Direct Operated

Add an in front of the part numbers for solenoid valves, etc. to be mounted. 1 2 3 4 7 8 J 5 6 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V U side 1 2 3 4 5 n Station D side AC Note) Note) Enter the products part number in order, counting the 1st station from the left in the m a n i f o l d arrangement, when viewing the individual port in front.

Digital Flow Monitor

12 V: 300 Power supply voltage 24 V: 600 -RT/-SV NPN open collector 2 output + External input Max. 30 V, 80 mA Residual voltage: 1 V or less External input: Input voltage 0.4 V or less (reed or solid state), 30 msec or more -16No.PF-OMU0007-D -RT/SV/XY NPN open collector 2 output + Copy function Max. 30 V, 80 mA Residual voltage: 1 V or less -RT/-SV PNP open collector 2 output + Analogue

e

) 3-wire (PNP) 2-wire 5 V 12 V IC circuit 12 V 5 V 12 V 12 V Relay, PLC 24 V Yes Grommet Diagnostic indication 2-color display Grommet IC circuit A96 A93 A90 12 V 5 V 3-wire (NPN equiv.)

SY

B 2 to 17 2 to 10 2 to 10 D side U side D U B 2 to 8 2 to 8 2 to 8 D side U side D U For mixed specifications, order separately on a manifold specification sheet. Both sides M Special specifications Both sides M Special specifications For special specifications, order separately on a manifold specification sheet.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V 3-wire (PNP) 2-wire 12 V 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC Diagnostic indication (2-color indication) 5 V, 12 V Grommet 24 V 2-wire 12 V Water resistant (2-color indication) Y7BA Solid state switches marked with are produced upon receipt of order.

48

V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v Relay, PLC Diagnostic indication (2-color indicator) Grommet Yes 24 V 2-wire 12 V M9BWV M9BW V V V v v 3-wire (NPN) 5 V, 12 V M9NAV1 M9NA1 v v V v v IC circuit 3-wire (PNP) M9PAV1 M9PA1 v v V v v Water resistant (2-color indicator) 2-wire 12 V M9BAV1 M9BA1 v v V v v 1 Water-resistant type auto switches can be mounted on the above models

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Pin Clamp Cylinders

(2-color indicator) Grommet Yes 24 V 3-wire (NPN) 5 V,12 V M9NWV V V V v v IC circuit 3-wire (PNP) M9PWV V V V v v 2-wire 12 V M9BWV V V V v v Grommet Yes 2-wire 24 V 12 V 100 V A73 V V V Relay, PLC Diagnostic indication (2-color indicator) A79W V V Reed auto switch * Solid state auto switches marked with v are produced upon receipt of order. * The D-A9l and A9lV cannot be

CE

M9P Solid state switch 12 V 2-wire M9B M9BV Relay, PLC Grommet Yes 3-wire (NPN) 24 V F9NW F9NWV 5 V, 12 V IC circuit Diagnostic indication (2-color indication) 3-wire (PNP) F9PWV F9PW F9BWV F9BW 12 V 2-wire Water resistant (2-color indication) F9BA Solid state switches marked with are produced upon receipt of order.

CE

M9P Solid state switch 12 V 2-wire M9B M9BV Relay, PLC Grommet Yes 3-wire (NPN) 24 V F9NW F9NWV 5 V, 12 V IC circuit Diagnostic indication (2-color indication) 3-wire (PNP) F9PWV F9PW F9BWV F9BW 12 V 2-wire Water resistant (2-color indication) F9BA Solid state switches marked with are produced upon receipt of order.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Z76 5 V IC circuit Yes Grommet Z73 12 V 100 V Relay PLC 24 V 2-wire No 5 V, 12 V Z80 100 V or less IC circuit Y69A Y59A 3-wire (NPN) IC circuit 5 V, 12 V Y7PV Y7P 3-wire (PNP) Y69B 2-wire Y59B 12 V Relay PLC Grommet Yes 24 V Y7NWV 3-wire (NPN) Y7NW IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Y7PWV 3-wire (PNP) Y7PW Y7BWV Y7BW 2-wire 12 V Improved water resistance

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

0.55

Surge intrusion circuit example (NPN outlet example) (24 VDC) P Grommet or L/M-type plug connector With light/surge voltage suppressor (lZ) Output circuit Surge voltage (~) 24 V 0 V sol.1: Energized 2 V or less LED Varistor Coil R Surge voltage 0 V (~) sol.2: Deenergized 2 V or less Surge voltage R P DIN or Conduit terminal With light/surge voltage suppressor (lZ) 24 V 0 V Large capacity

Compact Cylinder with Lock Series CLQ

V,12 V Magnetic field resistant (2-color indication) 2-wire (Non-polar) 3-wire (NPN equivalent) IC circuit A96V A96 5 V A72 A72H Grommet 200V 100V Reed switch A93V A90V A93 A90 12 V IC circuit 100 V or less Relay, PLC 5 V,12 V 12 V 2-wire A73C A80C A79W 24 V Connector IC circuit 24 V or less 5 V,12 V Diagnostic indication (2-color indication) Grommet Solid state auto switches

MU

F7BWV F7BAV 200 V 100 V 12 V Yes Relay, PLC 2-wire 24 V Connector Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 24 V IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 2-wire 12 V Grommet Water resistant (2-color indication) 4-wire 2-wire With diagnostic

CE

M9P Solid state switch 12 V 2-wire M9B M9BV Relay, PLC Grommet Yes 3-wire (NPN) 24 V F9NW F9NWV 5 V, 12 V IC circuit Diagnostic indication (2-color indication) 3-wire (PNP) F9PWV F9PW F9BWV F9BW 12 V 2-wire Water resistant (2-color indication) F9BA Solid state switches marked with are produced upon receipt of order.

MU

F7BWV F7BAV 200 V 100 V 12 V Yes Relay, PLC 2-wire 24 V Connector Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) 24 V IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2-color indication) Yes 2-wire 12 V Grommet Water resistant (2-color indication) 4-wire 2-wire With diagnostic

PFxx-OMU0002

Approx. 1.1 mm Insulator Colours Brown, blue, black, white Sheath Finish O.D. 4 71 No.PF-OMU0002-D Characteristics data Flow rate/ Analogue output 0 L/min A 2 B 0 L/min C 2 D Voltage output (1 to 5 V) 1 1 V 1.04 V 5 V Voltage output (0 to 10 V) 1, 3 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range *4 Maximum value of rated flow range PF3A703H 30

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

(Same surface) 60 65 D-Y59/Y69 D-Y7P/Y7PV 2 pcs. (Different surfaces) 20 20 1 pc. 20 20 2 pcs. (Same surface) 70 65 D-Y7W D-Y7WV 2 pcs. (Different surfaces) 25 20 1 pc. 25 20 2 pcs. (Same surface) 70 75 D-Y7BAL 2 pcs.

Compact Guide Cylinder

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches Bore size 12 (10 x 2) 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) D-M9V 1 5 2 5 D-M9 1 5 Note 1) 5 2 10 Note 1) 10 D-M9W 1 5 Note 2) 2 10 Note 2) 10 D-M9WV D-M9AV 1 5 Note 2) 2 10 D-M9A 1 5 Note 2) 2 10 Note 2) Note 1) Confirm that it is possible