HRX-OM-R026

B operation Contact output signal 3 Sets alarm which is selected for contact output 3.

Model Selection 1

Manifold M5, 1/8, 1/4, (3/8) Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit 2, 3, 4.5, 6, 8, 10 1/8 to 1/2 0 to 3 (1) 17-3-25 VVX21/22/23 N.C./N.O. Manifold 1/8, 1/4, (3/8) 2, 3, 4.5, 6 17-2-74 VDW200/300 C.O. 3 port Single unit M5, 1/8, 1/4 0 to 0.9 1, 1.6, 2, 3, 4 Pilot operated Diaphragm operation 1/4 to 1 32A, 40A, 50A 10, 15, 20, 25, 35 40, 50 17-3-33 VXD21/22/23 N.C./N.O.

MGG

B 16 (23) B 21 (29) B B 18 (26) B B 21.5 (29.5) 20.5 (28.5) 19.5 (27.5) 17.5 (24.5) 20 27.5 27.5 27 24.5 25.5 27 28.5 27 24 30.5 29.5 21.5 (29.5) 20.5 (28.5) 19.5 (27.5) 17.5 (24.5) 16 (23) 21 (29) 18 (26) 25 30 30 29.5 27 25.5 27 28.5 27 24 30.5 29.5 22.5 (30.5) 21.5 (29.5) 20.5 (28.5) 17.5 (25.5) 16 (24) 22 (30) 19 (27) 32 33.5 33.5 33 30.5 26.5 28 29.5 28 25 31.5 30.5 24.5 (33.5) 23.5

13

Vacuum pressure Suction flow rate 13-5-5 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS-

SFOD-OMT0009CN

b) 2 1 (8) (14) (a) B1 A1 (17.7) 6 5 (c) 2 1 (18) A6 B6 15 16 L (11) (30.7) 10.4 [820m] (a) (b) L E C P * A B-1 2 L 1 A A-1 6 B B-2 ) 8 8m 5 B A-2 ) 3 A 10m COM-A/COM B-3 4 COM-B/ A-3 ) B 15m (c) Shield ) C 20m Vcc B-4 12 GND A-4 13 ) A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (14.2) (b) 2 1 (5.5) (14) (a) B A1 5 6 (17.7) 1 (c) 2 1 (18) A6 B6 (6.3) 15 16 L (11) (30.7) 82 No.SFOD-OMT0009CN-B

Table of Contents

Solid state switch D-F8 CUJ (As compared with SMC Series CU cylinders without magnet) Dimensions (Without magnet) Series Variations Bore size (mm) A(a) B(b) C(c) Bore size (mm) Rod end configuration Stroke (mm) Clean series 4 6 8 10 15 20 b Action Series Auto switch B Double acting Male thread Without thread None 4 10() 15() 13() 4 Single acting, Spring return 6 13(13) 19(22) 13(33) Double

One-touch Fittings Series KQ2

1 2 3 8 1 2 20.9 12 28.5 22 17 39.7 50.2 22 (71) (84) 71 100 26.5 22 20.9 34 25 16 Reference dimensions after R(PT) thread installation.

SZ3000

148 137.5 122.5 13 160.5 150 133 14 173 162.5 143.5 15 185.5 175 154 16 198 187.5 164.5 17 1-3-30 Cassette Type Manifold Non Plug-in Type Series SZ3000 Dimensions: SZ3000 Non Plug-in SS5Z3-60Stations B With external pilot 4One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8 24 13.3 (Pitch) P = 10.5 24 13.3 16.2 16.2 17 SV 36.7 34 34 B 2 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R

REA/REB

REAR25 20 21.5 40 28 72 5.6 M5 x 0.8 6.5 Rc 1/8 43 105 7 117 15 70 6 REAR32 26 24 50 35 79 7 M6 x 1 8.5 Rc 1/8 54 116 7 130 13 76 7 REAR40 34 26 60 40 93 7 M6 x 1 11 Rc 1/4 64 134 7 148 15 90 8 10-2-22 22 Sine Rodless Cylinder Basic Type Series REAR Proper Auto Switch Mounting Position (Detection at stroke end) A B RE A B REC C D CX 10 to 20 CY Auto switch model Bore size (mm) D-A9 A dimension

REA/REB

Note 2) 15 has internal magnets in the body. 10-2-70 70 Sine Rodless Cylinder Direct Mount Type Series REBR Dimensions: 15, 25, 32 Operating direction B Operating direction A Operating direction A K W HB HB HC RE A B X REC Piping port P (Plug) Operating direction A Piping port P (Plug) Operating direction B N H CX HA Y T CB 8-MM thread depth M HT HP CY 4-counterbore B Counterbore depth C

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Lead wire color Dot marking 18 19 14 15 Pink 16 17 20 21 22 Pink 23 24 25 13 Terminal no.

mb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22

70astamb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22

Compact Cylinder

(mm) D-A9 D-M9 D-F9 W D-F9BAL Auto switch model Symbol A B W A B W A B W Hs 22 24 27 30 36 41 20 25 32 40 50 63 15.5 15.5 19 20 13.5 15.5 8.5 10.5 12 12 18.5 20.5 11.5 11.5 15 16 9.5 11.5 5.5 7.5 9 9 15.5 17.5 3.5(1) 14.5 14.5 18 19 12.5 14.5 9.5 11.5 13 13 19.5 21.5 -9.5 -7.5 -6 -6 0.5 2.5 -0.5 1.5 3 3 9.5 11.5 5.5(3) Bore size (mm) 7 (4.5) 7 (4.5) 13.5(11.5) 15.5(13.5) The dimension inside

Air Cylinder Series CS1

B B B B B B A A A A A A A Bore size 125 140 160 180 200 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 9.5 7.5 13.5 12.5 7 5 3.5 1.5 7.5 5.5 10 8 15 13 12 10 16 14 9.5 7.5 6 4 10 8 12.5 10.5 17.5 15.5 The mounting position should be referred for reference only for the auto switch mounting position at the stroke end

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

116 18 13 28 5 15 24 62 20 Up to 300 7.5 10 33.5 M10 X 1.25 19.5 17 32 6 8 25.3 37 M26 X 1.5 45 8 15 120 22 13 5.5 15 30 62 26 Up to 300 7.5 12 37.5 M10 X 1.25 19.5 17 32 6 8 27.6 M26 X 1.5 39.3 34.5 45 8 15 122 22 13 5.5 15 64 26 Up to 300 14 22 41 8 10 33.6 46.5 21 10.7 47.8 M14 X 1.5 21.5 42.5 M32 X 2 50 11 154 24 16 7 19 88 32 With rod boot h l Symbol f e 1 to 50 51 to 100 101 to 150

HRX-OM-X037

(B contact). Contact output signal 5selects Signal type and N.O. (A contact ) or N.C. (B contact). Contact output signal 6selects Signal type and N.O. (A contact) or N.C. (B contact).

REC

B 4-LD LH MM 2-4 3.2 N N X X Y S + Stroke Y LX Z LS + Stroke LZ ZZ + Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore (mm) Stroke range 20 M8 x 1.25 Up to 700 18 15.5 40 13 26 40 8 13 10 41 5 8 33.5 5 6.8 25 186 40 55 20 30 25 M10 x 1.25 Up to 700 22 19.5 47 17 32 45.5 10 13 10 45 6 8 37.5 5.5 6.8 28 186 40 55 20 34.5 32 M10 x 1.25 Up to 1000 22 19.5 47 17 32 49.5

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

15 24 62 116 20 Up to 300 33.5 M10 X 1.25 19.5 17 32 10 7.5 6 8 25.3 37 M26 X 1.5 22 13 8 45 5.5 15 15 30 62 120 26 Up to 300 39.3 37.5 M10 X 1.25 34.5 19.5 17 32 12 7.5 6 8 27.6 M26 X 1.5 22 13 8 45 5.5 15 15 64 122 26 Up to 300 47.8 46.5 42.5 21 22 41 14 10.7 8 10 33.6 M14 X 1.5 21.5 M32 X 2 24 16 11 50 7 19 88 154 32 With rod boot h l Symbol e f 51 to 100 101 to 150 151 to 200 201 to

MQQ

L RR RR CL+ Stroke 10 15 6.5 12 8 6 A + Stroke 16 18 8 16 10 9 20 20 10 20 10 10 25 20 18 36 12 10 28 22 18 36 12 10 10-5-15 15 Series MQQ Accessory Bracket Dimensions Rod end thread adapter Rod end nut d NN rod MM D C C B H E F A B H Applicable bore (mm) Applicable bore (mm) Part no.