Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

6 e (1 pc.) @4 10-11-10 10 Series MIW/MIS Escapements Construction: Single Finger Type (MIS) 8 12, 20 i e u q !3 y w o t RE A B !2 w r !0 !1 REC CX CY 25, 32 Option w @0 !1 !7 !8 !5 !9 MQQ M RHC !6 MK(2) (32 only) RS Q G Scraper Stroke adjuster RS H A No. Description Material Note Component Parts RZQ No. Description Material Note Hard anodized Piston seal NBR Aluminium alloy Body !

XL

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

SMC Electronic Switch Series Variations

The deviation from the setpoint is +/ 1[kPa]. this means that the output can become energized anywhere between 49 to 51[kPa]. (Refer to the graph below.) Starting Finished Absorbed Absorbed Absorbed Absorbed A P1 Vacuum P2 51 50 49 51 Set value [kPa] 49 Effective area of pressure indication at 50[kPa].

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

MTS Air pressure supplied from A operates on both surfaces q and w. (Extension) MY q w A B Piping is concentrated in the head cover. CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Air pressure supplied from B operates on surfaces e.

TABLE OF CONTENTS

All Models STRAIN RELIEF CONNECTOR BOTTOM CAVITY PORT .20 (5.1) .30 (7.6) SPADE TERMINAL COIL MOLDED All Models All Models * Models 21, 31, 51 ADD .232 (5.9) FOR SPADE TERMINAL COIL OPTION SINGLE AUTOMOTIVE MANIFOLD MOUNT HIGH TEMPERATURE MOLDED COIL All Models except 51 All Models All Models DOUBLE AUTOMOTIVE FLANGE MOUNT EUROPEAN DIN STYLE COIL All Models except 51 Models 21, 71 Models

VHK

(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.

ISO Cylinder

to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 68 118 143 168 97 147 172 197 140 190 215 240 40 89 139 164 189 214 122 172 197 222 247 174 224 249 274 299 Boss-cut/Basic [mm] Bore size Stroke Item S ZZ 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to

Rotary Actuator/Vane Type

q END w END q A B A B B A Switch for rotation END q Switch for rotation END q Switch for rotation END w Switch for rotation END w Auto switch B port A port * Solid-lined curves indicate the rotation range of the output shaft with single flat (key).

Aluminum High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

15

51 67.5 76.5 Note 1) The values in the above list are used as a guide for the auto switch mounting position for end of stroke detection.

High Vacuum Angle Valve, XL Series

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

EXxx-OMW0014CN

LED EX245-LA1/LB1 LED LED . 9-15 4 (C/Q) LED No.0,2,4,6 LED Port deactivated (L+) (ON/OFF1Hz) IO-Link IO-Link (ON/OFF2Hz) IO-Link Device IO-Link (L+C/Q) OFF Digital input ON (L+) OFF Digital output ON (L+C/Q) . 9-16 2 (I/Q) LED No.1,3,5,7 (EX245-LA1A) LED status Description I/Q OFF Digital input (I/Q) I/Q ON . 9-17 2 (P24) LED No.1,3,5,7 (EX245-LB1B) LED status Description

MHY2/MHW2

2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !3 Open Component Parts Component Parts Note No. q Description Material Aluminum alloy Description Material Note No. Body Bushing B Hard anodized Sintered alloy steel o !0 !1 !2 !3 !4 !5 !

CJ2

Component Parts No. q w e r t y No. u i o !0 !

CP95

9 @0 @1 @2 @3 @4 Material Description Spring washer Set screw Rod end nut Wear ring Cushion seal Rod seal Piston seal Cushion valve seal Cylinder tube gasket Piston gasket Magnet No. q w e r t y u i o !0 !1 !2 !

CP95

6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

MHZ

3 u q @3 @4 t r !4 y Single acting/Normally closed MHR !9 @0 @1 MHK MHS MHC Double acting/With fingers closed MHT MHY MHW MRHQ Component Parts Misc. Material No. Description Note Material No. Description Note Aluminum alloy Chloroprene rubber CR Hard anodized q Body DStainless steel Fluoro rubber FKM Dust cover w !

MHZ

Hard anodized Seal kit @2@3@4@5 MHZJ6-PS Body Aluminum alloy q CR MHZJ2-J6 Piston Stainless steel w Material FKM Heat treated Dust cover !

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

QL 11-/22-MXPJ6-10 4 x M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51 30 35 53 42 47 37 11 10 59 11-/22-MXPJ6-10 833 Air Slide Table MXP/MXPJ6 1122Dimensions: MXP6 1122Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

QL Without magnet and switch rail 2 2-M2 x 0.4 depth 2.2 12 Metal stopper 11-/22-MXP6-10 Max. 10.5 F 4-M3 x 0.5 depth 3 12 2-M2 x 0.4 depth 3 (mm) E F H J M Q QL S W Y Z AA Model 23 25 38 33.5 37 28 8 5 42 22 45 2 11-/22-MXP6-51 30 35 42 48.5 47 37 11 10 53 27.5 60 9.5 11-/22-MXP6-10 101 Air slide table MXP/MXPJ6 11221122Dimensions: MXP10 2-M3 x 0.5 depth 5 Z 3 Metal stopper V K C 4 5 C Max