Table of Contents

2 3 4 5 n U side VDW23-GVDW23-GVDW23-GVDW23-G70 31.5 21 18.5 (OUT port) n-1/8 n-M5 x 0.8 11 P = 22 11 4.5 1.5 54 6 32 6 (19.5) 9.5 11 9.5 11 4-M4 x 0.7 46 10 24 10 When w/o bracket, M3 threads at both ends (4 positions) can be used for other purposes.

CV/MVGQ

11 13 16 147 157 173 189 203 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 Up to 600 601 to 1000 Up to 600 601 to 1000 Up to 750 751 to 1000 Up to 750 751 to 1000 Long stroke The minimum stroke of the one with rod boot is 20 mm or more.

CV/MVGQ

11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 Long stroke The minimum stroke of the one with rod boot is 20 mm or more.

MB

11 11 NCA D-A5/A6 D-A59W D-A3/A44 13 13 13 14 14 15 D9 9 10 11 11 11 10 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV 7 5.5 5.5 7 7.5 6.5 5.5 -X D-Y7BAL 6 3.5 3.5 3.5 4 4.5 5 20D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F 3.5 4 4 4.5 4.5 4.5 5 Data D-G39/K39 D-P5DWL 9 4 9 4 9 4 10 4.5 10 4 11 11 4.5 4.5 These values are given as guidelines including the hysteresis and are not guaranteed.

RHC

D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65 + 50 (n2) D-G5

MLU

CD-MU02 CD-MU03 CD-MU04 CD-MU05 DZ 8 10 10 14 CZ 8 10 10 14 DY 9 11 13 16 CX 9 11 13 16 DX 18 22 26 32 CT 9.5 11 14 17 DT 9.5 11 14 17 CR 5.3 6.4 8.4 10.5 DR 5.3 6.4 8.4 10.5 CL 26 42 54 64 DL 26 42 54 64 Part no. MU-C02 MU-C03 MU-C04 MU-C05 Part no.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Direct Operated Pilot Operated Refer to pages 7, 9, 11, 25, 35, and 39 for details. 2-Port Solenoid Valve Improved environmental resistance due to the stainless steel coil cover [IP67 enclosure] Refer to pages 46 to 50 for details.

Microspeed Cylinder

(MPa) Bore size (mm) 0.035 (0.025) 1 (0.5) 0.04 (0.03) 20, 25, 32, 40 0.025 0.5 0.035 (0.025) 1(1) 0.03 0.025 1 Figures in ( ) are for 11-CM2X. 12, 16 20, 25, 32, 40 12, 16 1(0.5) 0.5 20, 25 20, 25 Figures in ( ) are for 11-CQSX. 1MPa = 145psi 1in/s = 25.4mm/s II Microspeed Cylinder/Double Acting: Single Rod Series CJ2X 10, 16 The dimensions are the same as the standard double acting single

New

6 47.5 50 50 50 52.5 52.5 52.5 38 47.5 46 47 52 50.5 51.5 23 25.5 25.5 25.5 28 28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water, Medium Vacuum, Oil Replacement Parts DIN Connector Part No.

CUJ

Table 2 Applicable auto switch models Refer to pages 11 to 14 for detailed specifications.

7

U E OUT T OUT IN M 2 x P Port size J K L F I (D) (mm) Electrical entry M Model Flat terminal Conduit terminal Conduit C37, Stainless steel body Port size P A B C E F I J K L D Aluminum body T T 1/4, 3/8 1/2 88 (93.5) 22.5 30 U 49.5 (55) V U T 55.5 (61) U 22 27 24 30 50 20 4.5 5 11 13 37.5 42.5 25 25 49.5 (55) VXD2 3 A 99.5 68.5 47.5 23 ( ): Denotes the Normally Open (N.O.) dimensions.

OMR0031

Monitor and Test Mode of the Controller . 41 11. Operation . 44 11.1 Return to origin position . 44 11.2 Positioning operation . 46 11.3.

Secondary Batteries

02 11 stations 2 stations (2) Specified layout (Up to 23 solenoids possible.) 20 20 stations Note 1) Double wiring specifications: Single, double, 3 position and 4 position solenoid valves can be used at all of the manifold stations.

Angle Seat Valve /

Fluid Nil No L Yes Thread type*1 5 Steam Nil Rc A G B NPT Body material/Port size/Orifice diameter Symbol Body material Port size Orifice diameter A Bronze (CAC) *1 The thread type for the main piping and pilot piping is the same. 3/8 11 B 1/2 14 C 3/4 18 D Stainless steel 316L equivalent Pressure type 3/8 11 E 1/2 14 F 3/4 18 Nil Standard H High pressure Other Special Options Special Entry

Microspeed Cylinders CJ2X/CUX/CQSX/CQ2X/CM2X

speed (mm/s) 0.025 0.5 0.06 1 0.06 1 0.035 (0.025) 1 (0.5) 32, 40 32, 40 10, 16 10, 16 0.01 0.5 0.05 0.5 Figures in ( ) are for 11-CQ2X 20, 25, 32 50, 63, 80, 100 Air Cylinder Series CM2X Air Cylinder Series 10-/11-CM2X Compact Cylinder Series CQSX Compact Cylinder Series 10-/11-CQSX Bore sizes (mm) Min. operating pressure (MPa) Min. operating pressure (MPa) Min. piston speed (mm/s) Min.

Parallel Type Air Gripper

Model Screw Max. tightening Maximum screw-in depth (L mm) torque (Nm) MHZ2-10 M3 x 0.5 0.9 6 MHZ2-16 M4x0.7 1.6 4.5 MHZ2-20 M5 x 0.8 3.3 8 L L MHZ2-25 M6x1 5.9 10 MHZ2-32 M6x1 5.9 10 MHZ2-40 M8 x 1.25 13.7 13 Model Screw Max. tightening torque (Nm) Maximum screw-in depth (L mm) MHZ2-10 M3 x 0.5 0.69 5 MHZ2-16 M4x0.7 2.1 8 MHZ2-20 M5 x 0.8 4.3 10 MHZ2-25 M6x1 7.3 12 MHZ2-32 M6x1 7.9 13 MHZ2

MHx-OMU0057

MH*-OMU0057 / / MHZ2-10* MHZ2-16* MHZ2-20* MHZ2-25* MHZ2-32* MHZ2-40* 1. 1-1. 2. 2-1 2-2 2-3 2-4 2-5 2-6 2-7 3. 3-1. 3-2. 3-3.

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

MHZ2 MHZJ2 Low Profile MHQ Compact design even during actuation.

CNS

/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL Auto switch model Bore size (mm) Data 125 140 160 14 D-Z7/Z80 14.5 13 Hs A D-A3/A44 D-A5/A6 10 10 10 17 17 17 D-A59W Ht D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 12 13 7 6 6 7 D-Y7BAL D-F59F/F5/J5 D-F5W/J59W D-F5BAL/F5NTL B 5 5 5.5 Proper Auto Switch Mounting Position/ Auto Switch Mounting Height D-G39/K39 11 11 10 Since this is a guideline including hysteresis

Model Selection 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 7, 11, 15, 14, 20, 16, 25, 22, 32, 28, 40, 33, 50 Low vacuum to 1 Pilot pressure: 0.1 to 0.7 Single unit 1/8 to 2 (2B) 17-4-13 VNB N.C./N.O./C.O.