EXxx-OMS0026CN

2 0 V() 3 24 V() 4 0 V() 5 FE (2)EX600-ED31 0 V() 2 0 V() 3 FE 4 24 V() 5 24 V() 2 SI IP67 -28No.EX-OMS0026CN EX600-ED2EX600-ED3M12(5 ) 7/8 (5 ) ( DC24 V 10 Class22 A DC24 V 108 A ( DC24 V +10/-5 Class22 A DC24 V +10/-58 A 1 IP67() -1050 -2060 3585RH() AC500 V1 FE DC500 V10 M FE CE UL(CSA)RoHS 170 g 175 g : EX600-ED2-29No.EX-OMS0026CN EX600-ED3-30No.EX-OMS0026CN (DC24 V10%)

1

Precautions mm : D 6 D 1 mm, 6 < D 25 D 2 mm, D > 25 D 4 mm inch : D 0.23 D 0.04 inch, 0.23 < D 0.98 D 0.08 inch, D > 0.98 D 0.16 inch 3. In the case of double rod type and single acting retraction type, enter the dimensions when the rod is retracted. 4. Only the single side of a double rod is able to manufacture. 1.

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

CE2

0.5 0.6 0.7 F 200 V Black COM (0 V) G Shield Data A phase output pulse Connector pin arrangement B phase output pulse G A F B H E D C 0 1 2 3 4 3 2 1 Counter value 10-12-55

SYJ3000/5000/7000

center Apparent power VA (B) 2 (A) 4 (B) 2 (A) 4 AC 200 V 2.3 (With indicator light: 2.4) 2.5 (With indicator light: 2.6) [2.7 (With indicator light: 2.8)] 220 V [230 V] 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) Surge voltage suppressor Diode (Non-polarity type: valistor) 3 position exhaust center 3 position exhaust center (B) 2 (A) 4 (B) 2 (A) 4 Indicator light LED In common between 110 VAC and 115

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

7.4

Page 755 External pilot V Note 2) Page 755 V Note 2) Page 755 V Note 2) Page 755 V Note 2) Page 755 V Note 2) Page 755 Individual SUP spacer V V Page 755 Page 755 Individual EXH spacer V V Page 756 Page 756 Port plug V Page 756 Blanking plug V V Page 756 V V Page 756 Page 756 Page 756 Silencer (For manifold EXH port) V V V Page 756 Page 756 Page 756 Double check block (Separated

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(Initial value) Base mounted Solenoid specifications Grommet(G)/(H), L plug connector (L), M plug connector (M), DIN terminal (D), M8 connector (W) Electrical entry JIS Symbol G, H, L, M, W D Internal pilot Rated coil voltage V DC AC50/60Hz 24, 12, 6, 5, 3 24, 12 10-SYJ51 M 2 4 10-SYJ52 M 2 4 100, 110, 200, 220 10% of rated voltage Allowable voltage fluctuation (A) 2 (A) 2 Standard 0.35

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

3 Product image Socket Socket Plug Plug Socket For DeviceNetTM (Plug, A-coded) Number of functional poles M12: 5 pins Key type A-coded (Normal key) DeviceNetTM / CANopen2 5 3 4 4 3 5 1: DRAIN: NC 2: V+: NC 3: V: NC 4: CAN H 5: CAN L 1: DRAIN 2: V+ (Red) 3: V (Black) 4: CAN H (White) 5: CAN L (Blue) 1: 2: 3: CAN GND 4: CAN H 5: CAN L 1 2 Pin assignment 2 1 Plug, A-coded Socket, A-coded (

Rotary Table/

sensitive position 6 DC () Blue D-F9V Mounting screw M2.5 x 4l D-F9B, F9BV 4.3 Slotted set screw Indicator light 2 OUT (+) Brown 20 2.7 2.8 4.6 OUT () Blue 3.8 3.1 6.2 4 Most sensitive position 6 30 2-color Display Solid State Switches/Direct Mounting Type D-F9NW(V), D-F9PW(V), D-F9BW(V) Auto Switch Specifications Grommet D-F9W, D-F9WV (with indicator light) Auto switch part no.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

12 V Relay, PLC Grommet Yes 24 V 3-wire (NPN) 5 V, 12 V IC circuit Diagnostic indication (2-color indication) 3-wire (PNP) 2-wire 12 V Yes No Yes No 100 V Reed auto switch Relay, PLC IC circuit 100 V or less Grommet 24 V 2-wire 12 V 100 V, 200 V 200 V or less Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid

Wireless System

Description 30.2 13.2 2 1 24 V (for control/input) 1 24 V (for output) 2 24 V (for output) 2 0 V (for output) 3 0 V (for control/input) 3 24 V (for control/input) 4 0 V (for output) 4 0 V (for control/input) 5 Unused 5 Unused 1 5 4 3 End plate (U side) 28.2 26 2 x M4 direct mounting hole 20.5 EX600-EU1 8 106 90 4.6 SI unit mounting hole x 2 56.6 18.2 13 13.2 9.1 4.1 6.7 14 EX600-W Series

Vacuum

:t ; : ; = '6;; 6 < EI 6 < EI d-z E < 8i E < ' 6 2 'dz 'Eiz 6 Z ,n2 < 2 6 V < 2 6 Y a z 6 Y d t d 2 45 90 PSI (3 ^ 6 kg cm'?) o.17 0.004/ 0,025/ o.17 ).00410.025 5 c/s 40 120"F (5 50.C) I I I (PV) . (PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also.

Vacuum

:t ; : ; = '6;; 6 < EI 6 < EI d-z E < 8i E < ' 6 2 'dz 'Eiz 6 Z ,n2 < 2 6 V < 2 6 Y a z 6 Y d t d 2 45 90 PSI (3 ^ 6 kg cm'?) o.17 0.004/ 0,025/ o.17 ).00410.025 5 c/s 40 120"F (5 50.C) I I I (PV) . (PSePD) (PVe)PSePD) ' Provided as standard: l\Iounting bracket t See p 28 & 29 also.

C76

Same side Different sides Same side Different Same side sides D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7/F7V D-J79/J79C 15 + 45 (n = 2, 4...) ( n 2) 2 D-C7 D-C80 10 15 50 50 + 45(n 2) ) 10 + 35 (n = 2, 4...) ( n2 2 10 5 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF 15 + 50 (n = 2, 4...) ( n 2) 2 10 15 65 65 + 50(n 2) D-A79W, D-J79W D-F7W, D-F7BAL D-F79F, F7WV D-F7BAVL ) 15 + 35 (n = 2, 4.

C76

Same side Same side Different sides Different Same side sides D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7/F7V D-J79/J79C 15 + 45 (n = 2, 4...) ( n 2) 2 D-C7 D-C80 10 50 50 + 45(n 2) 15 ) 10 + 35 (n = 2, 4...) ( n2 2 10 5 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF 15 + 50 (n = 2, 4...) ( n 2) 2 10 65 65 + 50(n 2) 15 D-A79W, D-J79W D-F7W, D-F7BAL D-F79F, F7WV D-F7BAVL ) 15 + 35 (n = 2, 4.

Compact

D-M9mWV D-M9mAV D-M9m D-M9mW D-M9mA (1) Bottom mounting 5 10*2 15*1 15*1 (2) When mounting an auto switch into the groove from the top*3 15 15 30 30 (3) Tube top mounting 5 10*2 5 10*2 *1 For 5 and 10 mm strokes, lead wires will interfere with mounting surface. *2 For 5 mm stroke, it is possible to mount an auto switch, but 2-color display may not be available. *3 When mounting an auto

Vacuum Pad

ZP3P-20PTSF ZP3P-25PTSF ZP3P-35PTSF ZP3P-50PTSF p. 2 q Pad unit With Buffer p.6 e Buffer assembly Pad diameter Part no. 20 25 35 50 Dimensions ZPB2(J/K)10-B5 V V ZPB2(J/K)20-B5 V V ZPB3(J/K)10-B01 V V ZPB3(J/K)20-B01 V V p. 12 e Buffer assembly w T female thread adapter Pad diameter Part no. 20 25 35 50 Dimensions ZP3PA-T1-B5 V V ZP3PA-T2-B8 V V w T female thread adapter p. 11

IDG

/2 14-19-31 28 Membrane Air Dryer Unit Type Series IDG Units (Type M, Type V) How to Order 03 IDG 30 M Option Symbol Contents Size 3 5 10 20 30 50 60 75 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Size Nil Standard 3 (2) (1) (2) (2) (2) P With fitting

Series IDG

Note 2) When symbols C or D are specified, an auto drain with a part number shown on page 18 is mounted.