MB

+0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 0.10 0.30 +0.30 +0.10 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 40 14 19 24 26 26 36 20 22 28 40 40 46 30 40 50 60 60 92 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2.0 12 16 19 24 34 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 10 11 14 20 20 27 16 19 24 34 34 42 10 10 14 22 22 25 10 10 14 22 22

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

19 x 16 25 x 22 19 x 16 Tubing O.D.

Compact Cylinder Series CQS

(mm) Standard stroke Without auto switch With auto switch Without/With auto switch Long stroke Bore size (mm) CD hole H10 Rod d9 A B 34.5 35.5 42 47.5 CL 3.5 3.5 4.5 5 L 14 15.5 18.5 22.5 L1 45.5 46.5 61 67.5 A 22 22 29.5 32.5 B 39.5 40.5 52 57.5 CL 3.5 3.5 4.5 5 L 14 15.5 18.5 22.5 L1 65.5 66.5 82.5 89 A 32 32 41 44 B 59.5 60.5 73.5 79 CL 13.5 13.5 14.5 15 L 24 25.5 28.5 32.5 L1 12 16 20

CG5-S

(mm) Bore size (mm) WA WB WH W ZZ 20 22 16 23 30 118 25 22 16 25 30 123 32 22 16 28.5 25 125 40 22 16 33 20 143 50 25 18 40.5 20 167 63 25 18 47.5 20 167 80 30 22 60.5 20 201 100 31 22 71 20 202 10 Series CG5-S Dimensions R V Axial foot type (L)/CG5LNS S + Stroke H GA GB Width across flats B1 2P H1 D B LH I AL A K KA MM Width across flats NA LT M X Y X Y 8-J 4-LD C 0.1 LS + Stroke LX LZ ZZ

LEC-OM02704CN

30 L 10 B0.3 C A 3 6 0.3 -0.2 35 0 24 0 7 24 6 22 ()M4 35 11 .

JA/JAH/JB/JS

150 JAF125-27-200 JAF160-33-200 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500

JA/JAH/JB/JS

150 JAF125-27-200 JAF160-33-200 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500

CG5-S

(mm) Bore size (mm) WA WB WH W ZZ 20 22 16 23 30 118 25 22 16 25 30 123 32 22 16 28.5 25 125 40 22 16 33 20 143 50 25 18 40.5 20 167 63 25 18 47.5 20 167 80 30 22 60.5 20 201 100 31 22 71 20 202 10 Series CG5-S Dimensions R V Axial foot type (L)/CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT M X Y X Y 8-J 4-LD C 0.1 LS + Stroke LX

Cylinder with Lock

50 14 +0.070 0 14 0.050 0.093 20 +0.3 + 0.1 40 30 15 17 22 68 71 260 275 63 14 +0.070 0 14 0.050 0.093 20 +0.3 + 0.1 40 30 15 17 28 81 81 272 287 80 22 +0.084 0 22 0.065 0.117 30 +0.3 + 0.1 60 42 23 26 34 102 102 341 364 100 22 +0.084 0 22 0.065 0.117 30 +0.3 + 0.1 60 42 23 26 40 124 124 361 384 Center trunnion: MWBT Z + 1/2 stroke Port Cushion valve TY2 TY1 TDe8 TT TZ TX [mm] With

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

ZP

ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no

Style: C (Clean Room Applicable), Nominal Size: 10, Port Location: R (Body Side Direction)

Style: C (Clean Room Applicable), Nominal Size: Ø10, Port Location: R (Body Side Direction)

Style: Standard, Nominal Size: Ø10, Port Location: R (Body Side Direction)

Style: C (Clean Room Applicable), Nominal Size: 10

Style: Standard, Nominal Size: 10

Style: C (Clean Room Applicable), Nominal Size: Ø10, Port Location: R (Body Side Direction)

Style: Standard, Nominal Size: Ø10, Port Location: R (Body Side Direction)

Bore Size: 12mm, Symmetric Type: L (Symmetric), Stroke: 10mm, Adjuster: w/o Adjuster, Function: R (End Lock)