Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Dimensions Manifold type (without PD port) ZZQ1 -B2B-X125 ZQ1 3M(-Q) 2 x Rc 1/4 EXH. port PE P 8 P PE 62 13 Space Saving Vacuum Ejector Series ZQ Manifold Exploded View e y r b y y r y a) part b) view t w a) part t q a) part t Part no. Component Parts Description No. Hexagon socket head cap screw End block L End block R 1 2 3 Refer to How to Order below.

One-touch Fittings

[mm] 1 D1 Weight [g] X Y Nylon Urethane 4 M5 x 0.8 KQ2T04-M5G1 7 8.2 7.7 10 7 15.4 14.8 15.9 13.3 4.5 4.5 2.5 3.9 6 M5 x 0.8 KQ2T06-M5G1 7 10.4 9.7 12 7 14.5 16.5 18.7 13.3 4.5 4.5 2.5 4.4 L1 L1 M M Oval type A L2 4, 6 1: D1 is maximum diameter.

Slide Unit Series CX2/CXWM/CXWL

For dimensions of 25 stroke, refer to page 490. 489 Series CXWM 20 With End Lock: CXWM2025 stroke R Max. 167 4 x M5 x 0.8 thread through From opposite side 4 x 7.5 counterbore depth 4.5 2 x 2 x 6H7 depth 8 +0.012 0 M10 x 1.0 RB1006 Shock absorber Set screw for fixing adjusting bolt (M5) M10 x 1.0 Adjusting bolt 2 x M5 x 0.8 Cylinder port 4 x 5.5 through 4 x 9.5 counterbore depth 5.5 2 x M5

Slide Unit Series CX2/CXWM/CXWL

For dimensions of 25 stroke, refer to page 490. 489 Series CXWM 20 With End Lock: CXWM2025 stroke R Max. 167 4 x M5 x 0.8 thread through From opposite side 4 x 7.5 counterbore depth 4.5 2 x 2 x 6H7 depth 8 +0.012 0 M10 x 1.0 RB1006 Shock absorber Set screw for fixing adjusting bolt (M5) M10 x 1.0 Adjusting bolt 2 x M5 x 0.8 Cylinder port 4 x 5.5 through 4 x 9.5 counterbore depth 5.5 2 x M5

Fieldbus System

] DIN rail clamping screw 8 R R 11.5 63.5 62.5 56.6 3 3 12 X 12 X 40.5 B B B B B B B B P P 25 1 1 A A A A A A A A 18.5 9.5 7.5 (12) (7.5) C3, C4, C6, M5 [4(A), 2(B) port] C8: 8 One-touch fitting C8 [1(P) SUP port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 20.5 P = 10.5 34 L2 = L1 10.5 L3 = 10.5 x n1 + 65.5 L4 = L3 + 97.5 + 47 x n2 L5 = (L1 L4

Air Cylinder Series CM2

-H -R -W N L Stroke Axial foot style: CBM2L Bore size LH B 4 x LD 2 x LC LT X Y Y X LS + Stroke Z ZZ + Stroke LZ LX -H -R -W N L Stroke N L Stroke Head side flange style: Rod side flange style: CBM2F Bore size -H -R -W CBM2G Bore size 4 x FD Mounting hole C2 2 x FD Mounting hole FY B FX FZ Z + Stroke FT FT Z 20 to 32 40 -H -R -W N L Stroke Single clevis style: CBM2C Bore size CD U L RR CX

Stopper Cylinder

B + stroke R R O1 thread [mm] Bore size A B D E F G H J K L M N O P Q S T V X Y Z W Rc NPT G Rc NPT G 16 68 41.5 10 29 6 3 26.5 18 1.5 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 8 20 18 3.5 37 0 0 0 20 78 45 12 36 8 4 33 22 2 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 10 24 22 4 47 1.5 1.5 0 32 87 48 20 45 7.5 8 39 4.5 32 3 34 5.5 9 depth 7 1/8 1/8 1/8 20 18 36 20 8 14 40 105.5 52.5

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

2 t r @2 @1 #3 #4 #1 @9 #2 D-X @5 @7 @4 @6 20Data @3 CY1H10-B CY1H10-BS @8 #0 t CY1H10CY1H10 Material Note Component Parts No. q w e r No. !8 !

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

0 y t r q e u q !2 i !1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) o 5(EA)/3(EB) 1(P) SJ3B60 [N.O. valve x 2] SJ3B60 [N.O. valve x 2] SJ3B60K with back pressure check valve !0 y t r w e u w !2 i !

VDW

Model Port size P B B1 E F C D J K M Grommet Q R 20 VDW1 VDW2 M5 42.5 15 4 11 15.5 30 20 10 6 11 M2.5 M5, 1/8 52 5 15 17 36.5 22 11 8 13.5 M3 Body material Stainless Steel Grommet D 300 Q F Full wave rectifier (AC type) R E C A 2 x P Port size B B1 M 2 x J thread depth K (mm) Mounting method Electrical entry Model Port size P A B D E F B1 C J K M Grommet Q R 52 VDW1 VDW2 12 20 15 6 11 M2.5

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

4/2.5 x R 4/2.5 x M5 For soft nylon and polyurethane tubing M-01AU-4 M-5HL-4 For nylon, soft nylon and polyurethane tubing Body rotates at 360 around the stud axis For reducing R 1/8 female to M5. 1 8 KKA 1 8 R R x M5 female M-5B 1 8 6/4 x R 6/4 x M5 M-01AU-6 P.196 M-5HL-6 P.198 KP 1 8 P.199 Plug Hose nipple Use to plug unused M5 port.

REA/REB

Construction/Dimensions (mm) R Note 2) F Note 1) Model PA M MD MM LA L C HB B HA W A REA25 36 5 M4 M5 x 0.8 30 70 8.0 28.5 46 21 47 20 5.5 7 REA32 47 6 M5 M6 x 1.0 35 80 9.5 36 60 27.5 61 22.5 6.0 8 REA40 55 6 M5 M6 x 1.0 40 92 9.5 41 70 28.5 71 26 6.0 8 REA50 65 8 M6 M8 x 1.25 40 110 11 49 86 35 87 35 6.0 11 REA63 80 10 M6 M8 x 1.25 50 122 18 57 100 42 101 36 7.0 11 Note 1) Dimension F provides

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Others (Special Order) E L E C T R I C A L E N T R Y O P T I O N S None Z With Indicator Light and Surge Voltage Suppressor F Through Base H O W T O O R D E R M A N I F O L D FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 2.71 SOLENOID VALVES SERIES NVFS H O W T O O R D E R M A N I F O L D / O P T I O N P A R T S A S S E M B L Y S E E I N S I D E F R O N T

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ L plug connector (L): VQZ22(R)-L-C4/C6/M5 DIN terminal (Y): VQZ22(R)-Y-C4/C6/M5 VZ VS Indicator light 84 300 VFN (Lead wire length) 30.5 <35.5> 87 Max. 10 Applicable cable O.D. 3.5 to 7 Pg.7 Cover diameter 1.5 Cross section 0.23 mm2 Indicator light < >: AC 61.5 M plug connector (M): VQZ22(R)-M-C4/C6/M5 54 36 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 300 89 78 Indicator

MGP

D (mm) B 0.2 MGC B 0.2 MGF CY1 A 0.2 A 0.2 Hex socket head mounting screw 140 214 50 66 116 170 M12 X 1.75 M16 X 2 Hex socket head mounting screw 50 56 72 82 98 106 130 142 180 210 D(mm) Bore (mm) A (mm) B (mm) C (mm) Bore (mm) A (mm) B (mm) C (mm) MY1 MGPM MGPL 32 47 M4 X 0.7 M5 X 0.8 M5 X 0.8 M6 X 1.0 M8 X 1.25 18 22 24 30 34 40 46 58 54 62 41 46 54 64 78 86 110 124 156 188 10 12 14 18

Mechanically Jointed Rodless Cylinders

R L NE C NG R R L L G R L A N L R Z + Stroke Slide table operating direction (mm) Model MY3A16 MY3A20 MY3A25 MY3A32 MY3A40 MY3A50 MY3A63 MM M4 x 0.7 N 6 M 55 A 6 B 18 C 2 E 9.5 G 27 H 5 HG M4 x 0.7 JJ 5 KK 65 L 3.5 LD 22.5 LL 41 LW 13.5 M4 x 0.7 15.5 6 64 7.5 22 2 9.5 32 6.5 M4 x 0.7 8.5 80 4.5 24 51 M5 x 0.8 20 8 75 9.5 25 2 14 37 7.4 M5 x 0.8 7.5 95 5.5 27.5 61 M5 x 0.8 22.5 8 96.5 11 32.5

CJ2

Bore B C d H NTJ-015A 10 16 NTJ-010A 7 8.1 M4 X 0.7 3.2 8 9.2 M5 X 0.8 4 Clevis pins and set rings are attached.

CRQ2

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Size 10 15 20 30 40 Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 (mm) Q1 Size 20 30 40 M3, M4 M3, M4,

CJ5-S

Cylinder tube Stainless steel 304 Piston rod Stainless steel 304 Mounting nut Stainless steel 304 Rod end nut Stainless steel 304 Label protector PET CJ5SR CJ5SV NBR i Water resistant scraper FKM 10-14-6 7 Stainless Steel Cylinder Series CJ5-S Dimensions R V Basic style (B): CJ5BS NDn8 GA GB Piping port 2-M5 x 0.8 Piping port M5 x 0.8 MM NN CA CB RE A B D REC CX F NA NB A With head cover

CJ5-S

Steel Cylinder Series CJ5-S Dimensions R V Basic style (B): CJ5BS NDn8 GA GB Piping port 2-M5 x 0.8 Piping port M5 x 0.8 MM NN CA CB RE A B D REC CX F NA NB A With head cover port in axial location (R) BB H BA S + Stroke 0 0.3 0 0.3 CY Z + Stroke MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800