LEC-OM02904

H T E ()L d W D T Max.

asilltr

D-A73, D-A80 D-A72H, O.A73H, O.A76H, D-A8OH, D-F7NTL, D-F7P, D-F79, D.F79W, O-J79, D..t79W D-Fltr WV, D-F7tr V t,.A73C, D-A80C, D-J79C op6drirE ElE6 (* lid be*rw) I, Dimensiltn / Operating Range Series NCDQT Solid.

Air Cylinder NCQ7 Series Compact Cylinder

1" Black D-F79F D-F7LF D-F7NTL o oiagnoslic ouipui OUT 2 o Series NCDQT Auta-Switch / Operating Range D-A72. D-A73, D-A80 D-A72H, O.A73H, O.A76H, D-A8OH, D-F7NTL, D-F7P, D-F79, D.F79W, O-J79, D..t79W D-Fltr WV, D-F7tr V t,.A73C, D-A80C, D-J79C op6drirE ElE6 (* lid be*rw) I, Dimensiltn / Operating Range Series NCDQT Solid.

5 Port Air Operated Valve

The valve arrangement is numbered as the 1st station from D side. Under the manifold base part number, state the valves to be mounted in order from the 1st station as shown in the figure above. Refer to page 1520 for manifold options. 1519 VFA3000/5000 Series Manifold Options For base mounted Blanking plate assembly Mounting screw, gasket part no.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

NL F D C Y 2.5 A B Dimensions (mm) A B C D F N NL P Y Model ZPT40F-B8 M8 x 1.25 8 12 40 43 12.5 18.5 39 5 ZPT40F-B01 Rc 1/8 6.2 14 ZPT50F-B8 M8 x 1.25 8 12 50 53 13.5 19.5 40 6 ZPT50F-B01 Rc 1/8 6.2 14 13-11-105 10 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry With Buffer Series ZPT How to Order ZPT 10 F GN J 20 04 A10 Mounting thread diameter/Male thread (Refer to Table (1) for applications

Vacuum Pad: Ball Joint Type

N NL Hexagon width across flats 19 F D C Y 2.5 A B Dimensions (mm) N: 1/8 (Rc, NPT, NPTF) N: M8 x 1.25 Model A B C D F NL P F P ZPT40F12.5 18.5 39 39 40 43 8 12 14 ZPT50F13.5 19.5 40 40 50 53 712 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry: With Buffer ZPT Series How to Order ZPT 10 F GN J 20 04 A10 Mounting (Refer to Table (1) for applications.)

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q Width across flats 12 N M5 x 0.8 Width across flats 10 8 3 5 Y R R F F Width across flats 12 Width across flats 3 Width across flats 10 Width across flats 2 E E D C D C 2 2 A A B B Dimensions A Dimensions A (mm) (mm) B B C D E F Y C D E F N Model Model ZPR10F-0-B5 ZPR20F-0-B5 10 12 10 12.5 23.4 39.5 1.5 M5 x 0.8 20 22 ZPR13F-0-B5 ZPR20F-0-B8 13 15 M8 x 1.25 23.9 10.5 13 40 2 12.5 15.5 29.3

ASD

-10S 32.6 64.3 18.5 57.3 64.8 57.6 50.1 18.6 R(PT)1/2 49.6 42.1 28.6 26.5 25.9 24 12 22 179 ASD630F-04-12S 34.4 66.1 20.9 Reference dimensions of M5 X 0.8, R(PT) thread after being screwed in. 4.1-15 Dual Speed Controller with One-touch Fittings Series ASD Dimensions/Inch Applicable tube O.D. d ASD230F ASD330F/430F ASD530F/630F Applicable tube O.D. d L2 L2 L3 L3 M M D2 D2 L1 L1 L4 L4 H H

AKH/AKB Series Check Valve with One-touch Fitting

Model D L M AKH04-00 AKH06-00 AKH08-00 AKH10-00 AKH12-00 3 5 10 17 25 4 6 8 10 12 2.8 6.5 14 24 34 9.3 11.6 15.2 18.5 21.7 33.5 37.1 53.3 63.6 70.2 12.7 13.5 18.5 21 22 2-Applicable tubing D Inch Size Weight g Effective area (mm) Applicable tube O.D.

Compact Cylinder

D-M9mW D-M9mA D-M9mV D-M9mWV D-M9mAV U A B [mm] Auto Switch Proper Mounting Position [mm] Auto Switch Mounting Height D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV A B 12 5 2.5 16 5.5 3 20 6 6 25 6 7.5 32 8 8 40 11 9 50 11.5 11 63 13.5 13.5 80 16.5 18 100 19.5 21 Auto switch model Auto switch model D-M9mV Bore size Bore size U 12 19.5 16 21 20 23 25 24.5 32 28.5 40 31.5 50 36.5 63 43 80 52.5

CUJ

Bore size (mm) 4, 6, 8, 10 Port size M3 x 0.5 6 8 or more Stroke (mm) AS121F-M3-23 AS121F-M3-04 AS131F-M3-23 AS131F-M3-04 Only applicable to the mounting position shown in Fig. (1) below.

Modular Type Regulator Series AR

Metric thread (M5) Rc NPT G Nil N F Port size Accessories Body size Port size Symbol Nil B E Symbol Applicable model AR10 to 60 AR20 to 60 AR10 AR20 to 60 AR10 to 40 Description With bracket 10 20 25 30 40 50 60 M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 With square embedded type pressure gauge (with limit indicator) With round pressure gauge (without limit indicator) With round pressure

Soft Start-up Valve

VAC]*1 V V V V 4 220 VAC [230 VAC]*1 V V V V AC (50/60 Hz) t d Rated coil voltage DC 5 24 VDC V V V V 6 12 VDC V V V V + G Grommet (Lead wire length: 300 mm) V V V V D Type D (DIN terminal/With connector) V V V V Y Type Y (DIN terminal/With connector)*2 V V V V DO Type D (DIN terminal/Without connector) V V V V YO Type Y (DIN terminal/Without connector) V V V V + y e Electrical entry u f

E-P HYREG ® Series VY1 1

2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140

Series AL modular style lubricator provides accurate lubrication of downstream equipment. The oil drop rate is adjustable depending on equipment requirements. The AL modular design allows connection with other SMC air preparation equipment. Atomizes lubricant into fine particles at uniform rate, Drip rate easily monitored with sight dome, Can be refilled under pressure, High-response time

Series AL modular style lubricator provides accurate lubrication of downstream equipment. The oil drop rate is adjustable depending on equipment requirements. The AL modular design allows connection with other SMC air preparation equipment. Atomizes lubricant into fine particles at uniform rate, Drip rate easily monitored with sight dome, Can be refilled under pressure, High-response time

Series AL modular style lubricator provides accurate lubrication of downstream equipment. The oil drop rate is adjustable depending on equipment requirements. The AL modular design allows connection with other SMC air preparation equipment. Atomizes lubricant into fine particles at uniform rate, Drip rate easily monitored with sight dome, Can be refilled under pressure, High-response time

Series AL modular style lubricator provides accurate lubrication of downstream equipment. The oil drop rate is adjustable depending on equipment requirements. The AL modular design allows connection with other SMC air preparation equipment. Atomizes lubricant into fine particles at uniform rate, Drip rate easily monitored with sight dome, Can be refilled under pressure, High-response time

Series AL modular style lubricator provides accurate lubrication of downstream equipment. The oil drop rate is adjustable depending on equipment requirements. The AL modular design allows connection with other SMC air preparation equipment. Atomizes lubricant into fine particles at uniform rate, Drip rate easily monitored with sight dome, Can be refilled under pressure, High-response time