Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

300 500 400 300 200 200 100 1 2 3 4 5 10 20 30 1002 3 4 5 10 20 30 0.5 40 50 100 Load weight (kg) Load weight (kg) 20 Horizontal collision: P = 0.5 MPa 40 Horizontal collision: P = 0.5 MPa 2000 1500 2000 1500 Collision speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution

100

Specific Product Precautions 22 A ZL3/ZL6 Series Exhaust Characteristics (Representative value) ZL3H ZL3M 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 0.3 0.4 0.5 400 500 450 400 350 300 250 200 150 100 50 0 0.2 0.6 Vacuum pressure Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure 350

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution Load weight (kg) Load weight (kg) 1.

0.5

600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] Installation distance [mm] Installation distance [mm] Installation distance [mm] IZF10R

VQC

B (+) () 22 SOL. A (+) () 23 Station 12 SOL. B (+) () 24 COM () (+) 25 Special wiring specifications (options) COM () (+) 26 Positive COM spec. Negative COM spec. COM COM 25 26 COM COM 23 24 Note) When using the negative COM specification, use valves for negative COM. 21 22 Mixed single and double wiring are available as options.

SMC Pneumatic Clean Series

10-/21-CA263 11-/22-CA240 11-/22-CA250 11-/22-CA263 Relief type 50, 75, 100, 125, 3/8 Non-lube Double acting, single rod Air cushion Available 150, 200, 250, 300, 1/4 Vacuum suction type 350, 400, 450, 500 3/8 Note) Consult SMC for long stroke.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Ambient and fluid temperature Mounting bracket Bore size (mm) 10 16 Foot bracket Flange CJ-L016C CJK-L016C CJ-F016C CJK-F016C 50 to 400 mm/s Stroke length tolerance Piston speed +1.0 0 Basic style/Axial foot style/Flange style Mounting style 10-/11-: Fluorine grease, 21-/22-: Lithium soap based grease 10-/21-: Grade 2 11-/22-: Grade 1 Grease Particle generation grade (Refer to front matter

Thermo-chiller

Required installation space 8 e r o m r o m m 0 0 Required installation space for ventilation and maintenance 400 mm or more 800 mm or more 800 mm or more 400 mm = 15.7 inch 800 mm = 31.5 inch 800 mm or more Piping Caution 78.7 inch (2000 mm or more) 1.

Multi-channel Digital Sensor Monitor ( compatible)

Conductor size (mm2) Overall diameter (mm) Colour of cover SMC product No. (1 pc.) 0.8 to 1.0 Red ZS-28-C 26-24 0.14-0.2 1.0 to 1.2 Yellow ZS-28-C-1 (28) (0.08) 1.2 to 1.6 Orange ZS-28-C-2 1.0 to 1.2 Green ZS-28-C-3 1.2 to 1.6 Blue ZS-28-C-4 22-20 0.3-0.5 1.6 to 2.0 Gray ZS-28-C-5 Do not cut the insulator.

A_HEC-OM-K001

Leak alarm Error 22 occurs. During operation or maintenance of this unit, do not disable interlock function of each device.

Title not found

LEFS16A-400 q Check that actuator label for model number. This matches the controller. w Check Parallel I/O configuration matches (NPN or PNP). q w Refer to the operation manual for using the products.

MTS

22 17 21 21 21 21 47.5 47.5 47.5 47.5 20 15 17 37 43.5 33 43.5 33 16 23 19 24.5 24.5 19 27 27 27 27 63.5 63.5 63.5 63.5 22.5 17 23 43 59.5 39 59.5 39 20 26 22 25.5 25.5 22 30 30 30 30 67 67 67 67 23.5 20 26 46 63 42 63 42 25 32 25 28.5 28.5 25 36 36 36 36 88.5 88.5 88.5 88.5 26.5 23 32 52 84.5 48 84.5 48 32 32.5 30 30 30 30 36.5 36.5 36.5 36.5 102.5 102.5 102.5 102.5 28 28 32.5 52.5 98.5

HRX-OM-R039

Automatic monitoring Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts. Alarm monitoring starts when it reaches the set time. Monitoring start timer Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts.

125

Bore size System Average speed [mm/s] MB, CA2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 500 mm 40 50 63 80 100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal A 1000 900 800 700 600 500 400 300 200 100 0 B 1000 900 800 700 600 500 400 300 200 100 0 C Bore size System Average speed [mm/s] CS1/CS2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 300 mm 125 140 160

OMR0031

CN1: Power Supply Plug . 22 5.1 Power supply plug specifications . 22 5.2 Electrical wiring specifications . 22 5.3 Power supply plug wiring . 23 6. CN4: Counter Plug . 24 2 - 6.1 Counter plug specifications . 24 6.2 Counter plug wiring . 24 7.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Purchase orders are available in units of 10 pieces. d d KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 32 35 39 43 32 35 39 43 16 18 16 18 6 8 10 12 6 8.5 10 20.5 22 20.5 22 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 11.5 DIN rail mounting bracket [-D,-D0,-D] VVQ2000-57A This

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Purchase orders are available in units of 10 pieces. d d KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 32 35 39 43 32 35 39 43 16 18 16 18 6 8 10 12 6 8.5 10 20.5 22 20.5 22 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 11.5 DIN rail mounting bracket [-D,-D0,-D] VVQ2000-57A This

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

17 22 21 47.5 21 21 33 47.5 21 33 47.5 43.5 17 15 20 47.5 43.5 37 16 23 24.5 19 24.5 63.5 27 19 63.5 27 63.5 27 39 17 22.5 63.5 27 39 43 59.5 23 59.5 20 26 25.5 22 25.5 67 30 22 67 30 42 67 30 42 67 30 26 20 23.5 63 46 63 25 32 25 28.5 25 28.5 36 88.5 36 48 88.5 88.5 36 48 26.5 88.5 36 52 84.5 32 23 84.5 32 32.5 30 30 30 30 36.5 102.5 36.5 36.5 48.5 102.5 36.5 48.5 102.5 98.5 32.5 28 28

Smooth Cylinder

Through-hole/CQ2YB, CDQ2YB Both ends tapped/CQ2YA, CDQ2YA Both ends tapped (mm) Bore size (mm) 63 O1 R O1 thread R R M10 x 1.5 18 80 M12 x 1.75 22 100 M12 x 1.75 22 H thread effective depth C 4-N through 8-O counter bore U Q F 2-P (Port size) (Rc, NPT, G) I 22 M E D Z 11 Lead wire min. bending radius 10 Auto switch D-A7, A8 K M E S J B + Stroke A + Stroke L Rod end male thread H1 Rod end

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 25 25 25 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 16 0.1 16 16 0.2 0.05 0.1 0.2 0.1 0.05 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max. MY3A max. MY3B max. MY3A max. MY3B max. MY3A max.