AMR Port size Thread type Thread type ARM Symbol Port size Nil N F Nil N G Rc NPT G Rc NPT G 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the port size of the body.

Electro-Pneumatic Valve NVEP/NVEF Series

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

Compact Cylinder

20 to 400 mm/s Allowable kinetic energy (J) 7.4 9.8 12.4 +1.4 mm 0 Note) Stroke length tolerance Note) Stroke length tolerance does not include the amount of bumper change.

NCQ2/CQ2

20 to 400 mm/s Allowable kinetic energy (J) 7.4 9.8 12.4 +1.4 mm 0 Note) Stroke length tolerance Note) Stroke length tolerance does not include the amount of bumper change.

Electric Actuators

Transfer load 5kg Ultimate speed (mm/s) Ultimate speed (mm/s) Transfer load 4kg 4kg 50 50 2kg 2kg 0kg 0kg 0.1 0 0.2 0 0.1 0.2 Time (s) Time (s) LXPB2SB/LXSH2SB LXPB5SB/LXSH5SB 200 200 Transfer load 3kg Ultimate speed (mm/s) Ultimate speed (mm/s) Transfer load 2kg 2kg 1kg 100 100 1kg 0kg 0kg 0 0.1 0.2 0.05 0 0.1 Time (s) Time (s) 302 Acceleration Time Guide Series LX Acceleration Time Guide

SY

(16 outputs) S-Link (8 outputs) T Link Mini DeviceNet CompoBus/S (16 outputs) CompoBus/S (8 outputs) JEMANET J1 J2 K Q R1 R2 U V CC-Link SS5Y3-45SA-05U-C6. 1 set (Type 45S, 5 station manifold base with serial unit part no.)

V100

K L M N P U T S R VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19 32 50 50 118 96 120 60 7 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 133 96 140 66 9 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 64 50.8 163 196 68 60.5 1 2, 3 4 4-16-7 1 NAMUR Interface 3 Port Solenoid Valve Series VFN200N

Digital Flow Switch (Manifold type)

Flow switch type Temp. sensor Flow range Port size A Symbol Flow adjustment valve Stop valve Nil 61.9 S 61.9 Nil P 95.9 W 95.9 0.5 to 4 L/min 3/8 (symbol 04) (symbol 03) Nil 72.9 S 72.9 Yes P 106.9 Remote sensor/ W 106.9 Integrated display type Nil 65.9 S 65.9 Nil P 99.9 3/8 W 99.9 (symbol 03) 2 to 16 L/min 1/2 (symbol 20) Nil 76.9 (symbol 04) S 76.9 Yes P 110.9 W 110.9 B: Total

VQ5000

J. S. T. Manufacturing Co., Ltd.

Air Cylinder

N Rubber bumper 100 CG1 25 B S Z N CDG1 With auto switch M9BW 100 B 25 N S Z With auto switch (Built-in magnet) Number of auto switches Rod end thread Mounting Nil Male rod end F Female rod end Nil 2 pcs. S 1 pc. n n pcs.

Table of Contents

1 1 C G LJ1 10 S W X10 Guide type Slider guide S X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 Nil W None B contact specification 2 pcs.

CQ2

Contents CQ2B12-S-PS 12 CQ2B16-S-PS 16 Kits include items !4, CQ2B20-S-PS 20 Pneumatic !5 and !6 from the CQ2B25-S-PS 25 table above. CQ2B32-S-PS 32 CQ2B40-S-PS 40 CQ2B50-S-PS 50 Spring extend type (T type) piston and piston rod are combined. (Stainless steel) Seal kits consist of items !4, !5 and !

CE

MI W S + 0.05 0.02 CEP1 CE1 CE2 ML2B C J G5-S Tolerances can be set with the preset value. OK/NG signal is output by the counter. Labor savings can be realized in parts inspections.

CE

MI W S + 0.05 0.02 CEP1 CE1 CE2 ML2B C J G5-S Tolerances can be set with the preset value. OK/NG signal is output by the counter. Labor savings can be realized in parts inspections.

CE

MI W S + 0.05 0.02 CEP1 CE1 CE2 ML2B C J G5-S Tolerances can be set with the preset value. OK/NG signal is output by the counter. Labor savings can be realized in parts inspections.

Electric Actuator

Motor type LEYGlMlA Step motor (Servo/24 VDC) Servo motor (24 VDC) 200 mm/s 200 mm/s LEYGlMlB 125 mm/s 200 mm/s LEYGlMlC 75 mm/s 125 mm/s For the specifications below, operate the system at the load mass shown in the graph x 80%.

IIIIIII

( 2 6 k 9 ) 0 216 in (5 5mm) 0 039 in. (1mm) A B c D E F G H J K 3.92 '99.5',13.05 '77.51 0.96 0.87 (221 0.06 (1.s) o.12 (3) 't.57 (40) 0.96 24.51 1.20 t30.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses MECHANICAL VALVES HOWTO ORDER S NVM430-N01-34 Series NVM NVM430-N01-33 F O F 4 4 1 l b s ( 2 k g ) T T 900 oi (J !