SMC Corporation of America
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Also, regularly check there is no deterioration due to ozone. 444 Technical Data IZN10 Series Blow Velocity Distribution (Supply Pressure: 0.3 MPa) IZS (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 IZN IZN IZF ZVB IZD IZE IZH 0 0 100 100 200 200 Distance [mm] Distance [mm] 3 [m/s] 14 [m/s] 300 300 2 [m/s] 11 [m/s] 400 400 1 [m/s] 9 [m/s] 500 30

When using a feedback sensor at higher than 50 mm, refer to the graphs below.

YB-03 32, 40 12 7 25 9 34 11.5 depth 7.5 Joint YB-05 50, 63 12 9 32 11 42 14.5 depth 8.5 K ( across flats) H (With locking) Weight (g) Bore size (mm) RS T1 T2 V W Part No. YB-03 32, 40 80 9 6.5 10 18 50 d2 d1 YB-05 50, 63 120 11 6.5 12 22 60 L UT C UA (mm) Part No.

Non-standard motor switch P N S Ground ball screw Rolled ball screw Slide screw Non-standard motor 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) Standard motor 100/115VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor Nil W None N.C.

Selectable option for manifold (Refer to i on pages 11 and 12, and y on page 13.)

CDA2 B 50 200 X1184 B31J S With built-in special magnet Number of auto switches Cylinder stroke Description 2 pcs. 1 pc.

Stroke FB FA G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB H J JC K L MM ML NN 12 (10 x 2) 10, 20, 30, 50, 100 33 24.5 6 6.5 2 17 11 5.5 58 8.5 1.5 8.5 11 M3 x 0.5 7.5 M2.5 x 0.45 16 (12 x 2) 33 24.5 6 6.5 2 18 11 5.5 64 9 3 9 11 M4 x 0.7 10 M3 x 0.5 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z 12 (10 x 2) 3.4 6.5 2.5 M3 x 0.5 6 16 18.5 8 26 14 49.5 39 52 10.2

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulfuric acid ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

100, 125 63, 80 40 50 40 50 A14 A16 M14 x 1 M16 x 1.5 63 63 B8 M8 x 1.25 80 80 B10 M10 x 1.5 B12 B16 M12 x 1.75 M16 x 1.5 100 100 125 125 Pad type Material H Heavy duty N S NBR Silicon rubber U Urethane rubber F Fluoro rubber E EPR 13-11-72 5 Vacuum Pad: Large/Heavy Duty Type Vertical Vacuum Entry without Buffer Series ZPT ZPT H-A14 (Male thread) 40 50 ZPT H-B (Female thread) 40 50

Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Hexagon socket head taper thread plug) 98.6 126 66 55 8 50 37 (Y) 50 (Y) 50 11 43 209 Operating port Rc 1/8 Operating direction (B) (Hexagon socket head taper thread plug) Operating direction (B) (A) 28 14 28 14 13 A 12 76 62 17 36 A

Nil s n A 12mm 32 32 Bore size 32 40 50 63 32mm 40mm 50mm 63mm 40, 50, 63 A B 16.5mm 19.5mm 40, 50, 63 50, 63 Nil Without auto switch (built-in magnet) Auto switch type 40 is only available with A:16.5mm clevis width. Select applicable auto switch models from the table below. Cylinder stroke (mm) 32, 40, 50, 63 50, 75, 100, 125, 150 Built-in magnet cylinder part nos.

S kit can be used by connecting to gateway unit.

Descrption Subplate Note VQZ100-S-01T 1 Body VQZ100 1/8" Aluminum die cast Metal seal VQZ200-S-01T Spool/Sleeve VQZ200 1/8" Stainless steel 2 Rubber seal VQZ200-S-02T Spool valve VQZ200 1/4" Aluminum/NBR 3 VQZ300-S-02T Piston VQZ300 1/4" Resin 4 VQZ300-S-03T Pilot valve VQZ300 3/8" 26 Base Mounted Type Series VQZ Dimensions: VQZ100 Dimensions: VQZ100 (mm) Valve Scale: 45% Grommet (G): VQZ115

40 200 Overhang L (mm) Overhang L (mm) Graph (7) Maximum Speed: Up to 800 (mm/s) 20 30 40 50 10 2 3 4 5 Weight W (kg) 40 32 1 0.5 0.4 0.3 0.2 16 25 20 12 0.1 50 100 200 5 20 30 40 10 Overhang L (mm) 8-10-6 6 Model Selection Series MTS Horizontal Mounting 8 Maximum speed: Up to 500 mm/s Maximum speed: Up to 300 mm/s Graph (8) Stroke: Up to 10 stroke Graph (11) Stroke: Up to 10 stroke 0.1

V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0

B 9 (-S) (-T) (-S) (-T) 18 22 10 SOL. A 23 6 Station 8 11 SOL. B 24 19 12 25 C6 (EXH port) 6 One-touch fitting 13 COM 13 Connector terminal no. Standard manifolds are for double wiring, but mixed wiring (single and double wiring) can be specified as options.

Blow Velocity Distribution (Supply Pressure: 0.3 MPa) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0 0 100 100 Distance [mm] Distance [mm] 200 200 4 m/s 14 m/s 300 300 11 m/s 3 m/s 400 400 8 m/s 2 m/s 500 30 30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 8 IZN10E Series Flow Rate Characteristics qEnergy

Nil s n A 12mm 32 32 Bore size 32 40 50 63 32mm 40mm 50mm 63mm 40, 50, 63 A B 16.5mm 19.5mm 40, 50, 63 50, 63 Nil Without auto switch (built-in magnet) Auto switch type 40 is only available with A:16.5mm clevis width. Select applicable auto switch models from the table below. Cylinder stroke (mm) 32, 40, 50, 63 50, 75, 100, 125, 150 Built-in magnet cylinder part nos.

moment 70 MXW25 70 100 50 30 40 N m 50 MXW20 Pitch moment Yaw moment Roll moment 25 30 40 MXW20 Model 20 Moment N m Moment N m Mp/Mep My/Mey Mr 15 MXW16 20 MXW16 12 5 5 3 MXW 8 10 15 7 10 MXW12 MXW12 10 10 6 MXW12 4 5 7 5 4 3 20 20 12 MXW16 MXW8 MXW8 3 2.5 40 40 25 MXW20 2 110 110 65 2 1.5 MXW25 50 100 200 300 500 700 50 100 200 300 500 Piston speed mm/s Piston speed mm/s (Graph3) (Graph2

, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.