Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

AC Servo Motor Driver (CC-Link Type)

Symbol Name Initial value Unit PC02 *ZTY Home position return type 0h PC03 *ZDIR Home position return direction 0001h PC04 ZRF Home position return speed 500 r/min PC05 CRF Creep speed 10 r/min PC06 ZST Home position shift distance 0 m PC07 *ZPS Home position return position data 0 10STM m PC12 JOG Jog speed 100 r/min PC24 *COP3 Function selection C-3 0h PC30 *DSS Remote register-based position

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q H R Width across flats 10 Width across flats 2 F E D C Y 2 A B Additional dimensions by stroke (mm) Dimensions/10mm stroke (mm) H I J Q: 4 Q: 6 Stroke Y I E A B C D F H J Model R S R S 20 +10 +38 +28 ZPR10F10-0-A10 30 10 12 10 12.5 23.4 39.5 50.5 84.5 1.5 +20 +48 23 ZPR13F10-0-A10 40 13 15 +30 +84 10.4 20.6 12.8 21.6 10.5 13 23.9 40 51 85 2 +54 ZPR16F10-0-A10 50 16 18 +40 +94 ZPR 20/25/

MY1

(Except 32, 40) Side port Side port Back port Back port L L L Front port Front port L L L L L R R R R R R O-ring R R L L R R Bottom port Bottom port DL L Piping tube -X L R Technical Data Slide table operating direction For bottom piping, refer to the figure above. 1365

Cylinder

:p:I L.LJ ~LI--_-II \ ~ '-' f-tw'~ S H r; A Rod end without thread . 1 R H ~. -I Z s . I z . oG I H K MM I [ flore size; I; # F' B C ~ (mm) . 5" 10" R 5" NN W S!

Plug-in Unit

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 2-2-46 Base Mounted Series VQC Plug-in Unit VV5QC41 3(R) port 2-Rc 3/4 Flat ribbon cable connector assembly (26P) 1(P) port 2-Rc 1/2 AXT100-FC26-3: 5 m AXT100-FC26-2: 3 m AXT100-FC26-1: 1.5 m VQC SMC SMC SMC SMC

33

Outlet: 60 Hz Outlet: 60 Hz 20 20 0.1 0.1 10 10 Outlet: 50 Hz Outlet: 50 Hz Return port Allowable operating range Return port Allowable operating range 0 0 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] 202 Thermo-chiller Basic Type HRSE Series Dimensions HRSE012/018/024-A-10/20/23 Ventilation air outlet Ventilation air inlet

MY1

(except for 50) MY1MW16, 20, 50, 63 MY1CW16, 20, 50, 63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25, 32, 40 MY1CW25, 32, 40 L L This port is not available for use. (except for 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 39 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

Compact manifold regulator ARM5 Series

IN side OUT side Fitting size Straight Elbow Elbow Elbow Straight Elbow Elbow Elbow R S T U V W X Y 4, 5/32 2.5 6 11 35.5 2.5 6 11 35.5 6 3 6.5 11 36 3 6.5 11 36 1/4 6.5 6 11.5 38.5 6.5 6 11.5 38.5 ARM5BB Individual supply type (DIN rail mount) n = Number of regulator block stations L2 L2-10.5 L1=(14 x n)+40 11.5 Pressure gauge (Accessory) Y 10 10 14 14 10 10 5.3 S W R V X T 5.5 L3=50+R+

Series KC Self-seal Fittings

KBE1-04 KBE1-06 KBE2-06 KBH1-R1S KBH2-R1S KBH2-R2S KBH2-R3S KBH3-R2S KBH3-R3S KBH3-R4S KBH4-R3S KBH4-R4S R(PT) 1 2 R(PT) 3 8 R(PT) 1 2 R(PT) 3 8 R(PT) 1 4 R(PT) 3 8 R(PT) 1 4 4 R(PT) 1 8 Air supply port: KBE, KBH, KBB, KBS, KBL (Page 84-85) 6 KBE2-08 KBE2-10 KBE3-08 8 10 10 8 2 KBE3-10 KBE3-12 KBE4-12 R1 KB 1 H S 12 Female connector elbow union: KBL Type With sealant (only male thread) standard

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

with cover (LL) 3 52-SY5440 (R) -LL-02 5 156 L (Lead wire length) Insulation: Red (+) Insulation: Black () 0.3 mm2 4.1 37.2 34.5 84.3 Cable type (TT) 3 52-SY5440 (R) -TT-02 Max.10 5 189.6 L (Lead wire length) Lead wire marking No.1 (+), No.2 () 0.75 mm2 5.9 101.1 16 ATEX Compliant Base Mounted Type Series 52-SY7000 Dimensions 21 22.5 2-position single L plug connector (L) 52-SY7140 (R) -

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

R 3/8 R 1/2 10-32 UNF NPT 1/8 0 1 Meter-out Meter-in Be sure to read before handling.

Soft Start-up Valve

This opens the flow passage to port 3 (R), exhausting the air pressure on the port 2 (A) side. The pilot air of the piston r is also exhausted from the pilot valve q, and the piston r is returned upward due to the spring, closing the flow passage from the needle t. r w Exhaust OFF t e 6 AV2000-A/3000-A/4000-A/5000-A Series Construction X X-X r e u q y t Component Parts No.

ARM10/11

Torque recommended: (R 1/8: 7 to 14 Nm).

ARM10/11

Torque recommended: (R 1/8: 7 to 14 Nm).

Power Clamp Cylinder

158.5 78 M10 x 1.5 22 13 36.5 15.8 M8 x 1.25 10 76 13 19.6 199 137.5 18 80 214 113.7 21 50 20.8 M10 x 1.5 12 154 185.8 12 530.9 M12 x 1.75 30 Bore size (mm) 50 63 80 XC PA PB PC PD R RA RB RR S V VA VB VC VD VE VF W XA XB 50 45 10 55 45 68 45 48 11 8 30 32 63.5 71.5 12 3.5 78.4 141.8 137.3 92.8 50 45 10 55 52 78 50 54 11 8 30 32 63.5 71.5 12 3.5 78 154.4 150.4 105.3 70 75 15 65 70 108 68

KB

KBH1-R1S KBH2-R1S KBH2-R2S KBH2-R3S KBH3-R2S KBH3-R3S KBH3-R4S KBH4-R3S KBH4-R4S R(PT) 1 2 R(PT) 3 8 R(PT) 1 2 R(PT) 3 8 R(PT) 1 4 R(PT) 3 8 R(PT) 1 4 KBE1-04 KBE1-06 KBE2-06 4 R(PT) 1 8 Air supply port: KBE, KBH, KBB, KBS, KBL 6 KBE2-08 KBE2-10 KBE3-08 8 10 10 8 KBE3-10 KBE3-12 KBE4-12 2 (P.2.1-77, 2.1-78) R1 KB 1 H S 12 Female connector elbow union: KBL Style With sealant (only male thread

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS120M-M5 M5 x 0.8 9 9 8 10 28.2 24.8 10.3 29.8 33.2 AS120M-U10/32 10-32 UNF AS220M-01 12 R 1/8 Rc 1/8 14.3 14.6 18 31.4 27.4 14.1 32.4 36.4 AS220M-N01 NPT 1/8 12.7 AS220M-02 17 R 1/4 Rc 1/4 18 19.5 27.2 35.9 29.9 18 34.9 39.9 AS220M-N02 NPT 1/4 17.5 Dimensions of R and NPT threads after installation. 15-9-63

4/5 Port Air Operated Valve Series SYJA3000 1

B 11 17.5 1 (Bleed port) VA 1.5 A B M3 x 0.5 (Piping port) 1.5 1.5 33 36 SA Manual override B P R R (35) 7 7 36 (2) VA 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14

MVGQ

MVGQM, MVGQL Common Dimensions ML2B Applicable solenoid valve B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) TA TB U Over 10 st 10 st C J G5-S 12 6 29 50 13 18 58 39 22 56 2 5 36 40 14 7 12 29 5 48 20 30 16 M4 x 0.7 10 M4 x 0.7 M4 x 0.7 10, 20, 30, 40, 50, 75, 100 16 CV 8 33 54 64 15 22 43 25 62 2.5 5.5 38 42 16 8 13 33 7 52 23 30 18 M5 x 0.8 13 M5