Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: Y Y = X = X = Long shaft side (mm) (mm) Long shaft side Long shaft side Y Y X X Size Size Body (B) Body (B) 10 10 1 to 14 1 to 14 1 to 14 1 to 14 Body (B) Body (A) Body (A) X = X = 15 15 1.5 to 18 1.5 to 18 1.5 to 18 1.5 to 18 Body (A) Y = Y = 20 20 1.5 to 20 1.5 to 20 1.5 to 20 1.5 to 20 Short shaft side Short shaft side 30 30 2 to 22 2 to 22 2 to 22 2 to 22 Short

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 10-20-78

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Vacuum pressure Suction flow rate 13-5-5 6 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS

Rotary Table/

Size: 10 to 50 Size: 1 to 7 Size: 70 to 200 Note) Only sizes 10, 20, 30 and 50 are available in clean series.

HRX-OM-W058

Status (5): 50 minutes passes after starting operation. Alarm monitoring has started. It shows that the "50 min" setting does not influence the alarm monitoring under these conditions.

HRX-OM-X027

Status (5): 50 minutes passes after starting operation. Alarm monitoring has started. It shows that the "50 min" setting does not influence the alarm monitoring under these conditions.

Vacuum Module Series ZX

Vacuum digital pressure switch unit (ZSE3) Solenoid valve rated voltage 21 22 23 24 2 outputs/without analog output 2 outputs/with analog output 1 output (with trouble detection)/without analog output 1 output (with trouble detection)/with analog output Caution 1 Note) 100 VAC 50/60 Hz 110 VAC 50/60 Hz 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Air operated (K6, K8, J3, J4, D3, D4) D 3 Note) Surge

Modular F.R.L. Units

22 28.5 34.5 34.5 J 58.5 58.5 65 72 72 R 5.4 5.4 6.5 8.5 8.5 F M36 x 1.5 M36 x 1.5 M45 x 1.5 M52 x 1.5 M52 x 1.5 Q 43.9 44.3 46 54 55.5 D 22 22 28.5 34.5 34.5 N 34 34 36 38 38 A 40 53 53 70 75 C 23.5 23.5 27 33.5 33.5 P2 1/8 1/8 1/8 1/8 1/8 M 30 30 41 50 50 T 55 55 65 70 70 P1 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 AR20-A AR25-A AR30-A AR40-A AR40-06-A 37.5 37.5 37.5 42.5 42.5 67.4

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

19 x 16 25 x 22 19 x 16 Tubing O.D.

21

Number of auto switches Same surface Different surfaces Same surface (n 2) 2 D-M9m/M9mW D-A9m 15 + 45 10 15 Note 1) Note 1) 45 45 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 D-H7BAL/H7NF 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 D-C73C/C80C D-H7C 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) (n 2) 2 D-B54/B64 D-G5NTL 15 + 50 10 15 75 75 + 55 (n 2) (n = 2, 4, 6) (n 2) 2 20 + 50 D-B59W

44

23 8 14 8 14 10 16 18 24 36 34 41 67 33 40 66 33 40 66 30 38 63 51 67 4 2.5 1.8 1.6 d 8 5 KQB2 Applicable tubing 4 3 2.3 2.6 H1 H2 KS KX 6 4 3.3 6 10 5.8 M A L KM 14 8 6 14 6.6 5.3 17 Connection thread 17 KF 17 25 10 7.5 6.8 30 M 22 27.1 17 7.6 17 25 H/DL L/LL 10 8 7.3 35 22 27.1 KC 17 26.6 12 9 8 45 22 28.7 17 8.5 KK 17 26.6 12 10 9 57 KK130 22 28.7 28 29.9 16 13 22 9.3 12 101 22 DM Reference

Vacuum Pad

13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK20-B5 P.50 ZP3B-T2BJ10-B5 P.50 Lateral With Adapter: Vacuum Inlet ZP3-10UM: ZP3-13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK3-B5 P.50 Lateral P.51 ZP3-015U: ZP3-02U: ZP3-035U: ZP3B-Y1J3-B3 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10UM: ZP3-13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK6-B5 P.50

Vacuum Pad

13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK20-B5 P.50 ZP3B-T2BJ10-B5 P.50 Lateral With Adapter: Vacuum Inlet ZP3-10UM: ZP3-13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK3-B5 P.50 Lateral P.51 ZP3-015U: ZP3-02U: ZP3-035U: ZP3B-Y1J3-B3 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10UM: ZP3-13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK6-B5 P.50

New

14 19 22 30 30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 47.5 50 50 50 52.5 52.5 52.5 38 47.5 46 47 52 50.5 51.5 23 25.5 25.5 25.5 28 28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water, Medium

Vacuum Pad

13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK20-B5 P.50 ZP3B-T2BJ10-B5 P.50 Lateral With Adapter: Vacuum Inlet ZP3-10UM: ZP3-13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK3-B5 P.50 Lateral P.51 ZP3-015U: ZP3-02U: ZP3-035U: ZP3B-Y1J3-B3 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-10UM: ZP3-13UM: ZP3-16UM: ZP3-10B: ZP3-13B: ZP3-16B: ZP3B-T2BK6-B5 P.50

Plug-in/Plug Lead: Single Unit

Nil E Yes Without light, with surge voltage suppressor Seal Metal seal Rubber seal 0 1 Coil voltage Function 1 2 3 Stations 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC D side U side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) (2) Applicable to DC sepecifications.

MLGP

50 50 Load weight m (kg) Load weight m (kg) 40 40 50 50 40 40 32 32 10 10 25 25 32 32 20 20 25 25 20 20 1 1 10 50 100 200 10 50 100 200 Eccentric distance l1 (mm) Eccentric distance l1 (mm) (16) Over 50 Stroke V = 400 mm/s (15) 50 Stroke or Less V = 400 mm/s 100 100 100 100 50 50 80 80 63 63 Load weight m (kg) Load weight m (kg) 50 50 10 10 40 40 32 32 25 25 1 20 20 1 10 50 100 200 0.7 10

MLGP

D200 200 100 -X 100 100 100 100 80 2080 80 63 Data 63 63 50 40 50 Load weight m (kg) Load weight m (kg) 50 40 40 32 10 10 32 32 1 10 100 50 50 200 1 5 100 10 200 Eccentric distance l1 (mm) Eccentric distance l1 (mm) 9-11-13 13 Series MLGP Vertical Downward Mounting (Ball bushing bearing) Operating pressure: 0.4 MPa MLGPL20/25 (21) 30 Stroke or Less V = 400 mm/s (22) Over 30 Stroke V = 400

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Function Standard type (1.0W) High pressure type (1.5W) Low wattage type (0.5W) External pilot Coil voltage H Note 1) 1 2 3 4 5 6 9 100VAC(50/60Hz) 200VAC(50/60Hz) 110VAC(50/60Hz) 220VAC(50/60Hz) 24VDC 12VDC Others Y Note 1) R Note 1) Applicable to DC specification Note 2) When specifying more than one option, combine symbols in alphabetical order. 22 How To Order Series VQZ Manifold Connector

Electric Slide Tables

0.000 20 40 60 0.000 20 40 60 0.000 25 50 75 100 125 Load [N] Load [N] Load [N] LESH16 LESH16 LESH16 Lr = 120 mm 0.50 0.3 0.08 Table displacement [mm] Table displacement [mm] Table displacement [mm] LESH16-100 LESH16-100 LESH16-100 0.40 0.06 0.2 0.30 LESH16-50 0.04 LESH16-50 0.20 LESH16-50 0.1 0.02 0.10 0.000 100 200 300 400 0.000 50 100 150 200 0.00 50 100 150 200 Load [N] Load [N] Load