PFxx-OMS0001CN L/min(PFMC7501) [ P_1] OUT1 [ 500] 500 L/min(PFMC7102) 29 [F 1] [ 1000] 1000 L/min(PFMC7202) [ 25] 25 L/min(PFMC7501) [ H_1] OUT1 [ 50] 50 L/min(PFMC7102) [ 100] 100 L/min(PFMC7202) [ CoL] OUT1 [SoG] ONOFF [ oU2] OUT2 2 [ HYS] [ 2ot] OUT2 2 [ 2_P] [ 250] 250 L/min(PFMC7501) [ P_2] OUT2 2 [ 500] 500 L/min(PFMC7102) 37 [F 2] [ 1000] 1000 L/min(PFMC7202) [ 25] 25 L/min(PFMC7501) [ H_2] OUT2
160 JAL20-8-100 JAL25-10-150 JAL32-10-100 JAL40-12-125 JAL40-12-150 JAL40-12-175 JAL50-16-150 JAL63-16-200 JAL80-20-250 JAL100-24-300 JAL100-27-150 JAL125-27-200 JAL160-33-200 11.5 14 14 17.5 17.5 17.5 23 23 28 35 35 38 55 30 42 42 52 52 52 56 56 70 80 80 88 116 19 25 25 30 30 30 38 38 47 58 58 69 89 1000 2000 2000 4400 4400 4400 9000 9000 14000 22000 22000 22000 55000 12 16 16 19 19 19 22
160 JAL20-8-100 JAL25-10-150 JAL32-10-100 JAL40-12-125 JAL40-12-150 JAL40-12-175 JAL50-16-150 JAL63-16-200 JAL80-20-250 JAL100-24-300 JAL100-27-150 JAL125-27-200 JAL160-33-200 11.5 14 14 17.5 17.5 17.5 23 23 28 35 35 38 55 30 42 42 52 52 52 56 56 70 80 80 88 116 19 25 25 30 30 30 38 38 47 58 58 69 89 1000 2000 2000 4400 4400 4400 9000 9000 14000 22000 22000 22000 55000 12 16 16 19 19 19 22
(Refer to page 12 for contact protection box.)
Description 1 Piston seal 2 large 1 small 2 1 each large and small 2 1 2 Governor assembly 4 3 Check valve 2 4 Gasket 2 Rod seal 5 1 8 8 12 Mounting screw 6 12 7 Cover C assembly 1 Grease pack 1 2 1 2 1 The grease pack has 10 g of grease.
20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR
20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR
RR CL + Stroke RR 15 6.5 12 8 6 10 A + Stroke 18 8 16 10 9 16 20 10 20 10 10 20 20 18 36 12 10 25 22 18 36 12 10 28 8 Series MQQ Accessory Dimensions Rod end thread adapter Rod end nut d NN MM Rod D C C B H E F A B H Applicable bore size (mm) Applicable bore size (mm) Part no.
(Values at the initial period) Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 1000 Hz. Test was performed at both energized and deenergized states in the axial direction and at the right angles to the main valve and armature.
Threshold for alarm generation generation and other settings Code Alarm name A.RUN P.RUN A.STP Display Default Settable OFF Display range AL39 Internal unit fan stoppage Set time AL40 Dust-proof filter maintenance 500 h 1 to 9 h 12 AL41 Power stoppage AL42 Compressor standby AL43 12 Fan breaker trip AL44 12 Fan inverter error AL45 Compressor breaker trip 13 AL46 Compressor inverter error
(Put packing B w on the surface contacting to the end plate.) (11 stations) 4 stations (12 stations) 5 stations 3. For a style with a D-sub connector, open the cover !4 and insert the pin of lead wire assembly !0 as shown in the right figure.
8 6.5 Section A-A Air blow port Air blow port 2 x M3 x 0.5 thread depth 10 26 32 12 11 2 x 3.4 6/For elbow 1/4"/For elbow 1/4" 11.5 12 24.5 22 7 18.5 16 10 10.3 Refer to page 457 for dimensions of the model with bracket. 463 IZN10 Series Specific Product Precautions 1 Be sure to read this before handling the products.
Straight type 49 1 V100 Cable length 1 500 mm 300 mm 2 3 4 7 1000 mm DIN Terminal Type 2000 mm 5000 mm 5 D V115 Light/surge voltage suppressor Rated voltage Nil Without light/surge voltage suppressor S Z With surge voltage suppressor (Non-polar type) With light/surge voltage suppressor (Non-polar type) 5 24 VDC 6 12 VDC 50 60 1 100 VAC Hz 50 60 2 200 VAC Hz DOZ is not available.
17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.
17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.
XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve
XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve
Zener barrier) for apparatus group IIC with the following maximum values: Ui = 28 V Ii = 225 mA (resistively limited) Pi = 1 W Ci = 0 nF Li = 0 mH Confirm the solenoid input voltage at the lead wires is 12 VDC 10%. The resistance of the solenoid valve is R 20 + 278 3% Ohm at 68F (20C). Do not bend or pull cables repeatedly.
Proper Mounting Position (Detection at Stroke End) and Mounting Height 32, 40, 50, 63 D-M9/D-M9W/D-A9 D-M9V/D-M9WV/D-A9V Hs B W A A A B (mm) D-A9V D-A9 D-M9 D-M9W D-M9V D-M9WV A B A B Bore size (mm) W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 42 10 <15> 10.5 8.5 (6)