I e zz 1.38 (35) 2.76 (70) 2.05 (52) o.79 (20) 1.57 (40) 0.39 00) 0.67 (17) MBxl 25 a.2a (;) 0.43 ( 1 1 ) M18x1.5 t . l 8 (30) 3 5 4 (s0) 2 2 8 t58) 6.26 (1s9) 205 (52) ( 1 1 2 ) 2 6 0 (66) 6.57 t167) 1.34 (35) 3 3 5 (85) 2.52 (64) {20) 1 5 7 (40) 0 3 9 o0) 0 6 7 o7) Ml0x1 25 o 2 a (7) 0.55 M 1 A x 1 5 't.22 ( 3 1 ) 3 8 6 (93) 2 2 8 153) s T o 6 6 9 (r 70) 2 0 5 (52) 1112) 264 (66) 1173)
I-MU02 I-MU03 I-MU04 I-MU05 E1 16 18 20 28 A1 10.5 12 14 18 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 A1 10.5 12 14 18 L1 27 31 36 46 E1 14 18 20 28 L1 27 31 36 46 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 NDH10 8 10 10 14 Size 25 32 40 50 Size 25 32 40 50 +0.058 0 +0.058 0 +0.058 0 +0.070 0 Applicable pin no.
IZS40 IZS41 IZS42 0 1 Remote Remote controller *1 controller *1 1 3 1 0.1 2 5 3 0.5 3 8 5 1 4 10 10 3 5 15 15 5 6 20 20 10 7 30 30 15 8 DC + DC + 20 9 DC DC 30 *1: Set when remote controller is used. 5-3-2.
Lubrication Not required VFA Mounting orientation Unrestricted 300/50 Note 2) Impact/Vibration resistance (m/s2) VFRA Note 1) In case of single type, be certain that pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port {1(P)} for activation.
to 60 20 to 100 Fluid temperature (C) Note 1) 10 to 60 (No freezing) 10 to 100 Enclosure Dusttight, Low jetproof (IP65) Environment Location without corrosive or explosive gases Valve leakage (cm3/min) 0.1 or less (with oil pressure) Exterior leakage (cm3/min) 0.1 or less (with oil pressure) Mounting orientation Unrestricted Vibration/Impact resistance (m/s2) Note 3) 30/150 or less 24 VDC
(Figure-20-3) Fix the cylinder with screws included as accessories after confirming that there is no interference between the lever and the proximity switch. Figure-20-1 Figure-20-2 Figure-20-3 20 - 9. Troubleshooting Detail of trouble Cause Countermeasure Operation is not smooth 1. Lubrication failure Clean components and apply specified grease to them. 2.
3 position (B) 2 (A) 4 (B) 2 (A) 4 Operating pressure to 0.7 0.1 to 0.7 0.2 to 0.7 2 position single Pilot pressure range (MPa) 2 position single 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position Ambient and fluid temperature (oc) Max.60 3 position closed center 3 position closed center Lubrication Not required (B) 2 (A) 4 (B) 2 (A) 4 Mounting position Free 300/50 Impact/Vibration resistance (m/s2
When viewed from the side of the vacuum ports, the far left station is designated as station 1. 50 AEP 40 40 20 HEP Air consumption 30 20 20 10 Related Suction flow Equipment 10 0 0.6 0.4 0.2 0.5 0.3 0.1 0 8 6 4 2 Suction flow (l/min(ANR)) Supply pressure (MPa) Blanking plate assembly Part no.: ZA1-BP1 ZA07 Flow Characteristics ZA07 Exhaust Characteristics Supply pressure: 0.45 MPa Vacuum
] Horizontal 5000 Vertical 0.02 Basic type Positioning repeatability [mm] 0.015Lead H0.02 High precision type 0.1or less Basic type Lost motion[mm] note3) 0.05or less High precision type 10 5 20 12 6 24 16 8 30 20 10 lead [mm] Impact/Vibration resistance [m/s2] note4) 50 / 20 Ball screw (LEFS), Ball screw + Belt (LEFSR Actuation type L) Guide type Linear Guide Static allowable moment [Nm]
Green LED illuminates Ambient temperature Sensor section: 0 to 150C Amplifier section: 0 to 60C D-M9NJ Impact resistance Sensor section: 1000 m/s2 Amplifier section: 300 m/s2 Standard CE marking, RoHS Oilproof Heavy-duty Lead Wire Specifications (Grommet) Auto switch model D-M9NJ D-M9PJ Sheath Outside diameter [mm] 3.4 Insulator Number of cores 3 cores (Brown/Blue/Black) Outside diameter
MSQB-OM02-A PRODUCT NAME Rotary Table MODEL / Series / Product Number MSQB1,2,3,7 Contents 2 Safety Instructions 18 Outline 18 How to order 19 Specifications 19 Weight 19 Effective torque 20 Internal construction and parts 20 MSQ1 to 7 21 Basic circuit 21 Circuit structure 21 Recommended models 22 Mounting 22 Load restrictions 22 Unit used as flange mount 23 Direction and Angle of Rotation
20 20 0.15MPa 0.15MPa 0.15MPa 10 10 10 0.2MPa 0.2MPa 0.2MPa 100 200 300 0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.
LEFS25S LEFS32S LEFS32 Speed 500mm/sec 0 [/min] LEFS40 Speed 500mm/sec 0 [/min] 10,000,000 20 [/min] 20 [/min] 10,000,000 30 [/min] 40 [/min] ISO4 50 [/min] ISO CLASS4 ISO5 ISO CLASS5 ISO6 1,000,000 ISO CLASS6 1,000,000 Particle concentration [particles/m3] Particle concentration [particles/m3] 100,000 100,000 10,000 10,000 1,000 1,000 100 100 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle
(Blanking plate) Rc G NPT NPTF Nil F N T Common exhaust Valve stations VV317-02-051-02 A port size (Base piping) 1/4 02 2 stations Symbol Passage Porting specifications A Side R P Common Common 3 Side Individual Common 20 20 stations Symbol Max. 20 stations 1 VV317-02-053-02 Individual exhaust Manifold Specifications Manifold type Max. number of stations Applicable solenoid valve B mount
For auto switches, refer to pages 19, 20.
(If cable length is 15m: Maximum 20% reduction.) [Transportation] Caution 1. Do not carry or swing the product by the motor or the cable 45 - 14. Electric actuators/Common precautions 14.1 Design and selection Warning 1. Be sure to read the Operation Manual.
Start flag 0: no send Numerical data input 2 1: send 1 Step data No 0 to 63 Data writting 3 Operation Note) 1 1: Absolute 2: Relative 4 H 5 L Speed 2 0 to 65500 mm/s 6 3 7 2 Position 4 +/-2147483647 0.01mm 8 1 9 0 ID1 Numerical 10 H 11 L Acceleration 2 0 to 65500 mm/s2 data input 12 H 13 L Deceleration 2 0 to 65500 mm/s2 Data writting 14 Pushing force 1 0 to 30 10% 15 Trigger LV 1 0 to 30
Start flag 0: no send Numerical data input 16 1: send 1 Step data No 0 to 63 Data writting 17 Operation Note) 1 1: Absolute 2: Relative 18 H 19 L Speed 2 0 to 65500 mm/s 20 3 21 2 Position 4 +/-2147483647 0.01mm 22 1 23 0 24 H ID1 Numerical 25 L Acceleration 2 0 to 65500 mm/s2 data input 26 H 27 L Deceleration 2 0 to 65500 mm/s2 Data writting 28 Pushing force 1 0 to 30 10% 29 Threshold 1
m/s2 in X, Y, Z directions for 2 hours each (De-energized) Vibration resistance 100 m/s2 in X, Y, Z directions 3 times each (De-energized) Impact resistance 2% F.S.
Do not drop, bump, or apply an excessive impact (300 m/s2 or more for reed auto switches, 1000 m/s2 or more for solid state auto switches) while handing the auto switch. It may cause the auto switch to break or malfunction. 2. Observe the proper tightening torque for mounting an auto switch.